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    • 62. 发明申请
    • Ultra low-loss CMOS compatible silicon waveguides
    • 超低损耗CMOS兼容硅波导
    • US20060133754A1
    • 2006-06-22
    • US11314305
    • 2005-12-21
    • Vipulkumar PatelDavid PiedeMargaret GhironPrakash Gothoskar
    • Vipulkumar PatelDavid PiedeMargaret GhironPrakash Gothoskar
    • G02B6/10
    • G02F1/025G02B6/122G02B6/1228G02B2006/12061G02B2006/12097
    • A low loss optical waveguiding structure for silicon-on-insulator (SOI)-based arrangements utilizes a tri-material configuration including a rib/strip waveguide formed of a material with a refractive index less than silicon, but greater than the refractive index of the underlying insulating material. In one arrangement, silicon nitirde may be used. The index mismatch between the silicon surface layer (the SOI layer) and the rib/strip waveguide results in a majority of the optical energy remaining within the SOI layer, thus reducing scattering losses from the rib/strip structure (while the rib/strip allows for guiding along a desired signal path to be followed). Further, since silicon nitirde is an amorphous material without a grain structure, this will also reduce scattering losses. Advantageously, the use of silicon nitride allows for conventional CMOS fabrication processes to be used in forming both passive and active devices.
    • 用于绝缘体上硅(SOI)的布置的低损耗光波导结构利用三材料构造,其包括由折射率小于硅的材料形成的肋/条波导,但大于 底层绝缘材料。 在一种布置中,可以使用硅氮化硅。 硅表面层(SOI层)和肋/条形波导之间的折射率失配导致剩余在SOI层内的大部分光学能量,从而减少了肋/条带结构的散射损耗(而肋/条允许 用于沿着要遵循的期望信号路径引导)。 此外,由于硅氮化物是不具有晶粒结构的无定形材料,因此也将降低散射损耗。 有利地,使用氮化硅允许常规CMOS制造工艺用于形成无源器件和有源器件。
    • 70. 发明申请
    • Silicon nanotaper couplers and mode-matching devices
    • 硅纳米器耦合器和模式匹配器件
    • US20050201683A1
    • 2005-09-15
    • US11054205
    • 2005-02-09
    • Margaret GhironPrakash GothoskarRobert MontgomeryVipulkumar PatelSoham PathakKalpendu ShastriKatherine Yanushefski
    • Margaret GhironPrakash GothoskarRobert MontgomeryVipulkumar PatelSoham PathakKalpendu ShastriKatherine Yanushefski
    • G02B6/122G02B6/14G02B6/26G02B6/34G02B6/42
    • G02B6/1228G02B6/4204
    • An arrangement for providing optical coupling between a free-space propagating optical signal and an ultrathin silicon waveguide formed in an upper silicon layer of a silicon-on-insulator (SOI) structure includes a silicon nanotaper structure formed in the upper silicon layer (SOI layer) of the SOI structure and coupled to the ultrathin silicon waveguide. A dielectric waveguide coupling layer, with a refractive index greater than the index of the dielectric insulating layer but less than the refractive index of silicon, is disposed so as to overly a portion of the dielectric insulating layer in a region where an associated portion of the SOI layer has been removed. An end portion of the dielectric waveguide coupling layer is disposed to overlap an end section of the silicon nanotaper to form a mode conversion region between the free-space propagating optical signal and the ultrathin silicon waveguide. A free-space optical coupling arrangement (such as a prism or grating) is disposed over the dielectric waveguide coupling layer and used to couple a propagating optical signal between free space and the dielectric waveguide coupling layer and thereafter into the ultrathin silicon waveguide.
    • 用于在自由空间传播的光信号和形成在绝缘体上硅(SOI))结构的上硅层中的超薄硅波导之间提供光耦合的装置包括形成在上硅层(SOI层)中的硅纳米锥结构 )和耦合到超薄硅波导。 具有大于介电绝缘层的折射率但小于硅的折射率的折射率的介质波导耦合层被布置成过度地在介电绝缘层的一部分中的相关部分 SOI层已被去除。 电介质波导耦合层的端部设置成与硅纳米锥的端部部分重叠以在自由空间传播的光信号和超薄硅波导之间形成模式转换区域。 自由空间光耦合装置(诸如棱镜或光栅)设置在介质波导耦合层之上,用于将传播的光信号耦合在自由空间与介质波导耦合层之间,然后耦合到超薄硅波导中。