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    • 62. 发明授权
    • Detection of seed layers on a semiconductor device
    • 半导体器件上种子层的检测
    • US07586597B2
    • 2009-09-08
    • US11548453
    • 2006-10-11
    • Ji Young YimJae Hong Kim
    • Ji Young YimJae Hong Kim
    • G01N21/00
    • H01L21/76871
    • A device and/or method which detects a seed layer and a device and/or method of forming layers on a semiconductor device. The device which forms layers on the semiconductor device may include a metal layer forming unit (which forms a metal layer on a wafer), a copper seed layer forming unit (which forms a copper seed layer on the metal layer), a wafer alignment device (which includes a wafer alignment unit which aligns the wafer to a predetermined position), a copper seed layer detecting unit (which is positioned above the wafer alignment unit to detect the copper seed layer formed on the wafer), and a plating unit (which forms a copper interconnection layer on the copper seed layer).
    • 一种检测种子层的装置和/或方法,以及在半导体器件上形成层的器件和/或方法。 在半导体器件上形成层的器件可以包括金属层形成单元(其在晶片上形成金属层),铜籽晶层形成单元(在金属层上形成铜籽晶层),晶片对准装置 (其包括将晶片对准到预定位置的晶片对准单元),铜籽晶层检测单元(位于晶片对准单元上方以检测形成在晶片上的铜籽晶层),以及电镀单元(其 在铜籽晶层上形成铜互连层)。
    • 70. 发明授权
    • Touch sensor panel
    • 触摸传感器面板
    • US09063621B2
    • 2015-06-23
    • US13540861
    • 2012-07-03
    • Jae Hong KimDo Hwan Oh
    • Jae Hong KimDo Hwan Oh
    • G06F3/044
    • G06F3/044G06F2203/04101G06F2203/04104
    • A touch sensor panel used for a display device is provided. The touch sensor panel can precisely determine a touch location with a given area of electrodes, can reduce the number of channels required, and can reduce the influence of noise. In addition, the touch sensor panel can improve sensing resolution with a given number of electrode channels, can be robust against noise, and can improve linearity by precisely determining a touch location and visibility of displayed image by dummy electrodes.
    • 提供了用于显示装置的触摸传感器面板。 触摸传感器面板可以精确地确定具有给定面积的电极的触摸位置,可以减少所需的通道数量,并且可以减少噪声的影响。 此外,触摸传感器面板可以提供具有给定数量的电极通道的感测分辨率,可以抵抗噪声的鲁棒性,并且可以通过由虚拟电极精确地确定显示图像的触摸位置和可视性来提高线性度。