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    • 70. 发明授权
    • Interferometric apparatus for measuring moving object and optical interferometry method for measuring moving object
    • 用于测量移动物体的干涉仪和用于测量移动物体的光学干涉测量方法
    • US07580133B2
    • 2009-08-25
    • US11447164
    • 2006-06-06
    • Nobuaki UekiHidenori Takahashi
    • Nobuaki UekiHidenori Takahashi
    • G01N21/84G01B11/02
    • G01N21/45G01B11/0675
    • A moving-object measuring interferometric apparatus comprises: a light beam output section outputting a measuring beam; an interference optical system obtaining interference light by projecting the measuring beam onto an object and by allowing light reflected from the object or transmitted light having passed through the object to interfere with reference light; an image pickup section obtaining image information by receiving the interference light on an image pickup surface; and an image pickup timing control section setting a momentary image pickup period during which the object is regarded as being stationary to be contained in a light reception acceptable period of the image pickup surface and controlling the interference light to enter the image pickup surface only during the momentary image pickup period.
    • 移动物体测量干涉仪包括:输出测量光束的光束输出部分; 干涉光学系统通过将测量光束投射到物体上并且允许从物体反射的光或穿过物体的透射光干涉参考光来获得干涉光; 图像拾取部分,通过在图像拾取表面上接收干涉光来获得图像信息; 以及图像拾取定时控制部分,其设置将所述对象视为静止的瞬时图像拾取周期,以被包含在所述图像拾取表面的光接收可接受周期中,并且仅在所述摄像表面期间控制所述干涉光进入所述图像拾取表面 瞬间图像拾取期。