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    • 61. 发明授权
    • Reflective mask blank for EUV lithography
    • EUV光刻用反光罩
    • US07906259B2
    • 2011-03-15
    • US12205967
    • 2008-09-08
    • Kazuyuki HayashiKazuo KadowakiTakashi SugiyamaMasaki Mikami
    • Kazuyuki HayashiKazuo KadowakiTakashi SugiyamaMasaki Mikami
    • G03F1/00
    • G03F1/24B82Y10/00B82Y40/00G03F1/22
    • To provide a reflective mask blank for EUV lithography having an absorber layer, which presents a low reflectance to a light in the wavelength ranges of EUV light and pattern inspection light, and which is easily controlled to have desired film composition and film thickness. A reflective mask blank for EUV lithography, comprising a substrate, and a reflective layer for reflecting EUV light and an absorber layer for absorbing EUV light formed in this order on the substrate, wherein the absorber layer contains tantalum (Ta), boron (B), silicon (Si) and nitrogen (N), and in the absorber layer, the B content is at least 1 at % and less than 5 at %, the Si content is from 1 to 25 at %, and the compositional ratio of Ta to N (Ta:N) is from 8:1 to 1:1.
    • 为了提供具有吸收层的EUV光刻用的反射掩模板,其对EUV光和图案检查光的波长范围内的光呈现低反射率,并且易于控制以具有所需的膜组成和膜厚度。 一种用于EUV光刻的反射掩模板,包括基板和用于反射EUV光的反射层和用于吸收在基板上依次形成的EUV光的吸收层,其中吸收层包含钽(Ta),硼(B) ,硅(Si)和氮(N),并且在吸收层中,B含量为至少1原子%且小于5原子%,Si含量为1至25原子%,Ta的组成比 至N(Ta:N)为8:1至1:1。
    • 69. 发明授权
    • Black toner
    • 黑色墨粉
    • US06838218B2
    • 2005-01-04
    • US10162702
    • 2002-06-06
    • Kazuyuki HayashiHiroko MoriiKeisuke Iwasaki
    • Kazuyuki HayashiHiroko MoriiKeisuke Iwasaki
    • C09C1/00C09C3/06C09C3/12G03G9/08G03G9/087G03G9/09G03G9/00
    • G03G9/0904G03G9/0825
    • A black toner comprises a binder resin and black composite particles having an average particle diameter of 0.005 to 0.30 μm, and comprising: extender pigments as core particles; a gluing agent-coating layer formed on surface of the respective core particles; and a black pigment coat uniformly formed on the gluing agent-coating layer in an amount of 1 to 500 parts by weight based on 100 parts by weight of the extender pigments. Such a black toner using black composite particles having not only excellent blackness, fluidity and light resistance, but also an excellent dispersibility in binder resins, which toner also exhibits excellent blackness, fluidity and light resistance.
    • 黑色调色剂包括粘合剂树脂和平均粒径为0.005至0.30μm的黑色复合颗粒,并且包含:作为核心颗粒的增量颜料; 形成在各个核心颗粒的表面上的胶粘剂涂层; 和基于100重量份的增量颜料,以1-500重量份的量均匀地形成在胶粘剂涂层上的黑色颜料涂层。 这种使用黑色复合颗粒的黑色调色剂不仅具有优异的黑色度,流动性和耐光性,而且在粘合剂树脂中也具有优异的分散性,该调色剂也表现出优异的黑色,流动性和耐光性。