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    • 64. 发明授权
    • Interferometric modulation of radiation
    • US07042643B2
    • 2006-05-09
    • US10078282
    • 2002-02-19
    • Mark W. Miles
    • Mark W. Miles
    • G02B27/00
    • G09G3/3466B82Y20/00G01J3/26G02B6/12G02B26/001G02B26/02G02B26/0833G02B26/0841G02B26/085G02B26/0858G02B27/01G02B27/0101G02B27/017G02B2006/12104G02B2027/0112G02B2027/0118G02F1/13725G02F1/216G02F2203/03G09G3/2074G09G2300/0452
    • An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope. In another aspect, a structure for modulating light comprises modulators of light each including an interference cavity for causing interference modulation of the light. The structure further comprises an optical compensation mechanism component coupled to the modulators which enhances the optical performance of the structure, the component comprising one or more of a photonic crystal array, a mutlilayer array of dielectric mirrors, and an array of microlenses. In another aspect, a device for modulating light comprises an array of interference modulators, each comprising a primary and a secondary mirror which in a quiescent state is spaced from the primary mirror by a first distance so that light reflected from the modulator is of a first color, and which in a second state, under influence of a bias voltage, is spaced from the primary mirror by a second distance which is less than the first distance so that the modulator reflects light of a second color. The device further comprises an optical compensation mechanism component coupled to the array to compensate for changes in a color of light reflected by the array due to changes in a angle at which the array is viewed. In another aspect, a method for fabricating a reflective display comprises fabricating an array of interference modulators, each comprising a primary and a secondary mirror which in a quiescent state is spaced on the primary mirror by a first distance so that light reflected from the modulator is of a first color, and which in a second state, under influence of a biased voltage is spaced from the primary mirror by a second distance which is less than the first distance so that the modulator reflects light of a second color. The method further comprises coupling an optical compensation mechanism component to the array of interference modulators to compensate for changes in a color of light reflected by the array due to changes in an angle at which the array is viewed.
    • 69. 发明授权
    • Photonic MEMS and structures
    • US08169687B2
    • 2012-05-01
    • US12360005
    • 2009-01-26
    • Mark W. Miles
    • Mark W. Miles
    • G02B26/00G02F1/01
    • An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.