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    • 65. 发明授权
    • Illuminating optical device
    • 照明光学装置
    • US4918583A
    • 1990-04-17
    • US340444
    • 1989-04-19
    • Yuji KudoKoichi Matsumoto
    • Yuji KudoKoichi Matsumoto
    • G02B3/00G02B19/00G03F7/20
    • G02B27/0955G02B19/0028G02B19/0047G02B27/0994G02B3/005G03F7/70058
    • An illuminating optical device having an optical integrator capable of receiving a light flux from a light source and substantially forming a plane light source comprising a plurality of light source images and uniformly illuminating an object includes a square-pillar-like internal reflection type integrator having a plurality of reflecting surfaces capable of reflecting the light flux from the light source and forming a plurality of virtual images of the light source on a plane near the entrance surface thereof, a fly-eye type integrator comprising a plurality of lens elements receiving the light flux from the light source and capable of forming a plurality of light source images on a plane, the lens elements being juxtaposed in proximity to one another, and relay lens means provided between the two integrators so that the exit surface of one of the two integrators which is adjacent to the light source and the entrance surface of the other integrator which is adjacent to the object are substantially conjugate with each other.
    • 一种照明光学装置,其具有能够从光源接收光束并且基本上形成包括多个光源图像的平面光源并且均匀地照射物体的光学积分器包括:方柱状内反射型积分器,其具有 多个反射面,其能够反射来自光源的光束,并且在其入射面附近的平面上形成多个光源的虚拟图像;飞眼型积分器,包括接收光束的多个透镜元件 并且能够在平面上形成多个光源图像,透镜元件彼此靠近并置,并且设置在两个积分器之间的中继透镜装置,使得两个积分器之一的出射表面 邻近物体ar的光源和另一个积分器的入射表面 e基本上彼此共轭。
    • 67. 发明授权
    • Projection-exposing apparatus
    • 投影曝光装置
    • US4806987A
    • 1989-02-21
    • US135377
    • 1987-12-21
    • Takashi MoriKoichi MatsumotoTsutomu TakaiMasaichi MurakamiKyoichi Suwa
    • Takashi MoriKoichi MatsumotoTsutomu TakaiMasaichi MurakamiKyoichi Suwa
    • H01L21/30G03F7/20H01L21/027G03B27/42
    • G03F7/70475
    • A projection-exposing apparatus comprises a projecting optical system for projecting an image of a reticle having a predetermined pattern onto a wafer, and a stage for causing a relative shifting movement between a position of the wafer and a position of the reticle. A first exposure is effected for projecting and exposing the reticle image pattern from the projection optical system in a first area on the wafer and then the stage is shifted by a predetermined amount to effect second exposure for projecting and exposing the reticle image pattern in a second area positioned adjacent to the first area on the wafer thereby the reticle image being projected and exposed onto different areas on the same wafer. The stage causes the relative shifting movement between the reticle and the wafer in such a manner that the reticle image pattern obtained by the first exposure and the reticle image pattern obtained by the second exposure are overlapped with each other on the wafer by a predetermined amount.
    • 投影曝光装置包括投影光学系统,用于将具有预定图案的掩模版的图像投影到晶片上,以及用于在晶片的位置和光罩之间进行相对移动的台。 进行第一曝光以在晶片上的第一区域中投影和曝光来自投影光学系统的标线片图像图案,然后将该台移动预定量,以进行第二次曝光,以在第二曝光中投影和曝光标线图像图案 区域定位成与晶片上的第一区域相邻,从而掩模版图像被投影并暴露在同一晶片上的不同区域上。 该阶段以这样的方式引起标线片和晶片之间的相对移动运动,使得通过第一曝光获得的标线图像图案和通过第二次曝光获得的标线图像图案在晶片上彼此重叠预定量。