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    • 66. 发明授权
    • Manufacturing method of optical diffraction grating element with
serrated gratings having uniformly etched grooves
    • 具有均匀蚀刻凹槽的锯齿形光栅的光学衍射光栅元件的制造方法
    • US5279924A
    • 1994-01-18
    • US908866
    • 1992-07-01
    • Keiji SakaiKatsuhiro KuboYukio KurataTakahiro MiyakeYoshio Yoshida
    • Keiji SakaiKatsuhiro KuboYukio KurataTakahiro MiyakeYoshio Yoshida
    • G02B5/18G11B7/135G03C5/00
    • G11B7/1353G02B5/1814G02B5/1857G02B5/1871
    • The method of manufacturing an optical diffraction grating element of the present invention is characterized in adopting an ion beam made from a gas chemically reacting with a glass substrate when forming a diffraction grating having a serrated profile upon the glass substrate through an ion beam etching method. Also, when manufacturing an optical diffraction grating element that is divided into a plurality of regions whereon diffraction gratings having different diffraction angles with respect to an incident light are provided, the method of the present invention is characterized in forming slits into a resist film disposed upon a transparent substrate such as a glass substrate, in accordance with the patterns of the diffraction gratings, such that the width of the slits is constant irrespectively of the regions. Accordingly, the method of manufacturing an optical diffraction grating element of the present invention enables to improve the diffraction efficiency of the optical diffraction grating element, and to enhance the optical efficiency of an optical head device. The SN ratio of the output signals released by the optical head device may be thus improved and the servo error control executed accurately.
    • 本发明的光学衍射光栅元件的制造方法的特征在于,在通过离子束蚀刻法在玻璃基板上形成具有锯齿状的衍射光栅时,采用由与玻璃基板发生化学反应的气体制成的离子束。 此外,当制造被分成多个区域的光学衍射光栅元件,其中衍射光栅相对于入射光具有不同衍射角的衍射光栅时,本发明的方法的特征在于将狭缝形成为设置在 根据衍射光栅的图案,诸如玻璃基板的透明基板,使得狭缝的宽度与区域无关地是恒定的。 因此,本发明的光学衍射光栅元件的制造方法能够提高光学衍射光栅元件的衍射效率,提高光学头装置的光学效率。 可以提高由光头装置释放的输出信号的SN比,并且精确地执行伺服误差控制。