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    • 62. 发明授权
    • T-gate forming method for high electron mobility transistor and gate structure thereof
    • 用于高电子迁移率晶体管的T型栅极形成方法及其栅极结构
    • US07932540B2
    • 2011-04-26
    • US11700946
    • 2007-02-01
    • Yoon-Ha JeongKang-Sung LeeYoung-Su KimYun-Ki HongSung-Woo Jung
    • Yoon-Ha JeongKang-Sung LeeYoung-Su KimYun-Ki HongSung-Woo Jung
    • H01L29/66
    • H01L29/7787H01L29/42316H01L29/66462
    • A T-gate forming method for a high electron mobility transistor includes the steps of: coating a first, a second and a third resist, each having an electron beam sensitivity different from each other, on a semiconductor substrate; performing a first exposure process by using an electron beam on the semiconductor substrate and then selectively developing the third resist; defining a gate head area by selectively developing the second resist to have a developed width wider than that of the third resist; performing a second exposure process by using an electron beam on the semiconductor substrate and then selectively developing the first resist in a bent shape at a temperature lower than in the development of the second and the third steps; and depositing metallic materials on the resists and then removing them to form a T-gate.
    • 一种用于高电子迁移率晶体管的T形栅形成方法包括以下步骤:在半导体衬底上涂覆各自具有彼此不同的电子束灵敏度的第一,第二和第三抗蚀剂; 通过在半导体衬底上使用电子束然后选择性地显影第三抗蚀剂来执行第一曝光处理; 通过选择性地显影所述第二抗蚀剂来限定栅极头区域,以具有比所述第三抗蚀剂宽的显影宽度; 通过在半导体衬底上使用电子束进行第二曝光处理,然后在低于第二和第三步骤的显影的温度下,以弯曲形状选择性地显影第一抗蚀剂; 并将金属材料沉积在抗蚀剂上,然后去除它们以形成T形栅极。
    • 65. 发明申请
    • Apparatus and Method for Selecting Optimal Signal Using Auxiliary Equalization in Diversity Receiver
    • 在分集接收机中使用辅助均衡选择最优信号的装置和方法
    • US20080291336A1
    • 2008-11-27
    • US12096641
    • 2006-11-07
    • Ju-Yeun KimYoung-Su KimJae-Hwui BaeHyun LeeJong-Soo LimSoo-In Lee
    • Ju-Yeun KimYoung-Su KimJae-Hwui BaeHyun LeeJong-Soo LimSoo-In Lee
    • H04B7/08
    • H04B7/0814H04L25/03012H04L2025/03426H04L2025/03535
    • Provided are an apparatus and method for selecting an optimal signal using auxiliary equalization in a diversity receiver. The optimal signal selecting apparatus includes: a plurality of sync recovery units for extracting sync information from baseband signals, which are candidate signals, except a baseband signal selected as a current optimal signal a plurality of auxiliary equalizers for channel-equalizing the candidate signals based on the extracted sync information; a plurality of SNR measuring units for measuring signal-to-noise ratios (SNRs) of the candidate signals inputted to the auxiliary equalizers and the candidates signals equalized in the auxiliary equalizers; and an optimal signal selector for selecting an optimal candidate signal from the candidate signals by using the extracted sync information and the measured SNRs, and replacing the optimal signal with the optimal candidate signal when reception quality of the current optimal signal is poor.
    • 提供了一种用于在分集接收机中使用辅助均衡来选择最佳信号的装置和方法。 最佳信号选择装置包括:多个同步恢复单元,用于从作为候选信号的基带信号中提取同步信息,除了选择为当前最优信号的基带信号,多个辅助均衡器,用于对候选信号进行信道均衡,基于 提取的同步信息; 多个SNR测量单元,用于测量输入到辅助均衡器的候选信号的信噪比(SNR)和在辅助均衡器中均衡的候选信号; 以及最优信号选择器,用于通过使用所提取的同步信息和测量的SNR从候选信号中选择最佳候选信号,并且当当前最佳信号的接收质量差时,用最佳候选信号替换最佳信号。
    • 67. 发明申请
    • T-gate forming method for high electron mobility transistor and gate structure thereof
    • 用于高电子迁移率晶体管的T型栅极形成方法及其栅极结构
    • US20080108188A1
    • 2008-05-08
    • US11700946
    • 2007-02-01
    • Yoon-Ha JeongKang-Sung LeeYoung-Su KimYun-Ki HongSung-Woo Jung
    • Yoon-Ha JeongKang-Sung LeeYoung-Su KimYun-Ki HongSung-Woo Jung
    • H01L21/338
    • H01L29/7787H01L29/42316H01L29/66462
    • A T-gate forming method for a high electron mobility transistor includes the steps of: coating a first, a second and a third resist, each having an electron beam sensitivity different from each other, on a semiconductor substrate; performing a first exposure process by using an electron beam on the semiconductor substrate and then selectively developing the third resist; defining a gate head area by selectively developing the second resist to have a developed width wider than that of the third resist; performing a second exposure process by using an electron beam on the semiconductor substrate and then selectively developing the first resist in a bent shape at a temperature lower than in the development of the second and the third steps; and depositing metallic materials on the resists and then removing them to form a T-gate.
    • 一种用于高电子迁移率晶体管的T形栅形成方法包括以下步骤:在半导体衬底上涂覆各自具有彼此不同的电子束灵敏度的第一,第二和第三抗蚀剂; 通过在半导体衬底上使用电子束然后选择性地显影第三抗蚀剂来执行第一曝光处理; 通过选择性地显影所述第二抗蚀剂来限定栅极头区域,以具有比所述第三抗蚀剂宽的显影宽度; 通过在半导体衬底上使用电子束进行第二曝光处理,然后在低于第二和第三步骤的显影的温度下,以弯曲形状选择性地显影第一抗蚀剂; 并将金属材料沉积在抗蚀剂上,然后去除它们以形成T形栅极。