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61. 发明授权

US08729661B2 Semiconductor structure and method for manufacturing the same 有权
标题翻译：半导体结构及其制造方法
公开(公告)号：US08729661B2
公开(公告)日：2014-05-20
申请号：US13379533
申请日：2011-04-25
申请人： Zhijiong Luo , Haizhou Yin , Huilong Zhu
发明人： Zhijiong Luo , Haizhou Yin , Huilong Zhu
IPC分类号： H01L21/70
CPC分类号： H01L21/02647 , H01L21/02639 , H01L21/76229
摘要： A semiconductor structure and a method for manufacturing the same are disclosed. The method comprises: disposing a first dielectric material layer on a first semiconductor layer and defining openings in the first dielectric material layer; epitaxially growing a second semiconductor layer on the first semiconductor layer via the openings defined in the first dielectric material layer, wherein the second semiconductor layer and the first semiconductor layer comprise different materials from each other; and forming plugs of a second dielectric material in the second semiconductor layer at positions where the openings are defined in the first dielectric material layer and also at middle positions between adjacent openings. According to embodiments of the disclosure, defects occurring during the heteroepitaxial growth can be effectively suppressed.
摘要翻译：公开了一种半导体结构及其制造方法。该方法包括：在第一半导体层上设置第一介电材料层并在第一介电材料层中限定开口; 通过限定在第一介电材料层中的开口在第一半导体层上外延生长第二半导体层，其中第二半导体层和第一半导体层包括彼此不同的材料; 以及在所述第二半导体层中形成所述第一介电材料层中所述开口的位置以及在相邻开口之间的中间位置处形成第二电介质材料的插塞。根据本公开的实施例，可以有效地抑制在异质外延生长期间发生的缺陷。

62. 发明授权

US08729638B2 Method for making FINFETs and semiconductor structures formed therefrom 有权
标题翻译：制造FINFET和由其形成的半导体结构的方法
公开(公告)号：US08729638B2
公开(公告)日：2014-05-20
申请号：US13696071
申请日：2011-11-30
申请人： Huilong Zhu , Zhijiong Luo , Haizhou Yin
发明人： Huilong Zhu , Zhijiong Luo , Haizhou Yin
IPC分类号： H01L29/76 , H01L29/94 , H01L31/062 , H01L31/113 , H01L31/119
CPC分类号： H01L29/7856 , H01L29/66795 , H01L29/7848 , H01L29/7851
摘要： A method for making FinFETs and semiconductor structures formed therefrom is disclosed, comprising: providing a SiGe layer on a Si semiconductor substrate and a Si layer on the SiGe layer, wherein the lattice constant of the SiGe layer matches that of the substrate; patterning the Si layer and the SiGe layer to form a Fin structure; forming a gate stack on top and both sides of the Fin structure and a spacer surrounding the gate stack; removing a portion of the Si layer which is outside the spacer with the spacer as a mask, while keeping a portion of the Si layer which is inside the spacer; removing a portion of the SiGe layer which is kept after the patterning, to form a void; forming an insulator in the void; and epitaxially growing stressed source and drain regions on both sides of the Fin structure and the insulator.
摘要翻译：公开了一种用于制造FinFET和由其形成的半导体结构的方法，包括：在Si半导体衬底上提供SiGe层和SiGe层上的Si层，其中SiGe层的晶格常数与衬底的晶格常数相匹配; 图案化Si层和SiGe层以形成Fin结构; 在Fin结构的顶部和两侧上形成栅极堆叠以及围绕栅极堆叠的间隔物; 在间隔物作为掩模的同时，除去间隔物外部的Si层的一部分，同时保持间隔物内部的Si层的一部分; 去除在图案化之后保留的SiGe层的一部分，以形成空隙; 在空隙中形成绝缘体; 并在鳍结构和绝缘体的两侧外延生长应力源极和漏极区。

63. 发明授权

US08710556B2 Semiconductor device comprising a Fin and method for manufacturing the same 有权
标题翻译：包括Fin的半导体器件及其制造方法
公开(公告)号：US08710556B2
公开(公告)日：2014-04-29
申请号：US12937652
申请日：2010-06-25
申请人： Huilong Zhu , Haizhou Yin , Zhijiong Luo , Qiagqing Liang
发明人： Huilong Zhu , Haizhou Yin , Zhijiong Luo , Qiagqing Liang
IPC分类号： H01L29/76 , H01L27/12 , H01L21/336
CPC分类号： H01L29/66636 , H01L29/66795 , H01L29/66803 , H01L29/7848 , H01L29/785
摘要： The present application discloses a semiconductor device comprising a fin of semiconductive material formed from a semiconductor layer over a semiconductor substrate and having two opposing sides perpendicular to the main surface of the semiconductor substrate; a source region and a drain region provided in the semiconductor substrate adjacent to two ends of the fin and being bridged by the fin; a channel region provided at the central portion of the fin; and a stack of gate dielectric and gate conductor provided at one side of the fin, where the gate conductor is isolated from the channel region by the gate dielectric, and wherein the stack of gate dielectric and gate conductor extends away from the one side of the fin in a direction parallel to the main surface of the semiconductor substrate, and insulated from the semiconductor substrate by an insulating layer. The semiconductor device has an improved short channel effect and a reduced parasitic capacitance and resistance, which contributes to an improved electrical property and facilitates scaling down of the transistor.
摘要翻译：本申请公开了一种半导体器件，其包括由半导体衬底上的半导体层形成并具有垂直于半导体衬底的主表面的两个相对侧的半导体材料的鳍; 源极区域和漏极区域，设置在所述半导体衬底中，邻近所述鳍片的两端并被所述鳍片桥接; 设置在所述翅片的中央部的通道区域; 以及设置在鳍的一侧的栅极电介质和栅极导体的堆叠，其中栅极导体通过栅极电介质与沟道区隔离，并且其中栅极电介质和栅极导体的堆叠远离翅片在平行于半导体衬底的主表面的方向上，并且通过绝缘层与半导体衬底绝缘。半导体器件具有改善的短沟道效应和减小的寄生电容和电阻，这有助于改善电性能并且有助于晶体管的缩小。

64. 发明授权

US08541280B2 Semiconductor structure and method for manufacturing the same 有权
公开(公告)号：US08541280B2
公开(公告)日：2013-09-24
申请号：US13380654
申请日：2011-04-18
申请人： Haizhou Yin , Zhijiong Luo , Huilong Zhu
发明人： Haizhou Yin , Zhijiong Luo , Huilong Zhu
IPC分类号： H01L21/336
CPC分类号： H01L21/823807 , H01L21/28518 , H01L21/28525 , H01L21/76805 , H01L21/823425 , H01L21/823814 , H01L21/823871 , H01L23/485 , H01L29/41725 , H01L29/41783 , H01L29/517 , H01L29/518 , H01L29/66628 , H01L29/66636 , H01L29/7848 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides a method for manufacturing a semiconductor structure, comprising the steps of: depositing an interlayer dielectric layer (105) on a semiconductor substrate (101) to cover a source/drain region (102) and a gate stack on the semiconductor substrate (101); etching the interlayer dielectric layer and the source/drain region, so as to form a contact hole (110) extending into the source/drain region; conformally forming an amorphous layer (111) on an exposed part of the source/drain region; forming a metal silicide layer (113) on a surface of the amorphous layer (111); and filling the contact hole (110) with a contact metal (114). Correspondingly, the present invention further provides a semiconductor structure. The present invention etches the source/drain region so that the exposed part comprises the bottom and a sidewall, thereby expanding the contact area between the contact metal in the contact hole and the source/drain region, and reducing the contact resistance. The present invention effectively eliminates EOR defects caused by the amorphous ion implantation by forming an amorphous substance by a selective deposition.

65. 发明申请

US20130200456A1 Semiconductor Substrate, Integrated Circuit Having the Semiconductor Substrate, and Methods of Manufacturing the Same 有权
标题翻译：半导体基板，具有半导体基板的集成电路及其制造方法
公开(公告)号：US20130200456A1
公开(公告)日：2013-08-08
申请号：US13696995
申请日：2011-11-29
申请人： Huilong Zhu , Zhijiong Luo , Haizhou Yin , Huicai Zhong
发明人： Huilong Zhu , Zhijiong Luo , Haizhou Yin , Huicai Zhong
IPC分类号： H01L27/12 , H01L27/092 , H01L21/762
CPC分类号： H01L27/12 , H01L21/743 , H01L21/762 , H01L21/84 , H01L27/092 , H01L27/1203 , H01L29/78648 , H01L2924/0002 , H01L2924/00
摘要： The present invention relates to a semiconductor substrate, an integrated circuit having the semiconductor substrate, and methods of manufacturing the same. The semiconductor substrate for use in an integrated circuit comprising transistors having back-gates according to the present invention comprises: a semiconductor base layer; a first insulating material layer on the semiconductor base layer; a first conductive material layer on the first insulating material layer; a second insulating material layer on the first conductive material layer; a second conductive material layer on the second insulating material layer; an insulating buried layer on the second conductive material layer; and a semiconductor layer on the insulating buried layer, wherein at least one first conductive via is provided between the first conductive material layer and the second conductive material layer to penetrate through the second insulating material layer so as to connect the first conductive material layer with the second conductive material layer, the position of each of the first conductive vias being defined by a region in which a corresponding one of a first group of transistors is to be formed.
摘要翻译：本发明涉及半导体衬底，具有半导体衬底的集成电路及其制造方法。根据本发明的包括具有背栅的晶体管的集成电路中使用的半导体衬底包括：半导体基底层; 半导体基底层上的第一绝缘材料层; 第一绝缘材料层上的第一导电材料层; 在所述第一导电材料层上的第二绝缘材料层; 在所述第二绝缘材料层上的第二导电材料层; 第二导电材料层上的绝缘掩埋层; 以及在所述绝缘埋层上的半导体层，其中，在所述第一导电材料层和所述第二导电材料层之间设置有至少一个第一导电通孔，以穿透所述第二绝缘材料层，以将所述第一导电材料层与第二导电材料层，每个第一导电通孔的位置由要形成第一组晶体管中的对应一个的区域限定。

66. 发明授权

US08420489B2 High-performance semiconductor device and method of manufacturing the same 有权
标题翻译：高性能半导体器件及其制造方法
公开(公告)号：US08420489B2
公开(公告)日：2013-04-16
申请号：US12996809
申请日：2010-06-25
申请人： Haizhou Yin , Huilong Zhu , Zhijiong Luo
发明人： Haizhou Yin , Huilong Zhu , Zhijiong Luo
IPC分类号： H01L21/336
CPC分类号： H01L29/4966 , H01L21/26586 , H01L29/51 , H01L29/66537 , H01L29/66545 , H01L29/78
摘要： A method of manufacturing a semiconductor device, wherein thermal annealing of the source/drain regions is performed before reverse Halo implantation to form a reverse Halo implantation region. The method comprises: removing the dummy gate to expose the gate dielectric layer, so as to form an opening; performing reverse Halo implantation on the substrate via the opening, so as to form a reverse Halo implantation region in the channel of the device; activating the dopants in the reverse Halo implantation region by annealing; and performing subsequent device processing. Deterioration of the gate stack due to the reverse Halo ions implantation may be avoided by the present invention, such that the reverse Halo ions implantation may be applied to the device with a metal gate stack, and the short channel effects may be alleviated and controlled, thereby the performance of the device is enhanced.
摘要翻译：一种制造半导体器件的方法，其中在反向光晕注入之前进行源极/漏极区域的热退火以形成反向光晕注入区域。该方法包括：去除虚拟栅极以露出栅极电介质层，以形成开口; 经由开口在衬底上进行反向光晕注入，以在器件的沟道中形成反向光晕注入区域; 通过退火激活反向卤素注入区域中的掺杂剂; 并执行后续的设备处理。通过本发明可以避免由于反向卤素离子注入引起的栅极堆叠的劣化，使得可以用金属栅极叠层将相反的Halo离子注入施加到器件，并且可以减轻和控制短沟道效应，从而增强了设备的性能。

67. 发明申请

US20130082354A1 Semiconductor Structure and Method for Manufacturing the Same 有权
标题翻译：半导体结构及其制造方法
公开(公告)号：US20130082354A1
公开(公告)日：2013-04-04
申请号：US13580966
申请日：2012-05-14
申请人： Haizhou Yin , Huilong Zhu , Zhijiong Luo
发明人： Haizhou Yin , Huilong Zhu , Zhijiong Luo
IPC分类号： H01L29/36 , H01L21/20
CPC分类号： H01L29/785 , H01L21/7624 , H01L21/823431 , H01L21/845 , H01L29/66795
摘要： The present invention provides a method for manufacturing a semiconductor structure, comprising the steps of: providing a semiconductor substrate, forming an insulating layer on the semiconductor substrate, and forming a semiconductor base layer on the insulating layer; forming a sacrificial layer and a spacer surrounding the sacrificial layer on the semiconductor base layer, and etching the semiconductor base layer by taking the spacer as a mask to form a semiconductor body; forming a dielectric film on sidewalls of the semiconductor body; removing the sacrificial layer and the semiconductor body located under the sacrificial layer to form a first semiconductor fin and a second semiconductor fin; and forming a retrograde doped well structure on the inner walls of the first semiconductor fin and the second semiconductor fin, wherein the inner walls thereof are opposite to each other. Correspondingly, the present invention further provides a semiconductor structure. In the present invention, a retrograde doped well structure is formed on the sidewalls of the two semiconductor fins that are opposite to each other, so that the width of the source/drain depletion layer may be effectively reduced, and thereby the short channel effect is reduced.
摘要翻译：本发明提供一种制造半导体结构的方法，包括以下步骤：提供半导体衬底，在半导体衬底上形成绝缘层，并在绝缘层上形成半导体基底层; 在所述半导体基底层上形成包围所述牺牲层的牺牲层和间隔物，并且通过以所述间隔物作为掩模来蚀刻所述半导体基底层以形成半导体本体; 在所述半导体主体的侧壁上形成电介质膜; 去除位于牺牲层下面的牺牲层和半导体本体以形成第一半导体鳍片和第二半导体鳍片; 以及在所述第一半导体翅片和所述第二半导体翅片的内壁上形成逆向掺杂的阱结构，其中所述内壁彼此相对。相应地，本发明还提供一种半导体结构。在本发明中，在两个相互相对的两个半导体鳍片的侧壁上形成逆向掺杂阱结构，从而可以有效地减小源/漏耗尽层的宽度，从而短沟道效应为减少

68. 发明申请

US20130049138A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US20130049138A1
公开(公告)日：2013-02-28
申请号：US13634266
申请日：2011-11-18
申请人： Huilong Zhu , Haizhou Yin , Zhijiong Luo
发明人： Huilong Zhu , Haizhou Yin , Zhijiong Luo
IPC分类号： H01L29/78 , H01L21/28
CPC分类号： H01L21/823431
摘要： The present disclosure provides a semiconductor device and a method for manufacturing the same. The semiconductor device comprises: a semiconductor layer; a first fin being formed by patterning the semiconductor layer; and a second fin being formed by patterning the semiconductor layer, wherein: top sides of the first and second fins have the same height; bottom sides of the first and second fins adjoin the semiconductor layer; and the second fin is higher than the first fin. According to the present disclosure, a plurality of semiconductor devices with different dimensions can be integrated on the same wafer. As a result, manufacturing process can be shortened and manufacturing cost can be reduced. Furthermore, devices with different driving capabilities can be provided.
摘要翻译：本发明提供一种半导体器件及其制造方法。半导体器件包括：半导体层; 通过图案化半导体层形成第一鳍片; 并且通过图案化半导体层形成第二鳍片，其中：第一鳍片和第二鳍片的顶侧具有相同的高度; 第一和第二散热片的底面邻接半导体层; 第二鳍高于第一鳍。根据本公开，可以将多个具有不同尺寸的半导体器件集成在同一晶片上。结果，可以缩短制造工序，降低制造成本。此外，可以提供具有不同驱动能力的装置。

69. 发明申请

US20130032777A1 Semiconductor Device and Manufacturing Method thereof 审中-公开
标题翻译：半导体器件及其制造方法
公开(公告)号：US20130032777A1
公开(公告)日：2013-02-07
申请号：US13376237
申请日：2011-08-05
申请人： Haizhou Yin , Zhijiong Luo , Huilong Zhu
发明人： Haizhou Yin , Zhijiong Luo , Huilong Zhu
IPC分类号： H01L29/06 , H01L21/20 , B82Y99/00 , B82Y40/00
CPC分类号： H01L29/45 , B82Y10/00 , H01L29/1606 , H01L29/42316 , H01L29/66431 , H01L29/7781 , H01L29/78618 , H01L29/78684 , H01L51/0048 , H01L51/0562
摘要： The present invention discloses a semiconductor device and a manufacturing method thereof. The method comprises the steps of providing a substrate on which a graphene layer or carbon nanotube layer is formed; exposing part of the graphene layer or carbon nanotube layer after forming a gate structure on the graphene layer or carbon nanotube layer, wherein the gate structure comprises a gate stack, a spacer and a cap layer, the cap layer is located on the gate stack, and the spacer surrounds the gate stack and the cap layer; epitaxially growing a semiconductor layer on the exposed graphene layer or carbon nanotube layer; and forming a metal contact layer on the semiconductor layer. In the present invention, the semiconductor layer is formed on the graphene layer or carbon nanotube layer, and then the metal contact layer is formed on the semiconductor layer, instead of forming the metal contact layer directly from the graphene layer or carbon nanotube layer. This facilitates to form the self-aligned source and drain contact plugs.
摘要翻译：本发明公开了一种半导体器件及其制造方法。该方法包括提供其上形成有石墨烯层或碳纳米管层的基板的步骤; 在石墨烯层或碳纳米管层上形成栅极结构之后暴露部分石墨烯层或碳纳米管层，其中栅极结构包括栅极堆叠，间隔物和覆盖层，盖层位于栅极叠层上，并且所述间隔件围绕所述栅极堆叠和所述盖层; 在暴露的石墨烯层或碳纳米管层上外延生长半导体层; 以及在所述半导体层上形成金属接触层。在本发明中，在石墨烯层或碳纳米管层上形成半导体层，然后在半导体层上形成金属接触层，而不是直接从石墨烯层或碳纳米管层形成金属接触层。这有助于形成自对准的源极和漏极接触插头。

70. 发明申请

US20130015497A1 SOURCE/DRAIN REGION, CONTACT HOLE AND METHOD FOR FORMING THE SAME 有权
标题翻译：源/排水区，接触孔及其形成方法
公开(公告)号：US20130015497A1
公开(公告)日：2013-01-17
申请号：US13119074
申请日：2011-02-18
申请人： Haizhou Yin , Huilong Zhu , Zhijiong Luo
发明人： Haizhou Yin , Huilong Zhu , Zhijiong Luo
IPC分类号： H01L27/092 , H01L21/8238 , H01L21/768 , H01L23/48
CPC分类号： H01L29/0847 , H01L21/76805 , H01L21/823807 , H01L21/823814 , H01L29/66636 , H01L29/78
摘要： An S/D region including a first region and a second region is provided. The first region is located, with at least a partial thickness, in the substrate. The second region is formed on the first region and made of a material different from that of the first region. A method for forming an S/D region is further provided, and the method includes: forming trenches at both sides of a gate stack structure in a substrate; forming a first semiconductor layer, wherein at least a part of the first semiconductor layer is filled into the trenches; and forming a second semiconductor layer on the first semiconductor layer, wherein the second semiconductor layer is made of a material different from that of the first semiconductor layer. A contact hole and a forming method thereof are also provided which may increase the contact area between a contact hole and a contact region, and reduce the contact resistance.
摘要翻译：提供包括第一区域和第二区域的S / D区域。第一区域在衬底中具有至少部分厚度。第二区域形成在第一区域上并且由与第一区域不同的材料制成。还提供了形成S / D区域的方法，该方法包括：在基板中的栅叠层结构的两侧形成沟槽; 形成第一半导体层，其中所述第一半导体层的至少一部分被填充到所述沟槽中; 以及在所述第一半导体层上形成第二半导体层，其中所述第二半导体层由与所述第一半导体层不同的材料制成。还提供接触孔及其形成方法，其可以增加接触孔和接触区域之间的接触面积，并降低接触电阻。

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