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    • 62. 发明授权
    • Integrated circuit cooling device
    • 集成电路冷却装置
    • US08164183B2
    • 2012-04-24
    • US10580324
    • 2004-11-12
    • Guillaume Bouche
    • Guillaume Bouche
    • H01L23/34
    • F04B43/043B81B7/0093B81B2201/036B81B2203/0127B81B2203/0315H01L23/473H01L2924/0002H01L2924/00
    • A pump having: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity having an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.
    • 一种泵,具有:形成在绝缘基板内部的空腔,所述基板的上部位于具有边缘的所述空腔附近; 导电层,覆盖空腔的内部直到边缘并且可选地覆盖边缘本身; 由导电材料制成的柔性膜,放置在空腔上方并抵靠边缘; 覆盖导电层或膜的电介质层,由此绝缘导电层和膜彼此靠近的部分; 形成在所述绝缘基板中的至少一个通气线,所述曝气线经由所述导电层中的开口而进入所述空腔, 用于在导电层和膜之间施加电压的端子。
    • 63. 发明授权
    • Method to control BAW resonator top electrode edge during patterning
    • 在图案化期间控制BAW谐振器顶部电极边缘的方法
    • US07612488B1
    • 2009-11-03
    • US11654244
    • 2007-01-16
    • Guillaume BoucheRalph N. Wall
    • Guillaume BoucheRalph N. Wall
    • H01L41/06
    • H03H9/589H03H9/131
    • A piezoelectric resonator include a multi-layer top electrode. The multi-layer top electrode includes at least a top metal layer and a bottom metal layer. A top metal layer edge is recessed compared to a bottom metal layer edge allowing conformal deposition of a passivation layer. The passivation layer covers and protects the underlying layers from subsequent etching, thereby preventing etch undercut of the top electrode. In some embodiments, the multi-layer top electrode is configured as a bi-layer. In other embodiments, an extra layer is configured between the top metal layer and the bottom metal layer, for example a shunt load layer.
    • 压电谐振器包括多层顶电极。 多层顶电极至少包括顶金属层和底金属层。 与底部金属层边缘相比,顶部金属层边缘凹陷,允许钝化层的共形沉积。 钝化层覆盖并保护下面的层免于随后的蚀刻,从而防止顶部电极的蚀刻底切。 在一些实施例中,多层顶电极被配置为双层。 在其他实施例中,在顶部金属层和底部金属层(例如分流负载层)之间配置了额外的层。
    • 65. 发明申请
    • Bragg mirror optimized for shear waves
    • 针对剪切波优化的布拉格镜
    • US20080204857A1
    • 2008-08-28
    • US11713461
    • 2007-02-28
    • Ed GodshalkGuillaume Bouche
    • Ed GodshalkGuillaume Bouche
    • G02F1/33G10K11/00
    • H03H9/175H03H3/04H03H2003/025
    • In an embodiment, set forth by way of example and not limitation, a Bragg mirror includes a first bi-layer of a first thickness and a second bi-layer of a second thickness which is different from the first thickness. In this exemplary embodiment, the first bi-layer consists essentially of a first high impedance layer and a first low impedance layer, and the second bi-layer of a second thickness which is different from the first thickness, the second bi-layer consisting essentially of a second high impedance layer and a second low impedance layer. Preferably, the first bi-layer is configured to substantially reflect a first wavelength and the second bi-layer is configured to substantially reflect a second wavelength different from the first wavelength.
    • 在通过示例而非限制的方式阐述的实施例中,布拉格反射镜包括第一厚度的第一双层和与第一厚度不同的第二厚度的第二双层。 在该示例性实施例中,第一双层基本上由第一高阻抗层和第一低阻抗层组成,第二厚度与第一厚度不同的第二厚度构成,第二双层基本上由 的第二高阻抗层和第二低阻抗层。 优选地,第一双层被配置为基本上反射第一波长,并且第二双层被配置为基本上反射与第一波长不同的第二波长。
    • 66. 发明申请
    • Integrated Circuit Cooling Device
    • 集成电路冷却装置
    • US20070278663A1
    • 2007-12-06
    • US10580324
    • 2004-11-12
    • Guillaume Bouche
    • Guillaume Bouche
    • H01L23/34H01L21/4763
    • F04B43/043B81B7/0093B81B2201/036B81B2203/0127B81B2203/0315H01L23/473H01L2924/0002H01L2924/00
    • A pump having: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity having an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.
    • 一种泵,具有:形成在绝缘基板内部的空腔,所述基板的上部位于具有边缘的所述空腔附近; 导电层,覆盖空腔的内部直到边缘并且可选地覆盖边缘本身; 由导电材料制成的柔性膜,放置在空腔上方并抵靠边缘; 覆盖导电层或膜的电介质层,由此绝缘导电层和膜彼此靠近的部分; 形成在所述绝缘基板中的至少一个通气线,所述曝气线经由所述导电层中的开口而进入所述空腔, 用于在导电层和膜之间施加电压的端子。