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    • 63. 发明申请
    • Temperature resistant hermetic sealing formed at low temperatures for MEMS packages
    • MEMS封装在低温下形成耐温密封密封
    • US20050253282A1
    • 2005-11-17
    • US10833978
    • 2004-04-27
    • Daoqiang LuJohn Heck
    • Daoqiang LuJohn Heck
    • B81B7/00H01L23/10H01L21/44
    • B81C1/00269
    • Certain hermetically sealed devices, such as micro-electromechanical systems (MEMS), may be sensitive high processing temperatures. However, the seal should be able to withstand higher temperatures that may be encountered, for example during device operation. Hermetic sealing may be realized by a fluxless soldering approach that comprises solder combinations that contain a low-melting-point (LMP) component such as Indium (In) or Tin (Sn) and a high-melting-point (HMP) component such as gold (Au), silver (Ag), or copper (Cu). The LMP/HMP ratio is selected to be HMP component rich so that the LMP component is essentially depleted resulting in an intermetallic compound (IMC) that has a higher melting point than the original HMP/LMP processing temperature after bonding and thermal annealing.
    • 某些密封的装置,例如微机电系统(MEMS),可能是敏感的高处理温度。 然而,密封件应该能够承受可能遇到的更高的温度,例如在设备操作期间。 密封可以通过无焊剂焊接方法实现,其包括含有低熔点(LMP)组分如铟(In)或锡(Sn)和高熔点(HMP)组分的焊料组合,例如 金(Au),银(Ag)或铜(Cu)。 选择LMP / HMP比为富含HMP成分,使得LMP组分基本上耗尽,导致在接合和热退火后具有比原始HMP / LMP处理温度更高的熔点的金属间化合物(IMC)。