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    • 66. 发明授权
    • Substrate, liquid crystal display having the substrate, and method for producing substrate
    • 基板,具有该基板的液晶显示器及其制造方法
    • US07476936B2
    • 2009-01-13
    • US10511427
    • 2003-04-14
    • Masafumi KokuraYoshiharu Kataoka
    • Masafumi KokuraYoshiharu Kataoka
    • H01L27/12
    • H01L29/66765G02F1/136227G02F2001/13629H01L29/458
    • The substrate (10) of the present invention includes: a first electrode (26) and a second electrode (30). The second electrode (30) is formed on an insulation film (52) covering at least a part of the first electrode (26) and electrically connected with the first electrode (26) through a contact hole (50) formed in the insulation film (52). The first electrode (26) includes a laminated structure of a metal film (42) and a protective film (44). An etching rate of the metal film (42) is almost equal to an etching rate of the protective film (44) with respect to a first etching for forming the metal film (42) and the protective film (44). An etching rate of the protective film (44) is almost zero with respect to a second etching for forming the contact hole (50).
    • 本发明的基板(10)包括:第一电极(26)和第二电极(30)。 第二电极(30)形成在覆盖第一电极(26)的至少一部分的绝缘膜(52)上,并通过形成在绝缘膜(26)中的接触孔(50)与第一电极 52)。 第一电极(26)包括金属膜(42)和保护膜(44)的叠层结构。 相对于用于形成金属膜(42)和保护膜(44)的第一蚀刻,金属膜(42)的蚀刻速率几乎等于保护膜(44)的蚀刻速率。 相对于用于形成接触孔(50)的第二蚀刻,保护膜(44)的蚀刻速率几乎为零。
    • 70. 发明授权
    • Liquid crystal display device having specified structure for contact
hole connecting pixel electrode with source/drain electrodes via a
connecting electrode
    • 液晶显示装置具有通过连接电极将像素电极与源/漏电极连接的接触孔的特定结构
    • US5943105A
    • 1999-08-24
    • US882645
    • 1997-06-25
    • Takashi FujikawaHirohiko NishikiYoshiharu Kataoka
    • Takashi FujikawaHirohiko NishikiYoshiharu Kataoka
    • G02F1/136G02F1/1362G02F1/1368H01L21/77H01L21/84H01L27/12G02F1/1343H01L29/04
    • G02F1/1362H01L27/1214
    • A liquid crystal display device comprises a gate signal wiring formed on a substrate, a data signal wiring insulated from the gate signal wiring and formed to perpendicularly cross the gate signal wiring, a switching element provided near the perpendicularly crossing portion of the gate signal wiring and the date signal wiring and having a gate electrode and source/drain electrodes, an interlayer insulating film, and a pixel electrode disposed in the region surrounded by the gate signal wiring and the data signal wiring and on the interlayer insulating film, wherein the gate signal wiring is connected with the gate electrode, the data signal wiring is connected with one of the source/drain electrodes, the pixel electrode is connected with the other of the source/drain electrodes through a contact hole penetrating through an interlayer insulating film and via a connecting electrode, and, the width of the contact hole at the aperture surface of the contact hole is reduced by setting the height from the surface of the substrate to the bottom of the contact hole to be larger than the height of the contact hole.
    • 液晶显示装置包括形成在基板上的栅极信号布线,与栅极信号布线绝缘并形成为垂直交叉栅极信号布线的数据信号布线,设置在栅极信号布线的垂直交叉部分附近的开关元件,以及 所述日期信号布线具有栅电极和源极/漏电极,层间绝缘膜和设置在由栅极信号布线和数据信号布线以及层间绝缘膜包围的区域中的像素电极,其中栅极信号 布线与栅电极连接,数据信号布线与源/漏电极之一连接,像素电极通过贯穿层间绝缘膜的接触孔与另一个源极/漏极连接,并通过 连接电极,并且通过设置接触孔的孔表面处的接触孔的宽度减小 从基板表面到接触孔底部的高度大于接触孔的高度。