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    • 66. 发明授权
    • Capacitive comb feedback for high speed scan mirror
    • 高速扫描镜的电容梳反馈
    • US07997742B2
    • 2011-08-16
    • US12054619
    • 2008-03-25
    • Miklos SternDmitriy Yavid
    • Miklos SternDmitriy Yavid
    • G03B21/00
    • G02B26/0841G02B26/0858H02N1/008H04N1/1135
    • An image projection system (100) has a laser (102, 104, 106) providing at least one beam (103, 105, 107) to a scan mirror apparatus (130) for scanning the at least one beam (103, 105, 107) in two orthogonal directions (404, 406). The scan mirror (130) includes an oscillating portion (204, 904) disposed contiguous to a frame (202) and includes a reflective portion (218, 918) capable of reflecting the beam (103, 105, 107). Circuitry (500) is provided for measuring the capacitance between interdigitated teeth (212, 214, 912, 914) on the frame (202) and the oscillating portion (204, 904).
    • 图像投影系统(100)具有向扫描镜装置(130)提供至少一个光束(103,105,107)的激光器(102,104,106),用于扫描至少一个光束(103,105,107) )在两个正交方向(404,406)上。 扫描镜(130)包括邻近框架(202)设置并包括能够反射光束(103,105,107)的反射部分(218,918)的振荡部分(204,904)。 电路(500)被提供用于测量框架(202)上的叉指齿(212,214,912,914)与振荡部分(204,904)之间的电容。