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    • 62. 发明授权
    • Method for manufacturing semiconductor device, semiconductor manufacturing apparatus, and method for controlling transfer in production line
    • 半导体装置的制造方法,半导体制造装置以及控制生产线的转移的方法
    • US06738681B2
    • 2004-05-18
    • US10359086
    • 2003-02-06
    • Yoshiaki Kobayashi
    • Yoshiaki Kobayashi
    • G06F1900
    • H01L21/67276G05B19/41895G05B2219/31271G06Q10/0631Y02P90/285Y02P90/60Y02P90/86
    • Shortening TAT for processing express lots without reducing the utilization rate of manufacturing apparatuses for semiconductor device. When the number of vacant ports LPOT of a manufacturing apparatus EQ3 used in a next step is only one at the of time of completing a process for a normal lot LA by a manufacturing apparatus EQ1 and when there is a possibility that processes for an express lot LB performed by a manufacturing apparatus EQ2 will be completed before a remaining processing time period for a lot LC performed by the manufacturing apparatus EQ3 reaches a predetermined set value, the lot LA is transferred to a lot stocker LS for securing a vacant port LPOT and as soon as the processes for the express lot LB performed by the manufacturing apparatus EQ2 are completed, the express lot LB is transferred to the vacant port LPOT in the manufacturing apparatus EQ3.
    • 缩短用于处理快递的TAT,而不降低半导体装置的制造装置的利用率。 当在下一步骤中使用的制造装置EQ3的空闲端口LPOT的数量仅在通过制造装置EQ1完成正常批次LA的处理之时只有一个,并且当存在用于快速批处理的可能性 在制造装置EQ3执行的批量LC的剩余处理时间段达到预定设定值之前,由制造装置EQ2执行的LB将被完成,批号LA被传送到用于固定空端口LPOT的批量储存器LS,并且作为 随着制造装置EQ2执行的快件LB的处理完成,快递批次LB被传送到制造装置EQ3中的空的端口LPOT。
    • 67. 发明授权
    • Developing apparatus with developer leak prevention
    • 开发人员泄漏防护的开发设备
    • US5075728A
    • 1991-12-24
    • US572404
    • 1990-08-27
    • Yoshiaki KobayashiHatsuo Tajima
    • Yoshiaki KobayashiHatsuo Tajima
    • G03G15/08
    • G03G15/0896G03G15/0875G03G15/0877
    • A developing apparatus includes a container having a first chamber and a second chamber, the second chamber containing a developer; a rotatable developer carrying member in the first chamber to carry the developer through a developing zone where an electrostatic latent image on an image bearing member is developed; a rotatable supply member disposed in the first chamber and cooperative with the developer carrying member to form a nip therebetween to supply the developer supplied from the second chamber to the developer carrying member; and a partition wall between the first chamber and a second chamber having an opening for permitting supply of the developer from the second chamber to the supply member, wherein the opening has a length smaller than a length of the supply member.
    • 显影装置包括具有第一室和第二室的容器,第二室包含显影剂; 第一室中的可旋转的显影剂承载构件,用于将显影剂携带在图像承载构件上的静电潜像被显影的显影区域中; 可旋转的供给构件,设置在所述第一室中并与所述显影剂承载构件协作以在其间形成辊隙,以将从所述第二室供应的显影剂供应到所述显影剂承载构件; 以及位于第一室和第二室之间的分隔壁,其具有用于允许显影剂从第二室供应到供应构件的开口,其中开口的长度小于供应构件的长度。