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    • 62. 发明授权
    • X-ray source and X-ray lithography method
    • X射线源和X射线光刻法
    • US4635282A
    • 1987-01-06
    • US699402
    • 1985-02-07
    • Ikuo OkadaYasunao SaitohHideo YoshiharaSatoshi Nakayama
    • Ikuo OkadaYasunao SaitohHideo YoshiharaSatoshi Nakayama
    • H01J35/22G03F7/20H01L21/027H05G2/00G21K5/00
    • H05G2/003B82Y10/00G03F7/70033G03F7/70808
    • A gas injection type plasma X-ray source has a gas plenum for storing a discharging gas at a pressure in the range of 150 Torr and 1000 Torr, the stored gas being injected between a pair of electrodes through a gas valve. The electrodes are opposed to each other in a vacuum vessel, so that a gas jet for the production of a plasma is formed. A voltage is applied between the electrodes, so that a discharge plasma is produced between said electrodes. A linear plasma with a high temperature and a high density is produced by the pinch of the plasma due to its own magnetic field produced by the current flowing through the plasma, so that X-rays are emitted from the linear plasma. The X-ray source has a high conversion efficiency and a high discharge timing margin, and accordingly the stability and reproducibility of discharges are improved and the X-ray output is increased.
    • 气体注入型等离子体X射线源具有用于储存在150乇和1000乇范围内的压力下的放电气体的气体增压室,所述储存气体通过气阀注入一对电极之间。 电极在真空容器中彼此相对,从而形成用于产生等离子体的气体射流。 在电极之间施加电压,使得在所述电极之间产生放电等离子体。 由于其自身通过流过等离子体的电流产生的磁场,由于等离子体的夹紧而产生具有高温和高密度的线性等离子体,从而从线性等离子体发射X射线。 X射线源具有高转换效率和高放电时间裕度,因此放电的稳定性和再现性得到改善,并且X射线输出增加。