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61. 发明申请

US20070026691A1 Low-field non-contact charging apparatus for testing substrates 审中-公开
标题翻译：用于测试基板的低场非接触式充电装置
公开(公告)号：US20070026691A1
公开(公告)日：2007-02-01
申请号：US11449260
申请日：2006-06-07
申请人： Lawrence Levit , Peter Gefter , John Menear
发明人： Lawrence Levit , Peter Gefter , John Menear
IPC分类号： H01L21/00
CPC分类号： G01R31/001 , G01R31/14
摘要： An apparatus and method for charging substrates without introducing high electric fields into the work environment. A non-contact charging plate is combined with a source of bipolar air (or gas) ions to effect the charging. This method is useful for studying the effects of static charge in charge sensitive processes. Substrates to be charged include semiconductor wafers, media disks, reticles, and flat panel glasses. In many cases, the shape of the apparatus is similar to industry-standard carriers. Hence, charging can be done robotically.
摘要翻译：一种用于对基板充电而不将高电场引入工作环境的装置和方法。非接触充电板与双极空气（或气体）离子源组合以实现充电。该方法对于研究电荷敏感过程中静电荷的影响是有用的。要充电的衬底包括半导体晶片，介质盘，掩模版和平板玻璃。在许多情况下，设备的形状类似于行业标准的载体。因此，充电可以机器人进行。

62. 发明申请

US20050236375A1 Ion generation method and apparatus 有权
标题翻译：离子生成方法和装置
公开(公告)号：US20050236375A1
公开(公告)日：2005-10-27
申请号：US10821773
申请日：2004-04-08
申请人： Peter Gefter , Scott Gehlke
发明人： Peter Gefter , Scott Gehlke
IPC分类号： B23K9/00 , B23K9/02 , H01T23/00 , H02H1/04
CPC分类号： H01T23/00
摘要： Method and apparatus for generating positive and negative ions include electrodes that are spaced apart by a gap and that are supplied alternating ionizing voltage at a frequency which causes the generated ions to move within the gap between electrodes and exhibit a resident time in transit that accumulates the ions substantially within the central region of the gap. An electrostatic field, or a flowing stream of air or other gas passing through the gap, transports the generated ions from within the gap. Self-balancing of generated positive and negative ions is accomplished using capacitive coupling of the ionizing voltage to at least one of the electrodes disposed about the gap.
摘要翻译：用于产生正离子和负离子的方法和装置包括由间隙隔开的电极，其以使得所产生的离子在电极之间的间隙内移动的频率被提供交替电离电压，并且呈现在运送中的驻留时间，离子基本上位于间隙的中心区域内。通过间隙的静电场或空气或其他气体的流动物质从间隙内输送产生的离子。所产生的正离子和负离子的自平衡是通过电离电压与布置在间隙周围的至少一个电极的电容耦合来实现的。

63. 发明授权

US06674630B1 Simultaneous neutralization and monitoring of charge on moving material 有权
标题翻译：同时中和和监测移动材料上的电荷
公开(公告)号：US06674630B1
公开(公告)日：2004-01-06
申请号：US09948269
申请日：2001-09-06
申请人： Peter Gefter , Mark Blitshteyn
发明人： Peter Gefter , Mark Blitshteyn
IPC分类号： H05F300
CPC分类号： H05F3/04 , B05D3/14
摘要： Simultaneous neutralization and monitoring of charge on a moving dielectric material is achieved with ionizing devices that supply ions in proximity to the material to thereby substantially neutralize charge on the material, and with circuitry that senses the ion currents flowing from the ionizing devices to the material. A controller can be utilized to control the ionizing devices and/or calculate various parameters (such as charge densities on the web, efficiency, etc.) based on the sensed ion currents.
摘要翻译：利用电离装置在离开材料附近提供离子，从而基本上中和材料上的电荷以及检测从电离装置流向材料的离子电流的电路，实现对移动电介质材料的电荷的同时中和和监测。可以利用控制器来控制电离装置和/或基于感测到的离子电流来计算各种参数（诸如网上的电荷密度，效率等）。

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