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    • 66. 发明授权
    • Semiconductor manufacturing apparatus and method
    • 半导体制造装置及方法
    • US06471037B1
    • 2002-10-29
    • US09650992
    • 2000-08-31
    • Ken Matsumoto
    • Ken Matsumoto
    • B65G2500
    • H01L21/67236G03F7/70741H01L21/67225H01L21/67769H01L21/67772
    • Disclosed is a semiconductor manufacturing apparatus which includes a chamber having an environment-controlled inside space, a stage disposed in the inside space of the chamber and for holding a substrate to perform a predetermined process to the substrate, a temporary storage for temporarily storing one or more substrates in a local environment being independent from the chamber inside, a robot for conveying a substrate between the stage and the temporary storage, and a controller for controlling the robot so that the substrate is stored into the temporary storage when the environment control of the chamber inside space is suspended.
    • 公开了一种半导体制造装置,其包括具有环境控制的内部空间的室,设置在室的内部空间中并用于保持基板以对基板执行预定处理的台,临时存储用于临时存储一个或 在本地环境中更多的基板独立于室内,用于在平台和临时存储器之间输送基板的机器人,以及用于控制机器人的控制器,使得当基板被环境控制时,将基板存储在临时存储器中 室内空间暂停。
    • 68. 发明授权
    • Coated optical devices and methods of making the same
    • 涂层光学器件及其制造方法
    • US5761367A
    • 1998-06-02
    • US696412
    • 1996-08-13
    • Roger Lee Ken Matsumoto
    • Roger Lee Ken Matsumoto
    • C03C25/10C03C25/38C03C25/40G02B6/02B05D5/06
    • C03C25/40C03C25/106C03C25/38G02B6/02395
    • The present invention relates to coated optical devices, such as optical fibers and optical wave guides, and methods for forming coated optical devices. Methods for forming coated optical devices comprise providing at least one optical device and contacting at least a portion of at least one optical device with at least one coating composition comprising at least one metal-nitrogen polymer. The at least one coating composition may further comprise at least one multifunctional organic electrophile comprising at least one monomer, oligomer, or polymer comprising a plurality of organic electrophilic substituents. The coating composition contacting at least a portion of an optical device is at least partially crosslinked, thereby forming coated optical devices which exhibit enhanced resistance to, for example, deterioration resulting from, among other things, exposure to chemicals and environmental factors.
    • 本发明涉及诸如光纤和光波导的涂覆光学器件以及用于形成涂覆的光学器件的方法。 用于形成涂覆的光学装置的方法包括提供至少一个光学装置,并使至少一个光学装置的至少一部分与包含至少一种金属 - 氮聚合物的至少一种涂层组合物接触。 所述至少一种涂料组合物还可包含至少一种包含至少一种包含多个有机亲电取代基的单体,低聚物或聚合物的多官能有机亲电试剂。 与光学装置的至少一部分接触的涂料组合物至少部分交联,由此形成涂覆的光学装置,其表现出对例如暴露于化学品和环境因素等导致的劣化的增强的抗性。