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    • 64. 发明申请
    • Method for making fine patterns using mask template
    • 使用掩模模板制作精细图案的方法
    • US20100323122A1
    • 2010-12-23
    • US12801699
    • 2010-06-22
    • Dong-Youn ShinTaik-Min LeeDong-Soo Kim
    • Dong-Youn ShinTaik-Min LeeDong-Soo Kim
    • B05D5/12B05D3/06
    • H01L51/0021H05K3/02H05K3/105H05K3/1258H05K2203/0568H05K2203/1105H05K2203/1142H05K2203/121
    • Provided is a method for forming a micropattern using a mask template. The method includes: forming a mask template on a substrate, wherein the mask template has an exposure section through which a portion of the substrate is exposed to the exterior and a non-exposure section provided by a polymer material applied on the remaining portion of the substrate; supplying conductive ink to the top of the mask template to deposit the conductive ink on the non-exposure section and on the substrate exposed through the exposure section; and heat treating the conductive ink in order to extract the conductive ink nanoclusters dissolved or dispersed in the conductive ink, wherein the conductive ink nanoclusters disposed on the non-exposure section are bound to the non-exposure section to form an insulating pattern having electrical insulating property, while the conductive ink nanoclusters disposed on the substrate form a conductive pattern having electroconductive property. The method enables formation of a micropattern without any alignment error between patterns in the case of a direct printing process.
    • 提供了使用掩模模板形成微图案的方法。 该方法包括:在基板上形成掩模模板,其中掩模模板具有暴露部分,通过该暴露部分将基板的一部分暴露于外部,以及由聚合物材料提供的非曝光部分施加在基板的剩余部分上 基质; 向所述掩模模板的顶部供应导电油墨以将所述导电油墨沉积在所述非曝光部分和所述暴露于所述曝光部分的所述基板上; 以及对导电油墨进行热处理以提取溶解或分散在导电油墨中的导电油墨纳米团簇,其中设置在非曝光部分上的导电油墨纳米团簇结合到非曝光部分以形成具有电绝缘性的绝缘图案 性质,而设置在基板上的导电油墨纳米团簇形成具有导电性的导电图案。 在直接打印过程的情况下,该方法能够形成微图案,而在图案之间没有任何对准误差。
    • 69. 发明授权
    • Variable capillary apparatus for hydrostatic bearing and motion error
compensating method using same
    • 用于静压轴承的可变毛细管装置和使用其的运动误差补偿方法
    • US6120004A
    • 2000-09-19
    • US98257
    • 1998-06-16
    • Chun-Hong ParkHu-Sang Lee
    • Chun-Hong ParkHu-Sang Lee
    • B23Q1/26B23Q1/30B23Q1/38F16C29/02F16C32/06F16C33/10F16K31/00F16K31/02
    • F16C32/0644F16C29/025F16C32/0648F16K31/007Y10S251/902
    • Variable capillary apparatus and motion error compensation method using the same. The apparatus has upper and lower bodies and a leaf spring inserted therebetween. Between a lower center portion of the upper body and the spring, there is formed a capillary having a fine gap. The compensating method has the steps of installing a couple of hydrostatic bearings connected to the variable capillary apparatuses to one side of a table, installing a couple of hydrostatic bearings connected to fixed capillaries to the other side of the table, determining gains of the variable capillary apparatuses, detecting a motion error of the table by moving the table, and applying varying voltages to the variable capillary apparatuses for compensating for the motion error. The apparatus and compensating method compensate for the motion error due to geometrical errors of the table and guide rails by varying the gap of the capillary of the apparatuses.
    • 可变毛细管装置和使用其的运动误差补偿方法。 该装置具有上下主体和插入其间的板簧。 在上身的下中心部分和弹簧之间形成具有细间隙的毛细管。 该补偿方法具有以下步骤:将连接到可变毛细管装置的一对静压轴承安装在工作台的一侧,将连接到固定毛细管的一对静压轴承安装到工作台的另一侧,确定可变毛细管的增益 装置,通过移动台来检测台的运动误差,以及向可变毛细管装置施加变化的电压以补偿运动误差。 该装置和补偿方法通过改变设备的毛细管的间隙来补偿由于工作台和导轨的几何误差引起的运动误差。