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    • 51. 发明申请
    • Time of Flight Backscatter Imaging System
    • 飞行时间反向散射成像系统
    • US20120134473A1
    • 2012-05-31
    • US12959356
    • 2010-12-02
    • Edward James Morton
    • Edward James Morton
    • G01N23/201
    • G01V5/0025G01N23/203G01V5/0008G01V5/0033G21K1/043
    • The present application discloses an X-ray imaging apparatus for determining a surface profile of an object under inspection that is positioned at a distance from the apparatus. The X-ray imaging system has an X-ray source for producing a scanning beam of X-rays directed toward the object, a detector assembly for providing a signal representative of an intensity of X-rays backscattered from the object, and processing circuitry to determine a time difference between when the X-ray source is switched on and when the backscattered X-rays arrive at the detector assembly. The processing circuitry is adapted to output data representative of the surface profile of the object under inspection.
    • 本申请公开了一种用于确定被检查物体的表面轮廓的X射线成像装置,其位于距离该装置一定距离处。 X射线成像系统具有用于产生朝向物体的X射线的扫描光束的X射线源,用于提供表示从物体反向散射的X射线的强度的信号的检测器组件,以及处理电路 确定当X射线源接通时和反向散射X射线到达检测器组件时的时间差。 处理电路适于输出表示检查对象的表面轮廓的数据。
    • 52. 发明申请
    • SURFACE MICROSTRUCTURE MEASUREMENT METHOD, SURFACE MICROSTRUCTURE MEASUREMENT DATA ANALYSIS METHOD AND X-RAY SCATTERING MEASUREMENT DEVICE
    • 表面微结构测量方法,表面微结构测量数据分析方法和X射线散射测量装置
    • US20120087473A1
    • 2012-04-12
    • US13264222
    • 2010-04-12
    • Kazuhiko OmoteYohiyasu Ito
    • Kazuhiko OmoteYohiyasu Ito
    • G01N23/201G01B15/04
    • G01B15/04
    • There is provided a surface microstructure measurement method, a surface microstructure measurement data analysis method, and an X-ray scattering measurement device which can accurately measure a microstructure on a surface and which can evaluate a three-dimensional structural feature. In the surface microstructure measurement method, the specimen surface is irradiated with X-ray at a grazing incident angle and a scattering intensity is measured; a specimen model with a microstructure on a surface in which one or more layers is formed in a direction perpendicular to the surface and unit structures are periodically arranged in a direction parallel to the surface within the layers is assumed; a scattering intensity of X-ray scattered by the microstructure is calculated in consideration of effects of refraction and reflection caused by the layer; and the scattering intensity of X-ray calculated by the specimen model is fitted to the measured scattering intensity. Then, as a result of the fitting, an optimum value of a parameter for specifying the shape of the unit structures is determined. Therefore, it is possible to accurately measure a microstructure.
    • 提供了可以精确地测量表面上的微结构并且可以评估三维结构特征的表面微结构测量方法,表面微结构测量数据分析方法和X射线散射测量装置。 在表面微结构测定方法中,以放射入射角对X射线照射试样表面,测定散射强度; 在垂直于表面的方向上形成一个或多个层的表面上的微结构的样本模型和单元结构在与层内的表面平行的方向上周期性地布置; 考虑到由该层引起的折射和反射的影响,计算由微结构散射的X射线的散射强度; 并且通过样本模型计算的X射线的散射强度适合于测量的散射强度。 然后,作为拟合的结果,确定用于指定单位结构的形状的参数的最佳值。 因此,可以精确地测量微结构。
    • 56. 发明申请
    • ARTICLE INSPECTION DEVICE AND INSPECTION METHOD
    • 文章检查设备和检查方法
    • US20120002788A1
    • 2012-01-05
    • US13142511
    • 2010-12-29
    • Yigang YangTiezhu LiQinjian ZhangYi ZhangYingkang JinQinghao ChenYuanjing LiYinong Liu
    • Yigang YangTiezhu LiQinjian ZhangYi ZhangYingkang JinQinghao ChenYuanjing LiYinong Liu
    • G01N23/201
    • G01V5/0025
    • The present invention discloses an article inspection device, comprising: a x-ray machine, a collimation unit, a transmission detector array and at least one scattering detector array. Each of the at least one scattering detector array comprising a plurality of same scattering detector modules arranged in a matrix of i-rows and j-columns. A transmission cross section of the article transmitted by the x-rays is divided into a plurality of same sub-regions arranged in a matrix of i-rows and j-columns. The plurality of scattering detector modules arranged in i-rows and i-columns correspond to the plurality of sub-regions arranged in i-rows and j-columns one by one for detecting pair production effect annihilation photons and Compton-effect scattering photons from the respective sub-regions. Obtaining atomic numbers of the respective sub-regions based on a ratio of the pair production effect annihilation photon count to the Compton-effect scattering photon count, so as to form a three-dimensional image of the article. In addition, the present invention further discloses an article inspection method.
    • 本发明公开了一种物品检查装置,包括:x射线机,准直单元,透射检测器阵列和至少一个散射检测器阵列。 所述至少一个散射检测器阵列中的每一个包括以i行和j列的矩阵排列的多个相同的散射检测器模块。 通过X射线透射的物品的透射截面被划分成以i行和j列的矩阵排列的多个相同的子区域。 布置在i行和i列中的多个散射检测器模块对应于一排一列地排列在i行和j列中的多个子区域,用于检测来自该对象的生成效应湮灭光子和康普顿效应散射光子 各分区域。 基于对生产效应湮灭光子计数与康普顿效应散射光子计数的比率来获得各个子区域的原子序数,以形成物品的三维图像。 此外,本发明还公开了一种物品检查方法。