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    • 59. 发明授权
    • Substrate splitting apparatus and a method for splitting a substrate
    • 基板分裂装置和分离基板的方法
    • US07888899B2
    • 2011-02-15
    • US12055004
    • 2008-03-25
    • Li-Ya YehChih-Wei ChuShu-Chih WangWen-Chang Hsieh
    • Li-Ya YehChih-Wei ChuShu-Chih WangWen-Chang Hsieh
    • G05B11/01
    • B28D1/26Y10T83/6604Y10T83/6606Y10T83/7805
    • A substrate splitting apparatus and a method for splitting a substrate using the substrate splitting apparatus are provided. The substrate splitting apparatus includes a servo motor, a transmission device, a substrate breaking bar, and a stage. One end of the transmission is directly or indirectly coupled to the servo motor while the other end is coupled with the breaking bar. The stage has a load-lock surface and the load-lock surface faces the breaking bar. The servo motor drives the transmission device to move the breaking bar toward the load-lock surface. A substrate with a pre-crack on the bottom is disposed on the load-lock surface. The servo motor drives the substrate breaking bar to move towards or away from the pre-crack. The method of splitting includes the following steps: forming a pre-crack on the substrate; controlling the servo motor to drive the breaking bar to move towards the substrate; and controlling the breaking bar to press the substrate at the pre-crack.
    • 提供了一种基板分离装置和使用该基板分割装置分离基板的方法。 基板分割装置包括伺服电动机,传动装置,基板断开杆和平台。 变速器的一端直接或间接地联接到伺服电动机,而另一端与断路器连接。 舞台具有装载锁定表面,并且装载锁定表面面向破坏杆。 伺服电机驱动传动装置将破坏杆朝向装载锁定面移动。 底部具有预裂纹的基板设置在负载锁定表面上。 伺服电机驱动基板断裂条移动或远离预裂纹。 分解方法包括以下步骤:在基材上形成预裂纹; 控制伺服电机驱动断路器向基板移动; 并控制断裂杆在预裂纹时按压基板。
    • 60. 发明授权
    • Handler for semiconductor singulation and method therefor
    • 半导体分割处理器及其方法
    • US07692440B2
    • 2010-04-06
    • US10533236
    • 2003-08-29
    • Jimmy Hwee Seng ChewKok Yeow LimFulin Liu
    • Jimmy Hwee Seng ChewKok Yeow LimFulin Liu
    • G01R31/26B26D7/06B24C3/32
    • B26D5/007B24C1/045B24C3/083B26D7/06B26F3/004B26F3/008Y10T83/6604
    • A water jet handler (200) has a loading location (205), a cutting location (210), and an unloading location (215); and two movable mounts (240 and a 245). As a first movable mount (240) receives a molded substrate at the loading location (205), and transports it to the cutting location (210), a second movable mount (245) transports singulated semiconductor packages of a previously singulated molded substrate from the cutting location (210) to the unloading location (215). As the molded substrate on the first movable mount (240) is cut in the X direction (232) by a water jet, the singulated semiconductor packages are unloaded. The molded substrate is then transferred to the second movable mount (245) on which it is cut in the Y direction (272) to produce singulated semiconductor packages, as the first movable mount (240) returns to the loading location (205), when another molded substrate is loaded.
    • 喷水处理器(200)具有装载位置(205),切割位置(210)和卸载位置(215); 和两个可移动的安装件(240和245)。 作为第一可移动安装座(240)在装载位置(205)处接收模制基板,并将其传送到切割位置(210),第二可移动安装件(245)将先前分割成型的基板的单个半导体封装从 切割位置(210)到卸载位置(215)。 当第一可移动支架(240)上的模制基板通过水射流在X方向(232)上被切割时,单片半导体封装被卸载。 然后,随着第一可移动支架(240)返回到装载位置(205),模制基板被转移到在Y方向(272)上被切割的第二可移动支架(245)以产生单个半导体封装,当 另外一个模塑基底被加载。