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51. 发明授权

US6016220A Off-axis three-mirror anastigmat having corrector mirror 失效
标题翻译：具有校正镜的离轴三镜无源镜
公开(公告)号：US6016220A
公开(公告)日：2000-01-18
申请号：US629714
申请日：1996-04-09
申请人： Lacy G. Cook
发明人： Lacy G. Cook
IPC分类号： G02B17/06 , G02B5/10 , G02B13/14
CPC分类号： G02B27/0025 , G02B17/0642 , G02B17/0663
摘要： A corrector mirror folds the optical path between the objective and relay portions of a three-mirror anastigmat. The corrector mirror is a non-powered mirror having a nominally flat but higher order aspheric surface. By placing the corrector mirror between the objective portion and an intermediate image formed by the objective portion, the field offset of the anastigmat can be significantly increased. A large field offset makes the off-axis anastigmat ideal for use with an on-axis dewar for infrared imaging applications.
摘要翻译：校正器镜子折叠三镜式反射镜的物镜和中继部分之间的光路。校正镜是具有标称平坦但高阶非球面的无动力镜。通过将校正器反射镜放置在目标部分和由目标部分形成的中间图像之间，可以显着增加无线扫描器的场偏移。大的磁场偏移使得离轴无焰扫描仪非常适合用于红外成像应用的轴上杜瓦瓶。

52. 发明授权

US5071240A Reflecting optical imaging apparatus using spherical reflectors and producing an intermediate image 失效
标题翻译：使用球面反射器反射光学成像设备并产生中间图像
公开(公告)号：US5071240A
公开(公告)日：1991-12-10
申请号：US578787
申请日：1990-09-07
申请人： Yutaka Ichihara , Akira Higuchi
发明人： Yutaka Ichihara , Akira Higuchi
IPC分类号： G02B17/06 , G03F7/20
CPC分类号： G03F7/70233 , G02B17/0657 , G02B17/0663 , G03F7/70275
摘要： A reflecting imaging optical apparatus comprises a reflecting spherical optical system including a first spherical reflecting optical system and a second spherical reflecting optical system, and a spherical reflecting mirror disposed near the position of an intermediate image formed by the reflecting spherical optical system. The first and second spherical reflecting optical systems form concentric optical systems, respectively.
摘要翻译：反射成像光学装置包括：反射球面光学系统，包括第一球面反射光学系统和第二球面反射光学系统;以及球面反射镜，设置在由反射球面光学系统形成的中间图像的位置附近。第一和第二球面反射光学系统分别形成同心光学系统。

53. 发明授权

US4798450A Imaging optical system 失效
标题翻译：成像光学系统
公开(公告)号：US4798450A
公开(公告)日：1989-01-17
申请号：US144645
申请日：1988-01-11
申请人： Akiyoshi Suzuki
发明人： Akiyoshi Suzuki
IPC分类号： G02B17/00 , G02B17/06 , G02B27/18 , G03F7/20
CPC分类号： G03F7/70233 , G02B17/0663 , G03F7/70241
摘要： An imaging optical system including a first off-axis optical system for receiving light from an object disposed at a predetermined height from its optical axis and emitting the light; and a second off-axis optical system for receiving the light from said first optical system to form an image of the object at a predetermined height form its optical axis.
摘要翻译：一种成像光学系统，包括：第一离轴光学系统，用于接收来自设置在与其光轴相关的预定高度处的物体的光并发射光; 以及第二离轴光学系统，用于接收来自所述第一光学系统的光以从其光轴形成预定高度的物体的图像。

54. 发明授权

US4521068A Cooled field optical system for infrared telescopes 失效
标题翻译：用于红外望远镜的冷却场光学系统
公开(公告)号：US4521068A
公开(公告)日：1985-06-04
申请号：US484644
申请日：1983-04-13
申请人： Joachim Schulte in den Baumen
发明人： Joachim Schulte in den Baumen
IPC分类号： G01J5/06 , G02B5/00 , G02B17/06 , G02B23/02 , G02B23/16
CPC分类号： G02B17/0663 , G01J5/061 , G02B17/061 , G02B23/02 , G02B23/16 , G02B5/005 , G02B17/0652
摘要： A cooled field optical system which serves for imaging the exit pupil of an infrared telescope with primary mirror having a central hole (Cassegrain system) onto a cooled annular diaphragm (9) which defines the field of view of the detector (14) used. It contains a field mirror (6) which is arranged behind the field diaphragm (5) of the telescope and whose focal length and distance from the field diaphragm are so selected that the image of the exit pupil is produced in the direct vicinity of the rear side of the field diaphragm (5) with a central vignetting which is greater than or equal to the aperture (15) of the field diaphragm (5). For deflection out of the coaxial ray path there is used an annular mirror (8) which is inclined to the optical axis and is arranged directly behind the field diaphragm (5). It has an elliptical hole the projected size of which is approximately the same as the size of the free passage (15) in the field diaphragm (5).
摘要翻译：一种冷却场光学系统，其用于对具有中心孔（卡塞格林系统）的主镜的红外望远镜的出射光成像到限定使用的检测器（14）的视场的冷却的环形隔膜（9）上。它包括设置在望远镜的场隔膜（5）后面的场反射镜（6），并且其焦距和距离场光阑的距离被选择成使得出射光瞳的图像在后方直接附近产生具有大于或等于场隔膜（5）的孔（15）的中心渐晕的场光阑（5）的一侧。为了偏离同轴射线路径，使用与光轴倾斜并且直接设置在场隔膜（5）的后方的环形反射镜（8）。它具有椭圆形孔，其投影尺寸与场隔膜（5）中的自由通道（15）的尺寸大致相同。

55. 发明授权

US4471448A Method and apparatus for aligning an optical system 失效
标题翻译：用于对准光学系统的方法和装置
公开(公告)号：US4471448A
公开(公告)日：1984-09-11
申请号：US300073
申请日：1981-09-08
申请人： Samuel G. L. Williams
发明人： Samuel G. L. Williams
IPC分类号： G01B11/27 , G01J9/00 , G02B17/06 , G05B13/04 , G01N21/00
CPC分类号： G02B17/0631 , G01B11/27 , G01J9/00 , G02B17/0663
摘要： A complex optical system may be aligned by means of a technique in which an analytical model of the system is utilized which is assumed to be capable of essentially optimal performance. A physical example of the same system design is then assembled and a plurality of performance characteristics measured. A plurality of specific adjustments are then calculated which would have the effect of degrading the performance of the analytical model to equal that measured for the physical example, whereupon compensating physical adjustments are made to the physical example. For many applications, the performance measurements may relate to aberrations to the wavefront of the point source image quantified by means of a Hartmann mask or the like. In that event, the estimation technique may be a straight-forward linear approximation technique including possible damping and/or weighting factors. The performance measurements may also be related to the intensity function associated with the image of a point source, in which case a second order estimation technique is required.
摘要翻译：复杂的光学系统可以通过使用系统的分析模型被利用的技术进行对准，该技术被认为能够基本上是最佳的性能。然后组装相同系统设计的物理示例并测量多个性能特征。然后计算多个具体的调整，其将具有将分析模型的性能降级到与物理实例所测量的性能相等的效果，由此补偿物理实例的物理调整。对于许多应用，性能测量可以涉及通过Hartmann掩模等量化的点源图像的波前的像差。在这种情况下，估计技术可以是包括可能的阻尼和/或加权因子的直线线性近似技术。性能测量还可能与与点源的图像相关联的强度函数有关，在这种情况下需要二阶估计技术。

56. 发明授权

US4395095A Optical system for infrared tracking 失效
标题翻译：用于红外跟踪的光学系统
公开(公告)号：US4395095A
公开(公告)日：1983-07-26
申请号：US265273
申请日：1981-05-20
申请人： Richard F. Horton
发明人： Richard F. Horton
IPC分类号： G02B17/06 , G02B23/06 , G02B23/16 , H01Q19/19
CPC分类号： G02B17/0663 , G02B17/061 , G02B23/06 , G02B23/16 , H01Q19/191
摘要： An optical relay system for bringing a Cassegrain-type or other type telepe infrared (IR) image through a mount elevation axis, yoke and azimuth axis for focusing at an image plane on the mount which is stationary relative to compound motion of the telescope. The relay system is made up or of deflecting or folding mirrors, apertured flat mirrors and concave spherical and elliptical mirrors arranged for minizing field degradation of off-axis objects.
摘要翻译：一种光学继电器系统，用于通过安装仰角轴，轭和方位轴将卡塞格伦型或其他类型的望远镜红外（IR）图像带入，用于聚焦在相对于望远镜的复合运动静止的安装座上的图像平面上。中继系统组成或偏转或折叠镜子，有孔平面镜和凹球面和椭圆镜，用于减少离轴物体的场退化。

57. 发明授权

US3950079A Steerable catoptric arrangements 失效
标题翻译：可转向的安排
公开(公告)号：US3950079A
公开(公告)日：1976-04-13
申请号：US498686
申请日：1974-08-19
申请人： Werner R. Rambauske
发明人： Werner R. Rambauske
IPC分类号： G02B7/182 , G02B17/06 , G02B26/08 , G02B5/10
CPC分类号： G02B17/0663 , G02B19/0023 , G02B19/0047 , G02B26/0816 , G02B7/1827
摘要： Catoptric arrangements for steering a laser beam by moving one, or more, mirrors relative to two substantially orthogonal axis of rotation are shown. In the various embodiments illustrated, one of such axes of rotation, around which all of the mirrors in each embodiment are rotatable, is coincident with the longitudinal axis of the laser beam to be steered so as to direct such longitudinal axis toward different points on a first focal circle. Means are provided to rotate all of the mirrors in each embodiment, except the mirror irradiated by the laser beam to be steered, around the second axis of rotation to direct the longitudinal axis of such beam toward different points on a second focal circle substantially orthogonal to the first focal circle. Also shown are exemplary modifications to position the mirrors within each arrangement to aim the steered beam to points adjacent to the first and second focal circles.

58. 发明授权

US3811749A Wide field reflective optical apparatus 失效
标题翻译：宽域反射光学装置
公开(公告)号：US3811749A
公开(公告)日：1974-05-21
申请号：US29702872
申请日：1972-10-12
申请人： HONEYWELL INC
发明人： ABEL I
IPC分类号： G02B17/06 , G02B23/00 , G02B17/00
CPC分类号： G02B23/06 , G02B17/0615 , G02B17/0642 , G02B17/0663
摘要： The disclosure describes a wide field reflective optical system comprising an afocal fore telescope and an imaging system. The afocal telescope comprises first and second confocal paraboloidal reflectors, an aperture stop located in front of the first reflector at a distance equal to its focal length, and a field stop located at the common focal point of the reflectors. The imaging system is an improvement of the Schmidt principle and comprises an aspheric corrector reflector that reflects radiation from the second paraboloidal reflector onto a plane reflector. The plane reflector is located in front of a spherical reflector that focuses radiation at its focal plane through an aperture in the plane reflector.
摘要翻译：本公开描述了一种包括无焦前望远镜和成像系统的宽场反射光学系统。无焦点望远镜包括第一和第二共聚焦抛物面反射器，位于第一反射器前面的距离等于其焦距的孔径光阑，以及位于反射器的公共焦点处的场停止。成像系统是Schmidt原理的改进，并且包括将来自第二抛物面反射器的辐射反射到平面反射器上的非球面校正器反射器。平面反射器位于球面反射器的前面，其将辐射在其焦平面处通过平面反射器中的孔聚焦。

59. 发明授权

US3224330A Optical reflecting system for redirecting energy 失效
标题翻译：用于重定向能量的光学反射系统
公开(公告)号：US3224330A
公开(公告)日：1965-12-21
申请号：US16156661
申请日：1961-12-22
申请人： BELL TELEPHONE LABOR INC
发明人： RUDOLF KOMPFNER
IPC分类号： G02B17/04 , G02B17/06 , G02B17/08
CPC分类号： G02B17/0663 , G02B17/04 , G02B17/045 , G02B17/0605 , G02B17/0856

60. 发明授权

US12055867B2 Lithography contamination control 有权
公开(公告)号：US12055867B2
公开(公告)日：2024-08-06
申请号：US18311795
申请日：2023-05-03
申请人： Taiwan Semiconductor Manufacturing Co., Ltd.
发明人： Chieh Hsieh , Tai-Yu Chen , Cho-Ying Lin , Heng-Hsin Liu , Li-Jui Chen , Shang-Chieh Chien
IPC分类号： G03F7/00 , G02B17/06 , H05G2/00
CPC分类号： G03F7/70925 , G02B17/0663 , G03F7/70033 , G03F7/70491 , G03F7/70808 , G03F7/70916 , H05G2/008
摘要： A lithography system is provided capable of deterring contaminants, such as tin debris from entering into the scanner. The lithography system in accordance with various embodiments of the present disclosure includes a processor, an extreme ultraviolet light source, a scanner, and a hollow connection member. The light source includes a droplet generator for generating a droplet, a collector for reflecting extreme ultraviolet light into an intermediate focus point, and a light generator for generating pre-pulse light and main pulse light. The droplet generates the extreme ultraviolet light in response to the droplet being illuminated with the pre-pulse light and the main pulse light. The scanner includes a wafer stage. The hollow connection member includes an inlet that is in fluid communication with an exhaust pump. The hollow connection member provides a hollow space in which the intermediate focus point is disposed. The hollow connection member is disposed between the extreme ultraviolet light source and the scanner.

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