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    • 54. 发明申请
    • WAFER TEMPERATURE MEASUREMENT TOOL
    • 温度测量工具
    • US20140269822A1
    • 2014-09-18
    • US13827490
    • 2013-03-14
    • QUALITAU, INC.
    • Edward McCloudDavid VandenBerg
    • G01K1/16
    • H01L21/67248G01K1/143G01K1/146
    • A wafer temperature measurement tool for measuring the surface temperature of a semiconductor wafer. The tool can be used to measure temperature on different parts of the wafer to provide a high resolution temperature distribution map. The tool includes an internal calibrated weight that is slidably disposed within a tool body. A temperature sensor is attached to the bottom of the weight. Ceramic stands are attached to the bottom of the tool body. Gravity pulls down on the weight such that the temperature sensor contacts the wafer when the ceramic stands of the tool body are placed on the wafer.
    • 一种用于测量半导体晶片的表面温度的晶片温度测量工具。 该工具可用于测量晶片不同部分的温度,以提供高分辨率的温度分布图。 该工具包括内部校准的重量,其可滑动地设置在工具主体内。 温度传感器连接到重量的底部。 陶瓷支架连接到工具主体的底部。 当重量下降时,当工具体的陶瓷支架放置在晶片上时,重量会使温度传感器接触晶片。
    • 58. 发明授权
    • Tube bundle reactor
    • 管束反应器
    • US08524156B2
    • 2013-09-03
    • US12274601
    • 2008-11-20
    • Rolf BankDieter VerbeekAlfons Berndl
    • Rolf BankDieter VerbeekAlfons Berndl
    • B01J8/06G01K3/00
    • B01J8/067B01J2208/00061G01K1/026G01K1/146
    • A tube bundle reactor carries out endothermic or exothermic gas phase reactions. The tube bundle of reactor tubes are filled with catalyst, and have their ends fastened tightly in tube sheets (3, 4). A fluid heat carrier (10) flows around the tubes during operation. A shell (5) encloses the tube bundle. A gas inlet head (6) spans one of the tube sheets, and a gas outlet head (7) spans the other tube sheet. The reactor tubes are in fluid communication with the gas inlet and outlet heads (6, 7), and further include at least one stage thermometer (9) installed in a thermometer tube (2) disposed in the tube bundle. The at least one stage thermometer (9) is axially movable inside the thermometer tube (2), and the tube bundle reactor (1) includes a mechanical positioning means (8) to effect the axial movement of the stage thermometer (9). Moreover, a method is proposed for measuring a temperature profile in tube bundle reactors of the kind specified.
    • 管束反应器进行吸热或放热气相反应。 反应器管的管束用催化剂填充,并且其端部紧紧地紧固在管板(3,4)中。 流体热载体(10)在操作期间流过管子。 外壳(5)围绕管束。 气体入口头(6)跨越管板之一,并且气体出口头(7)跨越另一个管板。 反应器管与气体入口和出口头(6,7)流体连通,并且还包括安装在设置在管束中的温度计管(2)中的至少一个台式温度计(9)。 所述至少一个台式温度计(9)可在所述温度计管(2)的内部轴向移动,并且所述管束反应器(1)包括用于实现所述台式温度计(9)的轴向移动的机械定位装置(8)。 此外,提出了一种用于测量所述类型的管束反应器中的温度分布的方法。