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    • 51. 发明授权
    • Six-legged type piezoelectric vibration gyroscope
    • 六脚式压电振动陀螺仪
    • US07216540B2
    • 2007-05-15
    • US10548102
    • 2004-03-05
    • Takeshi InoueMitsuru YamamotoAtsushi OchiKenji KuramotoMitsuhiro Nakajima
    • Takeshi InoueMitsuru YamamotoAtsushi OchiKenji KuramotoMitsuhiro Nakajima
    • G01P9/04
    • G01C19/5642
    • A six-legged type piezoelectric vibration gyroscope having a pair of exciting arms extending from a body (2) in a first direction (A1) with a space therebetween, one non-exciting arm (3c) extending in the first direction between the exciting arms from the body, a pair of detecting arms (4a, 4b) extending from the body in a second direction (A2) with a space therebetween, and one non-detecting arm (4c) extending in the second direction between the detecting arms from the body. The exciting arms are coupled with a drive-side electrode. The detecting arms are coupled with a detection-side electrode. The exciting arms, non-exciting arm, detecting arms, and non-detecting arm respectively consist of a piezoelectric. The respective exciting arms differ in width size from the non-exciting arm. The respective exciting arms differ in width size from the respective detecting arms. The respective exciting arms differ in width size from the non-detecting arm.
    • 一种六脚式压电振动陀螺仪,具有一对激励臂,其沿着第一方向(A 1)从主体(2)沿其间具有空间延伸,一对非励磁臂(3c)沿第一方向延伸到 来自身体的激励臂,一对从身体沿第二方向(A 2)延伸并具有空间的检测臂(4a,4b)和一个在第二方向上延伸的非检测臂(4c) 在身体的检测臂之间。 激励臂与驱动侧电极耦合。 检测臂与检测侧电极耦合。 激励臂,非励磁臂,检测臂和非检测臂分别由压电构成。 相应的激光臂的宽度尺寸与非激励臂不同。 各个激励臂的宽度尺寸与相应的检测臂不同。 各个激励臂的宽度尺寸与非检测臂不同。
    • 52. 发明申请
    • Six-legged type piezoelectric vibration gyroscope
    • 六脚式压电振动陀螺仪
    • US20060230828A1
    • 2006-10-19
    • US10548102
    • 2004-03-05
    • Takeshi InoueMitsuru YamamotoAtsushi OchiKenji KuramotoMitsuhiro Nakajima
    • Takeshi InoueMitsuru YamamotoAtsushi OchiKenji KuramotoMitsuhiro Nakajima
    • G01P9/04G01P1/04G01C19/56
    • G01C19/5642
    • A six-legged type piezoelectric vibration gyroscope having a pair of exciting arms extending from a body (2) in a first direction (A1) with a space therebetween, one non-exciting arm (3c) extending in the first direction between the exciting arms from the body, a pair of detecting arms (4a, 4b) extending from the body in a second direction (A2) with a space therebetween, and one non-detecting arm (4c) extending in the second direction between the detecting arms from the body. The exciting arms are coupled with a drive-side electrode. The detecting arms are coupled with a detection-side electrode. The exciting arms, non-exciting arm, detecting arms, and non-detecting arm respectively consist of a piezoelectric. The respective exciting arms differ in width size from the non-exciting arm. The respective exciting arms differ in width size from the respective detecting arms. The respective exciting arms differ in width size from the non-detecting arm.
    • 一种六脚式压电振动陀螺仪,具有一对激励臂,其沿着第一方向(A 1)从主体(2)沿其间具有空间延伸,一对非励磁臂(3c)沿第一方向延伸到 来自身体的激励臂,一对从身体沿第二方向(A 2)延伸并具有空间的检测臂(4a,4b)和一个在第二方向上延伸的非检测臂(4c) 在身体的检测臂之间。 激励臂与驱动侧电极耦合。 检测臂与检测侧电极耦合。 激励臂,非励磁臂,检测臂和非检测臂分别由压电构成。 相应的激光臂的宽度尺寸与非激励臂不同。 各个激励臂的宽度尺寸与相应的检测臂不同。 各个激励臂的宽度尺寸与非检测臂不同。
    • 56. 发明申请
    • Angular velocity sensor
    • 角速度传感器
    • US20020157466A1
    • 2002-10-31
    • US10100737
    • 2002-03-19
    • Jiro TeradaKatsunori MatsubaraTakeshi Yamamoto
    • G01P015/08
    • G01C19/5642
    • Here disclosed is an angular velocity sensor with much accuracy, not allowing other vibration components to mix into the Coriolis force component. The angular velocity sensor contains a first through a fifth beams: the first, the second, and the third beams have a length of substantially the same and disposed in a substantially parallel arrangement on a substantially the same planenullwith the first beam placed between the second and the third; the fourth connects each one end of the first through the third, while the fifth connects each other end of them. The first beam is supportively fixed at its mid-portion. The first beam serves as a detector; the second serves as a driver; and the third serves as a monitor.
    • 这里公开的是具有很高精度的角速度传感器,不允许其它振动分量混合到科里奥利力分量中。 角速度传感器包括第一至第五束:第一,第二和第三梁具有基本上相同的长度并且基本上平行地布置在基本上相同的平面上,第一梁被放置在 第二和第三; 第四连接第一至第三的每一端,而第五连接它们的每一端。 第一个光束在其中间部分被支撑地固定。 第一个波束用作检测器; 第二个作为司机; 第三个作为监视器。
    • 58. 发明申请
    • Micro yaw rate sensors
    • 微偏转率传感器
    • US20020066317A1
    • 2002-06-06
    • US09730494
    • 2000-12-06
    • Gang Lin
    • G08C019/00
    • G01C19/5642
    • Yaw rate sensors are provided, the use of which permits quantitative measurement of yaw rate. The yaw rate sensor comprises at least a base, a first suspension and a second suspension with a proof mass supported between the two suspensions, which together form a resonator. The first suspension has a pair of thin-wire driving electrodes double side patterned on the surfaces. When a driving voltage is applied to the driving electrodes, it imposes an electric field to piezoelectrically induce a driving resonance. When the sensor is rotated around its sensing axis, the resonator will be forced to generate a sensing resonance out of the driving resonance plane to compensate the change in the linear momentum which must be conserved. The piezoelectric charge signal generated by the sensing resonance on the sensing electrodes which are double side patterned on the surfaces of the second suspension is used to detect the yaw rate. Specifically, the amplitude of the sensing resonance is in proportion to the yaw rate. The structure of the yaw rate sensors of this invention is suitable for mass production by lithographic micromachining techniques at low cost.
    • 提供了速度传感器,其使用允许定量测量偏航率。 横摆率传感器包括至少一个基座,第一悬架和第二悬架,其中两个悬架之间具有支撑在两个悬架之间的检测质量,这些共同构成共振器。 第一悬架具有在表面上双面图案化的一对细线驱动电极。 当驱动电压施加到驱动电极时,施加电场以压电引起驱动共振。 当传感器围绕其感测轴线旋转时,谐振器将被迫从驱动谐振平面产生感测谐振,以补偿必须保守的线性动量的变化。 通过在第二悬架的表面上双面图案化的感测电极上的感测谐振产生的压电充电信号用于检测偏航率。 具体地,感测谐振的振幅与偏航率成比例。 本发明的偏摆率传感器的结构适用于通过光刻微加工技术以低成本进行批量生产。
    • 59. 发明授权
    • High Q angular rate sensing gyroscope
    • 高Q角速度传感陀螺仪
    • US06272925B1
    • 2001-08-14
    • US09397718
    • 1999-09-16
    • William S. Watson
    • William S. Watson
    • G01C1900
    • G01C19/567G01C19/5642G01C19/5677
    • A structure and arrangement for improving the accuracy and efficiency of an angular rate sensing gyroscope is herein disclosed. Voltage pick-off conductors are applied to an area of the surface of a resonating element of an angular rate sensing gyroscope that is subject to substantially zero stress when the gyroscope is rotationally stationary. Actuator conductors are similarly applied to a resonating element at a location bounded by areas of the resonating element subject to substantially uniform levels of stress when the gyroscope is rotationally stationary. A method for improving the voltage response of a piezoelectric resonating element is also disclosed.
    • 本文公开了一种用于提高角速度感测陀螺仪的精度和效率的结构和装置。 当陀螺仪旋转静止时,电压传感导体被施加到角速度感测陀螺仪的谐振元件的表面的区域,该角度传感陀螺仪的谐振元件受到基本上零的应力。 当陀螺仪旋转静止时,致动器导体类似地应用于由谐振元件的区域限定的位置处的谐振元件,该谐振元件受到基本上均匀的应力水平的施加。 还公开了一种用于改善压电谐振元件的电压响应的方法。
    • 60. 发明授权
    • Vibrators, vibratory gyroscopes, devices for measuring a linear acceleration and a method of measuring a turning angular rate
    • 振动器,振动陀螺仪,用于测量线性加速度的装置和测量转动角速度的方法
    • US06227048B1
    • 2001-05-08
    • US09181554
    • 1998-10-29
    • Takayuki KikuchiShosaku GoujiYukihisa OsugiTakao Soma
    • Takayuki KikuchiShosaku GoujiYukihisa OsugiTakao Soma
    • G01P904
    • G01C19/5642G01C19/5607
    • A vibratory gyroscope for detecting a turning angular rate in a turning system is provided. The gyroscope comprises a vibrator, an exciting means for exciting driving vibration in the vibrator, and a detecting means for detecting vibration induced in the vibrator. The vibrator comprises a plurality of vibration systems 1A, 1B, 2A and 2B, which are formed within a specified plane intersecting the turning axis Z. Vibration systems comprises first vibration systems 1A and 1B whose vibrations include radial vibration components, in which the center of gravity of first vibration system vibrates in a radial direction in the specified plane with respect to the center of gravity GO of the vibrator. The vibration systems also comprises second vibration systems 2A and 2B whose vibrations include circumferential vibration components, in which the center of gravity of vibration of the second vibration system vibrates in the specified plane along a circle with the center of gravity GO as its center.
    • 提供一种用于检测转动系统中的转动角速度的振动陀螺仪。 陀螺仪包括振动器,用于激励振动器中的驱动振动的激励装置,以及用于检测在振动器中感应的振动的检测装置。 振动器包括多个振动系统1A,1B,2A和2B,它们形成在与转动轴线Z相交的特定平面内。振动系统包括振动包括径向振动分量的第一振动系统1A和1B,其中, 第一振动系统的重力相对于振动器的重心GO在指定平面内沿径向方向振动。 振动系统还包括其振动包括圆周振动分量的第二振动系统2A和2B,其中第二振动系统的振动的重心沿着以重心GO为中心的圆的特定平面振动。