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    • 55. 发明申请
    • Determination of a movable gantry position
    • 确定可移动的龙门架位置
    • US20040178327A1
    • 2004-09-16
    • US10387210
    • 2003-03-10
    • ASM Technology Singapore Pte Ltd
    • Gary Peter WiddowsonSun Kuen WongAjit Gaunekar
    • H01J040/14
    • G05B19/401G05B2219/45029G05B2219/50077G05B2219/50389
    • The position of a working point relative to a working space, such as a working point of a carriage on a gantry beam of an XY positioning table, is determined by measuring at least two sets of displacements. A first set of displacements, of the working point relative to an intermediate component, such as the gantry beam, includes a relatively large displacement (X) in a first linear degree of freedom and relatively small displacements (Y1null, Y2null), in at least two of the five degrees of freedom other than the first. The second set of displacements, of the intermediate component relative to the working space, includes a relatively large displacement (Y1, Y2), in a second linear degree of freedom, and relatively small displacements (X1null, X2null), in at least two of the five degrees of freedom other than the second.
    • 通过测量至少两组位移来确定工作点相对于工作空间的位置,例如XY定位台的台架梁上的托架的工作点。 工作点相对于诸如台架梁的中间部件的第一组位移包括在第一线性自由度和相对小的位移(Y1',Y2')中的相对大的位移(X),在 除了第一个以外的五个自由度中的至少两个。 中间部件相对于工作空间的第二组位移包括在第二线性自由度中相对较大的位移(Y1,Y2)和相对小的位移(X1',X2'),至少 五个自由度中的两个除了第二个。