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    • 51. 发明授权
    • Tuning-fork resonator with grooves on principal surfaces
    • 调谐叉式谐振器,主表面有凹槽
    • US07944132B2
    • 2011-05-17
    • US12892096
    • 2010-09-28
    • Makoto FuruhataTakashi Yamazaki
    • Makoto FuruhataTakashi Yamazaki
    • H01L41/08H03H9/21
    • H03H9/215H03H9/0547H03H9/1021
    • A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.
    • 具有基部的谐振器; 以及谐振臂,其进行弯曲振动,所述谐振臂部分具有两个主表面,设置在一个主表面上的第一凹槽,与另一个主表面上的第一凹槽并置设置的第二凹槽,设置成与第一凹槽并排设置的第三凹槽, 所述第一槽比所述另一主面上的所述第一槽更靠近所述基部侧;以及第四槽,与所述第二槽并列设置,并且在所述主面上设置为比所述基部侧更靠近所述第二槽。 第一槽部分和第二槽部分的深度之和和第三和第四槽部分的深度之和大于一个主表面和另一个主表面之间的距离。