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    • 58. 发明授权
    • Thin film transistor and display device including the same
    • 薄膜晶体管和包括其的显示装置
    • US08860030B2
    • 2014-10-14
    • US13166871
    • 2011-06-23
    • Shunpei Yamazaki
    • Shunpei Yamazaki
    • H01L29/04H01L29/06H01L29/10H01L31/00H01L29/786H01L29/49H01L27/12H01L29/45
    • H01L29/78684H01L27/1214H01L27/1288H01L29/458H01L29/4908H01L29/78696
    • One object of the present invention is reduction of off current of a thin film transistor. Another object of the present invention is improvement of electric characteristics of the thin film transistor. Further, another object of the present invention is improvement of image quality of the display device including the thin film transistor. The thin film transistor includes a semiconductor film containing germanium at a concentration greater than or equal to 5 at. % and less than or equal to 100 at. % or a conductive film which is provided over a gate electrode with the gate insulating film interposed therebetween and which is provided in an inner region of the gate electrode so as not to overlap with an end portion of the gate electrode, a film covering at least a side surface of the semiconductor film containing germanium at a concentration greater than or equal to 5 at. % and less than or equal to 100 at. % or the conductive film, a pair of wirings formed over the film covering the side surface of the semiconductor film containing germanium at a concentration greater than or equal to 5 at. % and less than or equal to 100 at. % or the conductive film.
    • 本发明的一个目的是减少薄膜晶体管的截止电流。 本发明的另一个目的是提高薄膜晶体管的电特性。 此外,本发明的另一个目的是提高包括薄膜晶体管的显示装置的图像质量。 该薄膜晶体管包括含有浓度大于或等于5atm的锗的半导体膜。 %且小于或等于100at。 %或导电膜,其设置在栅极电极上,栅极绝缘膜介于其间并且设置在栅电极的内部区域中,以便不与栅电极的端部重叠,至少覆盖膜 该半导体膜的侧表面含有浓度大于或等于5atm的锗。 %且小于或等于100at。 %或导电膜,形成在覆盖半导体膜的侧面的膜上的一对布线,该半导体膜含有浓度大于或等于5at 3的锗。 %且小于或等于100at。 %或导电膜。
    • 60. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08847220B2
    • 2014-09-30
    • US13543109
    • 2012-07-06
    • Shunpei Yamazaki
    • Shunpei Yamazaki
    • H01L29/10H01L29/12H01L29/786
    • H01L29/7869H01L27/1225
    • A semiconductor device including an oxide semiconductor can have stable electric characteristics and high reliability. A transistor in which an oxide semiconductor layer containing indium, titanium, and zinc is used as a channel formation region and a semiconductor device including the transistor are provided. As a buffer layer in contact with the oxide semiconductor layer, a metal oxide layer containing an oxide of one or more elements selected from titanium, aluminum, gallium, zirconium, hafnium, and a rare earth element can be used.
    • 包括氧化物半导体的半导体器件可以具有稳定的电特性和高可靠性。 使用其中含有铟,钛和锌的氧化物半导体层用作沟道形成区域的晶体管和包括晶体管的半导体器件。 作为与氧化物半导体层接触的缓冲层,可以使用含有选自钛,铝,镓,锆,铪和稀土元素中的一种或多种元素的氧化物的金属氧化物层。