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51. 发明授权

US4421292A Air-operated oil pressure control valve 失效
标题翻译：气动油压控制阀
公开(公告)号：US4421292A
公开(公告)日：1983-12-20
申请号：US249387
申请日：1981-03-31
申请人： Takahiro Matsui , Jun Tamura
发明人： Takahiro Matsui , Jun Tamura
IPC分类号： F16K31/122 , F16K31/124
CPC分类号： F16K31/124 , F16K31/1221
摘要： An air operated oil pressure control valve wherein the inlet port and the outlet port for oil are provided in the valve body at a position wherein they face each other with a normally closed valve port located in between. When compressed air is introduced into the valve body, the valve port is opened, allowing the oil pressure to pass through the valve.
摘要翻译：一种气动油压控制阀，其特征在于，所述进气口和所述油的出口在所述阀体上设置有位于其间的常闭阀口的位置。当压缩空气被引入阀体时，阀口打开，允许油压通过阀门。

52. 发明授权

US09455125B2 Substrate processing apparatus 有权
标题翻译：基板加工装置
公开(公告)号：US09455125B2
公开(公告)日：2016-09-27
申请号：US13070115
申请日：2011-03-23
申请人： Akihiro Yoshimura , Tetsuji Sato , Masato Horiguchi , Nobuhiro Wada , Makoto Kobayashi , Hiroshi Tsujimoto , Jun Tamura , Mamoru Naoi
发明人： Akihiro Yoshimura , Tetsuji Sato , Masato Horiguchi , Nobuhiro Wada , Makoto Kobayashi , Hiroshi Tsujimoto , Jun Tamura , Mamoru Naoi
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306 , H01J37/32
CPC分类号： H01J37/32091 , H01J37/32568
摘要： Disclosed is a substrate processing apparatus capable of suppressing generation of plasma in the space between a moving electrode and an end wall at one side of a cylindrical chamber. The substrate processing apparatus includes a cylindrical chamber to receive a wafer, a shower head movable along a central axis of the chamber inside the chamber, a susceptor opposing the shower head in the chamber, and a flexible bellows connecting the shower head to a cover of the chamber, wherein a high frequency power is applied to a processing space presented between the shower head and the susceptor, processing gas is introduced into the processing space, the shower head and the side wall of the chamber are non-contact to each other, and a bypass member is installed electrically connecting the shower head and the cover or the side wall of the chamber.
摘要翻译：公开了一种能够抑制在圆筒形室的一侧的移动电极与端壁之间的空间中产生等离子体的基板处理装置。基板处理装置包括用于容纳晶片的圆柱形室，可沿着室内的室的中心轴线移动的喷头，与腔室中的淋浴喷头相对的基座，以及柔性波纹管，其将淋浴头连接到所述室，其中向所述淋浴喷头和所述基座之间呈现的处理空间施加高频功率，将处理气体引入所述处理空间中，所述淋浴喷头和所述室的侧壁彼此不接触，并且旁路部件被安装成电连接淋浴头和盖子或室的侧壁。

53. 发明授权

US08592319B2 Substrate processing method and substrate processing apparatus 有权
标题翻译：基板处理方法和基板处理装置
公开(公告)号：US08592319B2
公开(公告)日：2013-11-26
申请号：US13167574
申请日：2011-06-23
申请人： Nobuhiro Wada , Makoto Kobayashi , Hiroshi Tsujimoto , Jun Tamura , Mamoru Naoi , Jun Oyabu
发明人： Nobuhiro Wada , Makoto Kobayashi , Hiroshi Tsujimoto , Jun Tamura , Mamoru Naoi , Jun Oyabu
IPC分类号： H01L21/3065
CPC分类号： H01J37/04 , H01J37/32091 , H01J37/3255 , H01J37/32568
摘要： A substrate processing apparatus includes a chamber accommodating a wafer, a susceptor disposed inside the chamber and on which the wafer is held, an upper electrode facing the susceptor, and a second high frequency power source connected to the susceptor, wherein the upper electrode is electrically connected to a ground and is moveable with respect to the susceptor. The substrate processing apparatus divides a potential difference between plasma generated in a processing space and the ground into a potential difference between the plasma and a dielectric and a potential difference between the dielectric and the ground by burying the dielectric in the upper electrode, and changes a gap between the upper electrode and the susceptor. Accordingly, plasma density between the upper electrode and the susceptor is changed.
摘要翻译：基板处理装置包括容纳晶片的室，设置在室内并且晶片保持在其上的基座，与基座相对的上电极和连接到基座的第二高频电源，其中上电极电连接到地面并且可相对于基座移动。基板处理装置将处理空间中产生的等离子体和地面之间的等离子体与电介质之间的电位差和电介质与地之间的电位差通过上电极中的电介质分离，并将a 上电极和基座之间的间隙。因此，改变了上电极和基座之间的等离子体密度。

54. 发明授权

US08439149B2 Brake equipment of vehicle with driver seat whose direction is changeable 有权
标题翻译：带司机座椅的车辆制动装置方向可变
公开(公告)号：US08439149B2
公开(公告)日：2013-05-14
申请号：US13392730
申请日：2011-03-02
申请人： Jun Tamura , Tomoki Hirabayashi
发明人： Jun Tamura , Tomoki Hirabayashi
IPC分类号： B60T8/26
CPC分类号： B60T8/326 , B60T8/1766 , B60T8/267
摘要： A brake equipment of the driver-seat-direction changeable vehicle includes: a driver-seat-direction detector configured to detect whether the driver seat is facing the one or the other side, in the travel direction, of the wheel-side vehicle body; a braking unit configured to brake one-side wheels, which are located closer to the one side, in the travel direction, of the wheel-side vehicle body, and other-side wheels, which are located closer to the other side, in the travel direction, of the wheel-side vehicle body, while controlling brake-force distribution between brake forces of the one-side wheels and the other-side wheels in such a manner that the brake-force distribution becomes a set brake-force distribution based on ideal brake-force distribution characteristics; and a switching unit configured to change the set brake-force distribution in accordance with the direction of the driver seat detected by the driver-seat-direction detector.
摘要翻译：驾驶员座椅方向可变车辆的制动装置包括：驾驶员座椅方向检测器，被配置为检测驾驶员座椅是否面向车轮侧车身的行进方向上的一个或另一侧; 制动单元，被配置为制动在车轮侧车体的行进方向上位于更靠近一侧的单侧轮和位于更靠近另一侧的其它侧轮的制动单元行驶方向，同时控制单侧车轮和其他侧车轮的制动力之间的制动力分配，使制动力分布成为设定的制动力分配型理想的制动力分布特性; 以及切换单元，被配置为根据驾驶员座椅方向检测器检测到的驾驶员座椅的方向改变设定的制动力分布。

55. 发明申请

US20130025537A1 PROCESSING CONDITION INSPECTION AND OPTIMIZATION METHOD OF DAMAGE RECOVERY PROCESS, DAMAGE RECOVERING SYSTEM AND STORAGE MEDIUM 审中-公开
公开(公告)号：US20130025537A1
公开(公告)日：2013-01-31
申请号：US13632770
申请日：2012-10-01
申请人： Reiko SASAHARA , Jun Tamura , Shigeru Tahara
发明人： Reiko SASAHARA , Jun Tamura , Shigeru Tahara
IPC分类号： C23C16/52
CPC分类号： H01L22/12
摘要： A processing condition inspection method of a damage recovery process for reforming a film having OH groups generated by damages from a predetermined process by using a processing gas includes preparing a substrate having an OH group containing resin film, measuring an initial film thickness of the OH group containing resin film, performing a damage recovery process on the substrate after measuring the initial film thickness, measuring a film thickness of the OH group containing resin film after the damage recovery process, calculating a film thickness difference of the OH group containing resin film before and after the damage recovery process, and determining whether processing conditions of the damage recovery process are appropriate or inappropriate based on the film thickness difference.

56. 发明申请

US20120152633A1 BRAKE EQUIPMENT OF VEHICLE WITH DRIVER SEAT WHOSE DIRECTION IS CHANGEABLE 有权
标题翻译：具有驾驶座椅的车辆制动设备方向可更换
公开(公告)号：US20120152633A1
公开(公告)日：2012-06-21
申请号：US13392730
申请日：2011-03-02
申请人： Jun Tamura , Tomoki Hirabayashi
发明人： Jun Tamura , Tomoki Hirabayashi
IPC分类号： B60T8/26 , B62D63/04 , B62D63/02 , B60T8/17
CPC分类号： B60T8/326 , B60T8/1766 , B60T8/267
摘要： A brake equipment of the driver-seat-direction changeable vehicle includes: a driver-seat-direction detector configured to detect whether the driver seat is facing the one or the other side, in the travel direction, of the wheel-side vehicle body; a braking unit configured to brake one-side wheels, which are located closer to the one side, in the travel direction, of the wheel-side vehicle body, and other-side wheels, which are located closer to the other side, in the travel direction, of the wheel-side vehicle body, while controlling brake-force distribution between brake forces of the one-side wheels and the other-side wheels in such a manner that the brake-force distribution becomes a set brake-force distribution based on ideal brake-force distribution characteristics; and a switching unit configured to change the set brake-force distribution in accordance with the direction of the driver seat detected by the driver-seat-direction detector.
摘要翻译：驾驶员座椅方向可变车辆的制动装置包括：驾驶员座椅方向检测器，被配置为检测驾驶员座椅是否面向车轮侧车身的行进方向上的一个或另一侧; 制动单元，被配置为制动在车轮侧车体的行进方向上位于更靠近一侧的单侧轮和位于更靠近另一侧的其它侧轮的制动单元行驶方向，同时控制单侧车轮和其他侧车轮的制动力之间的制动力分配，使制动力分布成为设定的制动力分配型理想的制动力分布特性; 以及切换单元，被配置为根据驾驶员座椅方向检测器检测到的驾驶员座椅的方向改变设定的制动力分布。

57. 发明授权

US08049990B2 Cleaning tape and method of producing same 有权
标题翻译：清洁胶带及其制造方法
公开(公告)号：US08049990B2
公开(公告)日：2011-11-01
申请号：US12241420
申请日：2008-09-30
申请人： Yuji Horie , Yasuyuki Yokota , Jun Tamura , Akihiro Sakamoto , Noriyuki Kumasaka
发明人： Yuji Horie , Yasuyuki Yokota , Jun Tamura , Akihiro Sakamoto , Noriyuki Kumasaka
IPC分类号： G11B5/41
CPC分类号： G11B23/505 , B08B1/02 , B08B7/0028 , B24D11/00
摘要： A cleaning tape has a base tape made of a synthetic resin and a cleaning layer formed on a surface of this base tape. The cleaning layer has a binding agent and a large number of spherical particles dispersed in the binding agent in a single particle layer. Such a cleaning tape is capable of removing very small unwanted protrusions and particles on the surface of a target object such as a magnetic hard disk without forming scratches.
摘要翻译：清洁带具有由合成树脂制成的基带和形成在该基带的表面上的清洁层。清洁层在单个颗粒层中具有粘合剂和分散在粘合剂中的大量球形颗粒。这样的清洁带能够在没有形成划痕的情况下去除诸如磁性硬盘的目标物体表面上的非常小的不想要的突起和颗粒。

58. 发明授权

US08026150B2 Semiconductor device manufacturing method and storage medium 有权
标题翻译：半导体装置的制造方法和存储介质
公开(公告)号：US08026150B2
公开(公告)日：2011-09-27
申请号：US12479137
申请日：2009-06-05
申请人： Reiko Sasahara , Jun Tamura , Shigeru Tahara
发明人： Reiko Sasahara , Jun Tamura , Shigeru Tahara
IPC分类号： H01L21/76 , H01L21/764
CPC分类号： H01L21/7682 , H01L21/0206 , H01L21/02068 , H01L21/3105 , H01L21/76814 , H01L21/76826 , H01L21/76829 , H01L21/76885
摘要： A method of manufacturing a semiconductor device, including an interlayer insulating layer having a dielectric constant of about 1, includes at least one of hydrophobically modifying an interlayer insulating film for insulating lines from each other, before forming air gaps in the interlayer insulating film, and hydrophobically modifying the lines, after forming the air gaps in the interlayer insulating film.
摘要翻译：包括介电常数为约1的层间绝缘层的半导体器件的制造方法包括在形成层间绝缘膜中的气隙之前相互绝缘的疏水改性层间绝缘膜中的至少一种，以及在层间绝缘膜中形成气隙之后，对线进行疏水改性。

59. 发明授权

US07241204B2 Polishing pad, method of producing same and method of polishing 失效
标题翻译：抛光垫，其制造方法和抛光方法
公开(公告)号：US07241204B2
公开(公告)日：2007-07-10
申请号：US11518065
申请日：2006-09-07
申请人： Jun Watanabe , Takuya Nagamine , Jun Tamura , Takashi Arahata
发明人： Jun Watanabe , Takuya Nagamine , Jun Tamura , Takashi Arahata
IPC分类号： B24B1/00
CPC分类号： B24B37/245 , B24D3/28
摘要： A polishing pad has a resin sheet having a flat surface and abrading particles fixed inside and on the surface of this resin sheet. Its tensile strength is in the range of 30 MPa or greater and 70 MPa or less and preferably in the range of 40 MPa or greater and 60 MPa or less. Its tensile tear elongation is in the range of 50% or less, preferably 20% or less and more preferably 5% or less. The average diameter of the primary particles of the abrading particles is in the range of 0.005 μm or greater and less than 0.5 μm, and preferably in the range of 0.005 μm or greater and 0.2 μm or less. The content of the abrading particles fixed to the resin sheet is 10 volume % or greater and 50 volume % or less, or preferably 10 volume % or greater and 24 volume or less.
摘要翻译：抛光垫具有平坦表面的树脂片和固定在该树脂片的内部和表面上的研磨颗粒。其拉伸强度为30MPa以上且70MPa以下，优选为40MPa以上且60MPa以下的范围。其拉伸撕裂伸长率为50％以下，优选为20％以下，更优选为5％以下。研磨颗粒的一次颗粒的平均直径在0.005μm以上且小于0.5μm的范围内，优选在0.005μm以上且0.2μm以下的范围内。固定在树脂片上的研磨粒子的含量为10体积％以上且50体积％以下，优选为10体积％以上且24体积以下。

60. 发明申请

US20070054600A1 Polishing pad, method of producing same and method of polishing 失效
标题翻译：抛光垫，其制造方法和抛光方法
公开(公告)号：US20070054600A1
公开(公告)日：2007-03-08
申请号：US11518065
申请日：2006-09-07
申请人： Jun Watanabe , Takuya Nagamine , Jun Tamura , Takashi Arahata
发明人： Jun Watanabe , Takuya Nagamine , Jun Tamura , Takashi Arahata
IPC分类号： B24B1/00 , B24B7/30 , B24D11/00
CPC分类号： B24B37/245 , B24D3/28
摘要： A polishing pad has a resin sheet having a flat surface and abrading particles fixed inside and on the surface of this resin sheet. Its tensile strength is in the range of 30MPa or greater and 70 MPa or less and preferably in the range of 40MPa or greater and 60MPa or less. Its tensile tear elongation is in the range of 50% or less, preferably 20% or less and more preferably 5% or less. The average diameter of the primary particles of the abrading particles is in the range of 0.005 μm or greater and less than 0.5 μm, and preferably in the range of 0.005 μm or greater and 0.2 μm or less. The content of the abrading particles fixed to the resin sheet is 10 volume % or greater and 50 volume % or less, or preferably 10 volume % or greater and 24 volume or less.
摘要翻译：抛光垫具有平坦表面的树脂片和固定在该树脂片的内部和表面上的研磨颗粒。其拉伸强度为30MPa以上且70MPa以下，优选为40MPa以上且60MPa以下的范围。其拉伸撕裂伸长率为50％以下，优选为20％以下，更优选为5％以下。研磨颗粒的一次颗粒的平均直径在0.005μm以上且小于0.5μm的范围内，优选在0.005μm以上且0.2μm以下的范围内。固定在树脂片上的研磨粒子的含量为10体积％以上且50体积％以下，优选为10体积％以上且24体积以下。

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