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    • 51. 发明授权
    • Method of forming resist pattern and negative resist composition
    • 形成抗蚀剂图案和负性抗蚀剂组合物的方法
    • US08859187B2
    • 2014-10-14
    • US12438906
    • 2007-10-19
    • Ken TanakaSho AbeShigeru Yokoi
    • Ken TanakaSho AbeShigeru Yokoi
    • G03F7/095G03F7/038G03F7/039G03F7/20G03F7/30
    • G03F7/0035G03F7/0048G03F7/0382G03F7/0397H01L21/0271H01L21/3086H01L21/3088
    • A novel method of forming a resist pattern in which thickness loss from the resist pattern is reduced, and a negative resist composition that can be used in this method of forming a resist pattern. The method of forming a resist pattern includes: forming a first resist film by applying a first resist composition to a support, forming a first resist pattern by selectively exposing the first resist film through a first mask pattern and then developing the first resist film, forming a second resist film by applying a negative resist composition containing an ether-based organic solvent (S″) having no hydroxyl groups onto the support having the first resist pattern formed thereon, and forming a resist pattern by selectively exposing the second resist film through a second mask pattern and then developing the second resist film.
    • 形成抗蚀剂图案的厚度损失降低的抗蚀剂图案的新颖方法以及可用于形成抗蚀剂图案的方法中的负型抗蚀剂组合物。 形成抗蚀剂图案的方法包括:通过将第一抗蚀剂组合物施加到载体上来形成第一抗蚀剂膜,通过选择性地将第一抗蚀剂膜通过第一掩模图案曝光,然后显影第一抗蚀剂膜,形成第一抗蚀剂图案,形成第一抗蚀剂图案 通过在其上形成有第一抗蚀剂图案的载体上涂布含有无羟基的醚类有机溶剂(S“)的负性抗蚀剂组合物,形成第二抗蚀剂膜,并通过选择性地将第二抗蚀剂膜曝光 第二掩模图案,然后显影第二抗蚀剂膜。
    • 59. 发明申请
    • Rotation detecting apparatus and direct current motor
    • 旋转检测装置和直流电动机
    • US20100289387A1
    • 2010-11-18
    • US12800354
    • 2010-05-13
    • Ken TanakaKenji TakedaTsutomu NakamuraMasaru TougeYuuki Matsumoto
    • Ken TanakaKenji TakedaTsutomu NakamuraMasaru TougeYuuki Matsumoto
    • H02K11/00
    • H02K23/66H02K11/225H02P7/00H02P29/0241
    • A rotation detecting apparatus includes a direct-current motor, a power source part, an energization detecting part, and a rotation state detecting part. The direct-current motor is configured so that an inductance between a pair of brushes periodically changes in accordance with a rotation. The power source part applies a power source voltage between the pair of brushes. In the power source voltage, an alternating-current voltage is superimposed on a direct-current voltage. The energization detecting part detects an electric quantity related to the alternating-current voltage applied from the power source part to the direct-current motor. The rotation state detecting part detects at least one of a rotation angle, a rotation direction, and a rotation speed of the direct-current motor based on a change in an amplitude of an alternating-current component in the electric quantity detected by the energization detecting part.
    • 旋转检测装置包括直流电动机,电源部,通电检测部和旋转状态检测部。 直流电动机被配置成使得一对电刷之间的电感根据旋转而周期性地变化。 电源部分在一对电刷之间施加电源电压。 在电源电压中,交流电压叠加在直流电压上。 通电检测部检测与从电源部向直流电动机施加的交流电压有关的电量。 旋转状态检测部基于由通电检测检测到的电量中的交流分量的振幅的变化来检测直流电动机的旋转角度,旋转方向和转速中的至少一个 部分。