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    • 53. 发明授权
    • Positive resist composition
    • 正抗蚀剂组成
    • US07105273B2
    • 2006-09-12
    • US10634954
    • 2003-08-06
    • Shoichiro YasunamiHyou TakahashiKazuyoshi Mizutani
    • Shoichiro YasunamiHyou TakahashiKazuyoshi Mizutani
    • G03F7/04
    • G03F7/0045G03F7/0392G03F7/0397Y10S430/106Y10S430/111
    • A positive resist composition of the present invention achieving significant performance improvements in high energy-beam lithography, which comprises a phenolic polymer having a property of being insoluble or hardly soluble in an aqueous alkali solution and becoming soluble in an aqueous alkali solution by the action of an acid, in which the phenolic polymer includes a repeating unit containing at least one selected from the group consisting of an acetal-protected phenolic hydroxyl group, a ketal-protected phenolic hydroxyl group, a tertiary ester-protected carboxyl group and a tetrahydropyranyl-protected carboxyl group; and a compound having a phenacylsulfonium structure and capable of generating an acid upon irradiation with one of actinic rays and radiation.
    • 本发明的正型抗蚀剂组合物在高能束光刻中获得显着性能改进,其包括具有不溶性或几乎不溶于碱性水溶液的性质的酚醛聚合物,并且通过作用于碱性溶液 一种酸,其中酚类聚合物包括含有选自缩醛保护的酚羟基,缩酮保护的酚羟基,叔酯保护的羧基和四氢吡喃基保护的羧基中的至少一种的重复单元 羧基; 和具有苯甲酰甲基锍结构并能够在用光化射线和辐射之一照射时产生酸的化合物。
    • 58. 发明授权
    • Positive photoresist composition
    • 正光致抗蚀剂组合物
    • US06346363B2
    • 2002-02-12
    • US09729178
    • 2000-12-05
    • Kazuyoshi MizutaniShoichiro Yasunami
    • Kazuyoshi MizutaniShoichiro Yasunami
    • G03F7004
    • G03F7/0757G03F7/0045
    • A positive type photoresist composition comprising an alkali-soluble or acid-decomposable polysiloxane containing repeating structural units represented by formula (I): wherein L represents at least one divalent connecting group selected from the group consisting of —A—NHCO—, —A—NHCOO— and —A—NHCONH—, wherein A represents a single bond, an alkylene group or an arylene group; X represents a single bond or a divalent connecting group; and Z represents either a group represented by or a group represented by wherein Y represents a hydrogen atom, an alkyl group, an aryl group or an aralkyl group, an atomic group represented by Y may be straight-chain, branched or cyclic, R represents a hydrogen atom or an acid-decomposable group, l represents an integer of from 1 to 3, and m also represents an integer of from 1 to 3.
    • 一种正型光致抗蚀剂组合物,其包含含有由式(I)表示的重复结构单元的碱溶性或酸可分解聚硅氧烷:其中L表示至少一个选自-A-NHCO-,-A- NHCOO-和-A-NHCONH-,其中A表示单键,亚烷基或亚芳基; X表示单键或二价连接基团; Z表示由Y代表氢原子,烷基,芳基或芳烷基表示的基团,由Y表示的原子团可以是直链,支链或环状的,R表示氢原子 原子或酸可分解基团,l表示1〜3的整数,m也表示1〜3的整数。
    • 60. 发明授权
    • Positive working photosensitive lithographic printing plate utilizing
phenol derivative compound containing photosensitive composition
    • 使用含有感光性组合物的苯酚衍生物的正性感光性平版印刷版
    • US5460917A
    • 1995-10-24
    • US296425
    • 1994-08-26
    • Fumikazu KobayashiKazuyoshi MizutaniAkira Nagashima
    • Fumikazu KobayashiKazuyoshi MizutaniAkira Nagashima
    • G03F7/00G03F7/004G03F7/022G03F7/039G03F7/023
    • G03F7/0226
    • A positive working photosensitive lithographic printing plate comprising a support having thereon a photosensitive layer comprising a positive photosensitive composition, wherein the positive photosensitive composition comprises a mixture of (a) a phenol derivative, (b) a water-soluble and aqueous alkali-soluble resin, and (c) o-quinonediazide or a mixture of a compound capable of forming an acid on exposure and a compound having at least one C--O--C group which is decomposable with an acid, and wherein the phenol derivative is a mixture of a compound represented by the following formula (I) and a compound represented by the following formula (II): ##STR1## wherein X.sup.1, X.sup.2, X.sup.3, X.sup.4, X.sup.5 and X.sup.6 are the same or different and each represents --CH.sub.2 OH or a hydrogen atom, provided that at least three of them are each --CH.sub.2 OH; ##STR2## wherein Y.sup.1, Y.sup.2, Y.sup.3, Y.sup.4, Y.sup.5 and Y.sup.6 are the same or different and each represents --CH.sub.2 OCH.sub.3, --CH.sub.2 OH or a hydrogen atom, provided that at least three of them are each --CH.sub.2 OCH.sub.3 or --CH.sub.2 OH, and at least one of the three is --CH.sub.2 OCH.sub.3.
    • 一种正性感光性平版印刷版,其特征在于,具有包含正性感光性组合物的感光层的支持体,其中,所述正性感光性组合物包含(a)苯酚衍生物,(b)水溶性和水溶性碱溶性树脂 ,和(c)邻醌二叠氮化合物或能够在暴露时形成酸的化合物与具有至少一个可与酸分解的COC基团的化合物的混合物,并且其中所述酚衍生物是由 下式(I)表示的化合物和下式(II)表示的化合物:其中X 1,X 2,X 3,X 4,X 5和X 6相同或不同,各自表示-CH 2 OH或氢原子 条件是它们中的至少三个各自为-CH 2 OH; 其中Y 1,Y 2,Y 3,Y 4,Y 5和Y 6相同或不同,各自表示-CH 2 OCH 3,-CH 2 OH或氢原子,条件是它们中至少有三个为-CH 2 OCH 3或-CH 2 OH ,三个中的至少一个是-CH 2 OCH 3。