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    • 52. 发明授权
    • Projection exposure apparatus
    • 投影曝光装置
    • US5309197A
    • 1994-05-03
    • US868705
    • 1992-04-15
    • Tetsuya MoriAkiyoshi SuzukiHideki Ina
    • Tetsuya MoriAkiyoshi SuzukiHideki Ina
    • G03F7/20G03F7/22G03F9/00H01L21/027H01L21/30G03B27/42
    • G03F9/7088G03F9/00
    • A projection exposure apparatus includes a projection lens system for projecting an image of a pattern of an original on a substrate having a photosensitive layer, by using a sensitizing beam; a first detection optical system for detecting a mark of the substrate through the projection lens system and with a first non-sensitizing beam, the first detection optical system producing first information related to the position of the mark; a second detection optical system for detecting the mark of the substrate without the projection lens system and with a second nonsensitizing beam having a bandwidth broader than that of the first non-sensitizing beam, the second detection optical system producing second information related to the position of the mark; and a detector for detecting an error included in the first information, by using the first and second information.
    • 投影曝光装置包括:投影透镜系统,用于通过使用敏化光束将原稿的图案的图像投影在具有感光层的基板上; 第一检测光学系统,用于通过投影透镜系统和第一非感光束检测基板的标记,第一检测光学系统产生与标记的位置相关的第一信息; 第二检测光学系统,用于在没有投影透镜系统的情况下检测基板的标记,并且具有比第一非敏感光束宽的带宽的第二非敏感光束,第二检测光学系统产生与位置相关的第二信息 标记; 以及用于通过使用第一和第二信息来检测包括在第一信息中的错误的检测器。
    • 54. 发明授权
    • Flash unit and imaging apparatus
    • 闪光灯单元和成像设备
    • US08249442B2
    • 2012-08-21
    • US12859369
    • 2010-08-19
    • Koji YasudaTetsuya Mori
    • Koji YasudaTetsuya Mori
    • G03B15/03
    • G03B17/14G03B15/05G03B2215/0507
    • A flash unit includes a flash device operable to emit flash, a storage member operable to store the flash device, a cover with which the storage member is covered from above, and to which the flash device is attached, a first link member that is turnably connected to the storage member at one end and turnably connected to the cover at another end, and a retaining member. The first link member is stored in the storage member in a lying state when the flash device is not used, and the first link member is adapted to turn about a connection portion of the first link member and the storage member to take a raised up state in which a connection portion of the first link member and the cover is located above the connection portion of the first link member with the storage member when the flash device is used, the cover can turn about the connection portion with the first link member to take the raised up state in which the flash device is raised higher than the connection portion with the first link member, and the retaining member retains the first link member in the raised up state.
    • 闪光单元包括可操作以发射闪光的闪光装置,可操作地存储闪光装置的存储构件,盖上,存储构件从上方被覆盖,并且闪光装置被附接到该盖上,第一连杆构件可转动地 在一端连接到存储构件并在另一端可转动地连接到盖,以及保持构件。 当不使用闪光灯装置时,第一连杆部件处于平躺状态而存储在存储部件中,并且第一连杆部件适于围绕第一连杆部件和存储部件的连接部分转动以升高状态 其中当使用所述闪光装置时,所述第一连杆构件和所述盖的连接部分在所述第一连杆构件的连接部分上方与所述存储构件对齐,所述盖可以围绕所述第一连杆构件的连接部分转动 其中闪光装置被升高到高于与第一连杆构件的连接部分的升高状态,并且保持构件将第一连杆构件保持在升高状态。