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    • 52. 发明申请
    • Method and apparatus for forming patterned photosensitive material layer
    • 形成图案感光材料层的方法和装置
    • US20060166453A1
    • 2006-07-27
    • US11386310
    • 2006-03-21
    • Jack LinCalvin WuGeorge Huang
    • Jack LinCalvin WuGeorge Huang
    • H01L21/331
    • G03F7/70633
    • A method for forming a patterned photosensitive material layer over a substrate is described. A photosensitive material layer is formed on a substrate and then exposed. The selected parameters of the photosensitive material layer or between the photosensitive material layer and the predetermined layer are measured for determining whether the exposed patterns of the photosensitive material layer are acceptable. A development step is performed when the exposed patterns of the photosensitive material layer are found to be acceptable. An apparatus for forming a patterned photosensitive material layer is also described, which utilizes the aforementioned method and has a mechanism capable of feeding back offsets of the measured parameters in real time for reducing the cycle time and the rework time in the lithography process.
    • 描述了在衬底上形成图案化感光材料层的方法。 感光材料层形成在基片上,然后露出。 测量感光材料层或感光材料层和预定层之间的选定参数,以确定感光材料层的曝光图案是否可接受。 当发现感光材料层的曝光图案是可接受的时,执行显影步骤。 还描述了用于形成图案化感光材料层的装置,其利用上述方法并且具有能够实时地反馈测量参数的偏移的机构,以减少光刻工艺中的周期时间和返工时间。
    • 55. 发明申请
    • Method and apparatus for forming patterned photoresist layer
    • 用于形成图案化光刻胶层的方法和装置
    • US20050250225A1
    • 2005-11-10
    • US11180092
    • 2005-07-11
    • Jack LinCalvin WuGeorge Huang
    • Jack LinCalvin WuGeorge Huang
    • G03F9/00G03F7/20H01L21/00H01L21/027
    • G03F7/70633
    • A method for forming a patterned photoresist layer aligned with a predetermined layer is described. A photoresist layer is formed on a substrate and then exposed. The overlay offset between the exposed portions of the photoresist layer and the predetermined layer is measured for determining whether the exposed portions of the photoresist layer are aligned with the predetermined layer. A development step is performed when the exposed portions of the photoresist layer are found to align with the predetermined layer. An apparatus for forming a patterned photoresist layer is also described, which utilizes the aforementioned method and has a mechanism capable of feeding back the overlay offset in real time for reducing the cycle time and the rework time in the lithography process.
    • 描述了形成与预定层对准的图案化光致抗蚀剂层的方法。 在基板上形成光致抗蚀剂层,然后曝光。 测量光致抗蚀剂层的暴露部分和预定层之间的覆盖偏移,以确定光致抗蚀剂层的暴露部分是否与预定层对准。 当发现光致抗蚀剂层的暴露部分与预定层对准时,进行显影步骤。 还描述了用于形成图案化光致抗蚀剂层的装置,其利用上述方法并且具有能够实时反馈覆盖偏移以减少光刻工艺中的周期时间和返工时间的机构。
    • 56. 发明申请
    • Tricolored handle structure for screwdriver
    • 三角手柄结构的螺丝刀
    • US20050115023A1
    • 2005-06-02
    • US10724930
    • 2003-12-01
    • Jack Lin
    • Jack Lin
    • B25G1/00B25G1/10E05B1/00
    • B25G1/105B25G1/00Y10T16/44
    • A tricolored handle structure for screwdriver, which is provided along the axial direction with a rod which extends outward from the handle, the handle has a hard-plastic made first core handle integrally melted with a hard-plastic made second core handle and then being coated with a soft third layer, the first core handle has at least a hard first pattern portion, the second core handle has at least a hard second pattern portion, wherein the first pattern portions and the pattern portion are not coated by third layer, the first pattern portion, the second pattern portion and the third layer are different colored and form a smooth surface of the handle.
    • 一种用于螺丝刀的三色手柄结构,其沿着轴向设置有从手柄向外延伸的杆,手柄具有硬塑料制成的第一芯手柄,其与硬塑料制成的第二芯手柄整体熔化,然后被涂覆 具有软的第三层,所述第一芯手柄具有至少硬的第一图案部分,所述第二芯手柄具有至少硬的第二图案部分,其中所述第一图案部分和图案部分不被第三层涂覆, 图案部分,第二图案部分和第三层是不同的颜色,并形成手柄的光滑表面。
    • 60. 发明授权
    • Decorating lamp device
    • 装饰灯装置
    • US06152574A
    • 2000-11-28
    • US258876
    • 1999-02-26
    • Jack Lin
    • Jack Lin
    • F21S8/00F21V11/00
    • F21S8/00F21W2121/00
    • A decorating lamp device comprises a body and a plurality of lamp sets. The body have a positioning seat and an upper cover being installed above the body. The top portion of the positioning seat projects from the top portion. A plurality of through holes with equal spaces are formed on the top cover; and a plurality of lamp sets spaced with each other are positioned on the periphery of the body. Each of the lamp set have the respective reflecting mask which is matched with the through holes of the upper cover. Each of the reflecting mask have a glass plate located thereabove and have a respective bulb seat. Each of the bulb seat is inserted with a bulb. Thereby, a container can be positioned on the decorating lamp device. The container is located on the top portion of the positioning seat and can be filled with water. When the bulbs of the plurality of lamp sets light up, the light can be projected to the container and water through the reflecting mask so that the container and the water present a state of emitting light. Thus, a wholly different visual effect more beautiful than the prior art lamp set is presented by the lamp device of the present invention.
    • 装饰灯装置包括主体和多个灯组。 身体有一个定位座和一个上盖安装在身体上方。 定位座的顶部从顶部突出。 在顶盖上形成多个具有相等空间的通孔; 并且彼此间隔开的多个灯组位于主体的周边上。 每个灯具具有与上盖的通孔匹配的相应反射罩。 每个反射罩具有位于其上方的玻璃板并且具有相应的灯泡座。 每个灯泡座插入一个灯泡。 因此,容器可以位于装饰灯装置上。 容器位于定位座的顶部,可以充满水。 当多个灯具的灯泡点亮时,光可以通过反射罩投射到容器和水,使得容器和水呈现出发光的状态。 因此,本发明的灯装置呈现出比现有技术的灯组更美观的完全不同的视觉效果。