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    • 51. 发明申请
    • Sub-Resolutional Grayscale Reticle
    • 子分辨灰度光栅
    • US20100040958A1
    • 2010-02-18
    • US12193568
    • 2008-08-18
    • Bruce D. UlrichYoshi OnoWei Gao
    • Bruce D. UlrichYoshi OnoWei Gao
    • G03F1/00
    • G03F1/50G03F7/0005
    • A sub-resolutional grayscale reticle and associated fabrication method have been presented. The method provides a transparent substrate, and forms a plurality of coincident partial-light transmissive layers overlying the transparent substrate. A pattern is formed, sub-resolutional at a first wavelength, in at least one of the transmissive layers. If there are n transmissive layers, the reticle transmits at least (n+1) intensities of light. In one aspect, each of the plurality of transmissive layers has the same extinction coefficient and the same thickness. In other aspects, the transmissive layers may have different thickness. Then, even if the extinction coefficients are the same, the attenuation of light through each layer is different. The transmission characteristics of the reticle can be further varied if the transmissive layers have different extinction coefficients. Likewise, the transmission characteristics through the sub-resolutional patterns can be varied.
    • 已经提出了一种亚分辨灰度标线和相关的制造方法。 该方法提供透明基板,并且形成覆盖透明基板的多个重合部分透光层。 在至少一个透射层中形成在第一波长处副溶液的图案。 如果存在n个透射层,则光罩传播至少(n + 1)个光强。 在一个方面,多个透射层中的每一个具有相同的消光系数和相同的厚度。 在其它方面,透射层可以具有不同的厚度。 那么即使消光系数相同,每层的光的衰减也是不同的。 如果透射层具有不同的消光系数,则可以进一步改变掩模版的透射特性。 同样,可以改变通过子解决图案的传输特性。
    • 52. 发明申请
    • ASYNCHRONOUS REQUEST-RESPONSE COMMUNICATION METHOD
    • 异步请求响应通信方法
    • US20090198768A1
    • 2009-08-06
    • US12023543
    • 2008-01-31
    • Wei GaoTom ChenWin-Harn Liu
    • Wei GaoTom ChenWin-Harn Liu
    • G06F15/16
    • G06F9/54G06F2209/541
    • An asynchronous request-response communication method is applied in data transmission for applications running in a server. The asynchronous request-response method includes the following steps. Establish a socket and a connection port corresponding to a request in a request side; set an object pool in each request side respectively, for recording connection statuses of the sockets corresponding to different requests; wait till the server has finished the request; once the server has finished the received request, the server transmits a callback message to the corresponding socket of the request side; and search a corresponding process event in the object pool according to the callback message. The request side adopts the socket and the connection port to perform the asynchronous request-response operations, thereby reducing the connection load between the server and the request side.
    • 在服务器中运行的应用程序的数据传输中应用异步请求 - 响应通信方法。 异步请求 - 响应方法包括以下步骤。 在请求方建立与请求对应的套接字和连接端口; 在每个请求侧分别设置一个对象池,用于记录与不同请求对应的套接字的连接状态; 等到服务器完成请求; 一旦服务器完成接收到的请求,服务器将回叫消息发送到请求方的对应套接字; 并根据回调消息搜索对象池中的相应进程事件。 请求方采用套接字和连接端口执行异步请求 - 响应操作,从而减少服务器与请求方之间的连接负载。
    • 55. 发明授权
    • Stage device
    • 舞台装置
    • US07257902B2
    • 2007-08-21
    • US11522400
    • 2006-09-18
    • Wei GaoSatoshi KiyonoYoshiyuki TomitaMakoto Tano
    • Wei GaoSatoshi KiyonoYoshiyuki TomitaMakoto Tano
    • G01D21/00
    • G03F7/70775G03F7/70716
    • This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.
    • 本发明涉及一种使用平面电机在X-Y方向和旋转方向上高精度地移动的平台装置。 本发明的目的在于减小舞台装置的尺寸并且准确地测量舞台到底座的位置。 舞台装置包括在基座的整个平面上具有刻度部分的刻度单元,以及设置在可移动台部的底面上的三个二维角度传感器。 刻度单元和二维角度传感器形成表面编码。 可动平台部分的位置由表面编码器测量。
    • 58. 发明授权
    • Method of fabricating a p-type CaO-doped SrCu2O2 thin film
    • 制造p型CaO掺杂SrCu2O2薄膜的方法
    • US07087526B1
    • 2006-08-08
    • US11261020
    • 2005-10-27
    • Wei-Wei ZhuangWei GaoYoshi Ono
    • Wei-Wei ZhuangWei GaoYoshi Ono
    • H01L23/02
    • C23C26/00
    • A method of CaO-doped SrCu2O2 spin-on precursor synthesis and low temperature p-type thin film deposition, includes preparing a wafer to receive a spin-coating thereon; selecting metalorganic compounds to form a SrCu2O2 precursor, mixing and refluxing the metalorganic compounds to form a precursor mixture; filtering the precursor mixture to produce a spin-coating precursor; applying the spin-coating precursor to the wafer in a two-step spin coating procedure; baking the spin-coated wafer using a hot-plate bake to evaporate substantially all of the solvents; and annealing the spin-coated wafer to form a CaO-doped SrCu2O2 layer thereon.
    • 掺有CaO的SrCu 2 O 2 O 2旋涂前体合成和低温p型薄膜沉积的方法包括制备晶片以在其上接受旋涂法 ; 选择金属有机化合物以形成SrCu 2 O 2 O 2前体,将金属有机化合物混合并回流以形成前体混合物; 过滤前体混合物以产生旋涂前体; 以两步旋涂方法将旋涂前驱体施加到晶片上; 使用热板烘烤烘烤旋涂的晶片以基本上蒸发所有溶剂; 以及对旋涂的晶片退火以在其上形成掺杂CaO的SrCu 2 O 2 O 2层。