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    • 51. 发明申请
    • Method and apparatus for measuring a characteristic of a sample feature
    • 用于测量样本特征的特征的方法和装置
    • US20070067140A1
    • 2007-03-22
    • US11228957
    • 2005-09-16
    • Rohit JainJohn Richards
    • Rohit JainJohn Richards
    • G01B11/02
    • G01Q10/06G01Q30/04G03F7/70625
    • An SPM based measuring technique for measuring surface features of a sample fits a curve to a family of feature edge points acquired as a result of an SPM scan of the surface feature. If two curves are fit on opposed edges of the feature of interest, the maximum or minimum distance between those curves can be determined to ascertain a dimension of interest such as a maximum via width, a minimum line width, etc. The scan is preferably a relatively low-resolution scan in the Y direction, typically having 8-12 scan profiles passing through the feature of interest low-resolution, which is about half that typically used by prior techniques. The low-resolution scan can be performed relatively rapidly and with high repeatability. Repeatability is also higher than with prior techniques, and the level of repeatability is relatively insensitive to the resolution in the Y direction. Using a low-resolution scan also significantly reduces tip wear and increases throughput when compared to high-resolution scans.
    • 用于测量样品表面特征的基于SPM的测量技术将曲线拟合成由于表面特征的SPM扫描而获得的特征边缘点族。 如果两个曲线拟合在感兴趣特征的相对边缘上,则可以确定这些曲线之间的最大或最小距离以确定感兴趣的尺寸,例如最大通孔宽度,最小线宽等。扫描优选为 在Y方向上的相对低分辨率的扫描通常具有通过感兴趣特征的8-12扫描轮廓的低分辨率,其大约是现有技术通常使用的一半。 低分辨率扫描可以相对快速地进行并具有很高的重复性。 重复性也高于现有技术,重复性水平对Y方向的分辨率相对不敏感。 与高分辨率扫描相比,使用低分辨率扫描也显着降低了尖端磨损并提高了吞吐量。
    • 60. 发明授权
    • Method and apparatus for measuring a characteristic of a sample feature
    • 用于测量样本特征的特征的方法和装置
    • US07421370B2
    • 2008-09-02
    • US11228957
    • 2005-09-16
    • Rohit JainJohn Richards
    • Rohit JainJohn Richards
    • G06F15/00G01B5/02
    • G01Q10/06G01Q30/04G03F7/70625
    • A scanning probe microscope (SPM) based measuring technique for measuring surface features of a sample fits a curve to a family of feature edge points acquired as a result of an SPM scan of the surface feature. If two curves are fit on opposed edges of the feature of interest, the maximum or minimum distance between those curves can be determined to ascertain a dimension of interest such as a maximum via width, a minimum line width, etc. The scan is preferably a relatively low-resolution scan in the Y direction, typically having 8-12 scan profiles passing through the feature of interest low-resolution, which is about half that typically used by prior techniques. The low-resolution scan can be performed relatively rapidly and with high repeatability. Repeatability is also higher than with prior techniques, and the level of repeatability is relatively insensitive to the resolution in the Y direction. Using a low-resolution scan also significantly reduces tip wear and increases throughput when compared to high-resolution scans.
    • 用于测量样品表面特征的扫描探针显微镜(SPM)测量技术将曲线拟合成由于表面特征的SPM扫描而获得的特征边缘点族。 如果两个曲线拟合在感兴趣特征的相对边缘上,则可以确定这些曲线之间的最大或最小距离以确定感兴趣的尺寸,例如最大通孔宽度,最小线宽等。扫描优选为 在Y方向上的相对低分辨率的扫描通常具有通过感兴趣特征的8-12扫描轮廓的低分辨率,其大约是现有技术通常使用的一半。 低分辨率扫描可以相对快速地进行并具有很高的重复性。 重复性也高于现有技术,重复性水平对Y方向的分辨率相对不敏感。 与高分辨率扫描相比,使用低分辨率扫描也显着降低了尖端磨损并提高了吞吐量。