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    • 56. 发明授权
    • Active sensor for micro force measurement
    • 用于微力测量的主动传感器
    • US07367242B2
    • 2008-05-06
    • US11366014
    • 2006-02-27
    • Ning XiYantao Shen
    • Ning XiYantao Shen
    • G01L1/10
    • G01L1/08
    • An active micro-force sensor is provided for use on a micromanipulation device. The active micro-force sensor includes a cantilever structure having an actuator layer of piezoelectric material and a sensing layer of piezoelectric material bonded together. When an external force is exerted on the sensor, the sensor deforms and an applied force signal is recorded by the sensing layer. The applied force signal is then fed back to the actuating layer of the sensor via a servoed transfer function or servo controller, so that a counteracting deformation can be generated by the bending moment from the servoed actuating layer to quickly balance the deformation caused by the external micro-force. Once balanced, the sensor beam comes back to straight status and the tip will remain in its equilibrium position, thus the sensor stiffness seems to be virtually improved so that the accurate motion control of the sensor tip can be reached, especially, at the same time, the micro-force can also be obtained by solving the counteracting balance voltage applied to the actuating layer.
    • 提供用于显微操作装置的主动微力传感器。 有源微力传感器包括具有压电材料的致动器层和压电材料的感测层结合在一起的悬臂结构。 当外力施加在传感器上时,传感器变形,施加的力信号由传感层记录。 所施加的力信号然后通过伺服传递函数或伺服控制器反馈到传感器的致动层,使得可以通过来自伺服致动层的弯矩产生抵消变形,以快速平衡由外部引起的变形 微力。 一旦平衡,传感器光束返回到直线状态,并且尖端将保持在其平衡位置,因此传感器刚度似乎被实际改善,使得可以达到传感器尖端的精确运动控制,特别是同时 ,也可以通过求解施加到致动层的抵消平衡电压来获得微力。