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51. 发明授权

US08728919B2 Non-volatile semiconductor storage device and method of manufacturing the same 有权
标题翻译：非易失性半导体存储装置及其制造方法
公开(公告)号：US08728919B2
公开(公告)日：2014-05-20
申请号：US13723601
申请日：2012-12-21
申请人： Masaru Kito , Yoshiaki Fukuzumi , Masaru Kidoh , Megumi Ishiduki , Yosuke Komori , Hiroyasu Tanaka , Ryota Katsumata , Hideaki Aochi
发明人： Masaru Kito , Yoshiaki Fukuzumi , Masaru Kidoh , Megumi Ishiduki , Yosuke Komori , Hiroyasu Tanaka , Ryota Katsumata , Hideaki Aochi
IPC分类号： H01L21/20
CPC分类号： H01L29/7926 , H01L27/0688 , H01L27/11551 , H01L27/11556 , H01L29/7881
摘要： A non-volatile semiconductor storage device includes a plurality of memory strings each having a plurality of electrically rewritable memory cells connected in series. Each of the memory strings comprising: a first semiconductor layer including a columnar portion extending in a vertical direction with respect to a substrate; a plurality of first conductive layers formed to surround side surfaces of the columnar portions via insulation layers, and formed at a certain pitch in the vertical direction, the first conductive layers functioning as floating gates of the memory cells; and a plurality of second conductive layers formed to surround the first conductive layers via insulation layers, and functioning as control electrodes of the memory cells. Each of the first conductive layers has a length in the vertical direction that is shorter than a length in the vertical direction of each of the second conductive layers.
摘要翻译：非挥发性半导体存储装置包括多个存储串，每个存储串具有串联连接的多个电可重写存储单元。每个存储器串包括：第一半导体层，包括相对于衬底在垂直方向上延伸的柱状部分; 多个第一导电层，经由绝缘层形成为围绕柱状部分的侧表面，并以垂直方向上的一定间距形成，第一导电层用作存储器单元的浮动栅极; 以及形成为经由绝缘层包围第一导电层并且用作存储单元的控制电极的多个第二导电层。每个第一导电层在垂直方向上具有比每个第二导电层的垂直方向上的长度短的长度。

52. 发明授权

US08247863B2 Nonvolatile semiconductor memory device and method of manufacturing the same 有权
标题翻译：非易失性半导体存储器件及其制造方法
公开(公告)号：US08247863B2
公开(公告)日：2012-08-21
申请号：US12708161
申请日：2010-02-18
申请人： Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kito , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi
发明人： Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kito , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi
IPC分类号： H01L29/792
CPC分类号： H01L27/11578 , H01L27/11582 , H01L29/792 , H01L29/7926
摘要： A memory string comprises: a pair of columnar portions; a first insulating layer surrounding a side surface of the columnar portions; a charge storage layer surrounding a side surface of the first insulating layer; a second insulating layer surrounding a side surface of the charge storage layer; and a first conductive layer surrounding a side surface of the second insulating layer. A select transistor comprises: a second semiconductor layer extending from an upper surface of the columnar portions; a third insulating layer surrounding a side surface of the second semiconductor layer; a fourth insulating layer surrounding a side surface of the third insulating layer; and a second conductive layer surrounding a side surface of the fourth insulating layer. The first semiconductor layer is formed continuously in an integrated manner with the second semiconductor layer. The first insulating layer is formed continuously in an integrated manner with the third insulating layer.
摘要翻译：存储器串包括：一对柱状部分; 围绕所述柱状部分的侧表面的第一绝缘层; 围绕所述第一绝缘层的侧表面的电荷存储层; 围绕电荷存储层的侧表面的第二绝缘层; 以及围绕所述第二绝缘层的侧表面的第一导电层。选择晶体管包括：从柱状部分的上表面延伸的第二半导体层; 围绕所述第二半导体层的侧表面的第三绝缘层; 围绕所述第三绝缘层的侧表面的第四绝缘层; 以及围绕所述第四绝缘层的侧表面的第二导电层。第一半导体层以与第二半导体层一体化的方式连续地形成。第一绝缘层与第三绝缘层一体地形成。

53. 发明授权

US08148769B2 Nonvolatile semiconductor memory device and method of manufacturing the same 有权
标题翻译：非易失性半导体存储器件及其制造方法
公开(公告)号：US08148769B2
公开(公告)日：2012-04-03
申请号：US12534576
申请日：2009-08-03
申请人： Masaru Kito , Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi
发明人： Masaru Kito , Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi
IPC分类号： H01L29/788
CPC分类号： H01L27/11578 , H01L27/11582 , H01L29/66833 , H01L29/792 , H01L29/7926
摘要： A nonvolatile semiconductor memory device includes a plurality of memory strings, each of which has a plurality of electrically rewritable memory cells connected in series; and select transistors, one of which is connected to each of ends of each of the memory strings. Each of the memory strings is provided with a first semiconductor layer having a pair of columnar portions extending in a perpendicular direction with respect to a substrate, and a joining portion formed so as to join lower ends of the pair of columnar portions; a charge storage layer formed so as to surround a side surface of the columnar portions; and a first conductive layer formed so as to surround the side surface of the columnar portions and the charge storage layer, and configured to function as a control electrode of the memory cells. Each of the select transistors is provided with a second semiconductor layer extending upwardly from an upper surface of the columnar portions; and a second conductive layer formed so as to surround a side surface of the second semiconductor layer with a gap interposed, and configured to function as a control electrode of the select transistors.
摘要翻译：非易失性半导体存储器件包括多个存储串，每个存储串具有串联连接的多个电可重写存储单元; 并选择晶体管，其中一个连接到每个存储器串的每一端。每个存储器串都具有第一半导体层，该第一半导体层具有相对于衬底在垂直方向上延伸的一对柱状部分，以及形成为连接该一对柱状部分的下端的接合部分; 形成为围绕所述柱状部的侧面的电荷存储层; 以及形成为围绕柱状部分的侧面和电荷存储层的第一导电层，并且被配置为用作存储单元的控制电极。每个选择晶体管设置有从柱状部分的上表面向上延伸的第二半导体层; 以及第二导电层，其被形成为以间隔开的方式围绕所述第二半导体层的侧表面，并且被配置为用作所述选择晶体管的控制电极。

54. 发明授权

US07969789B2 Method for driving nonvolatile semiconductor memory device 有权
标题翻译：用于驱动非易失性半导体存储器件的方法
公开(公告)号：US07969789B2
公开(公告)日：2011-06-28
申请号：US12536226
申请日：2009-08-05
申请人： Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi
发明人： Ryota Katsumata , Masaru Kito , Yoshiaki Fukuzumi , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi
IPC分类号： G11C16/04
CPC分类号： H01L27/11578 , G11C11/5671 , G11C16/0475 , G11C16/0483 , H01L27/11551 , H01L27/11556 , H01L27/11582
摘要： In a nonvolatile semiconductor memory device having n (n is an integer of two or more) electrode films stacked and having charge storage layers provided above and below each of the electrode films, when data “0” is written by injecting electrons into the charge storage layer on a source line side of a memory cell of the number k (k is an integer of 1 to (n−1)) as counted from an end on a bit line side in a selected semiconductor pillar, positive program potential is given to the electrode film of the number 1 to k as counted from the bit line side, and 0 V is given to the electrode film of the number (k+1) to n, therewith positive potential is given to the bit line and 0 V is given to the source line.
摘要翻译：在具有n（n为2以上的整数）的电极膜的非易失性半导体存储装置中，在各电极膜的上下配置有电荷存储层的情况下，在将数据“0”注入到电荷存储部在选择的半导体柱中从位线侧的端部开始计数k（k为1〜（n-1）的整数）的存储单元的源极侧的层，将正的程序电位赋予从位线侧计数1〜k的电极膜，向数字（k + 1）〜n的电极膜施加0V，其中给定位线为0V，0V为给源线。

55. 发明申请

US20100207195A1 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：非挥发性半导体存储器件及其制造方法
公开(公告)号：US20100207195A1
公开(公告)日：2010-08-19
申请号：US12679991
申请日：2008-12-09
申请人： Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kidoh , Masaru Kito , Hiroyasu Tanaka , Yosuke Komori , Megumi Ishiduki , Hideaki Aochi
发明人： Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kidoh , Masaru Kito , Hiroyasu Tanaka , Yosuke Komori , Megumi Ishiduki , Hideaki Aochi
IPC分类号： H01L29/792 , H01L21/336
CPC分类号： H01L27/11582 , G11C16/0483 , H01L27/1052 , H01L27/11551 , H01L27/11556 , H01L27/11573 , H01L27/11575 , H01L27/11578 , H01L29/513
摘要： A non-volatile semiconductor storage device has a plurality of memory strings to each of which a plurality of electrically rewritable memory cells are connected in series. Each of the memory strings includes first semiconductor layers each having a pair of columnar portions extending in a vertical direction with respect to a substrate and a coupling portion formed to couple the lower ends of the pair of columnar portions; a charge storage layer formed to surround the side surfaces of the columnar portions; and first conductive layers formed to surround the side surfaces of the columnar portions and the charge storage layer. The first conductive layers functions as gate electrodes of the memory cells.
摘要翻译：非挥发性半导体存储装置具有多个存储串，其中多个电可重写存储单元串联连接。每个存储串包括第一半导体层，每个第一半导体层具有相对于衬底在垂直方向上延伸的一对柱状部分和形成为耦合该对柱状部分的下端的耦合部分; 形成为围绕所述柱状部的侧面的电荷存储层; 以及形成为围绕柱状部分和电荷存储层的侧表面的第一导电层。第一导电层用作存储器单元的栅电极。

56. 发明申请

US20100109072A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME 有权
标题翻译：非易失性半导体存储器件及其制造方法
公开(公告)号：US20100109072A1
公开(公告)日：2010-05-06
申请号：US12563832
申请日：2009-09-21
申请人： Masaru KIDOH , Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yosuke Komori , Megumi Ishiduki , Hideaki Aochi , Yoshiaki Fukuzumi
发明人： Masaru KIDOH , Hiroyasu Tanaka , Ryota Katsumata , Masaru Kito , Yosuke Komori , Megumi Ishiduki , Hideaki Aochi , Yoshiaki Fukuzumi
IPC分类号： H01L27/115 , H01L21/8246
CPC分类号： H01L27/11578 , H01L21/76816 , H01L27/0688 , H01L27/112 , H01L27/11582
摘要： A nonvolatile semiconductor memory device includes a first stacked body on a silicon substrate, and a second stacked body is provided thereon. The first stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films, and a first portion of a through-hole extending in a stacking direction is formed. The second stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films, and a second portion of the through-hole is formed. A memory film is formed on an inner face of the through-hole, and a silicon pillar is buried in an interior of the through-hole. A central axis of the second portion of the through-hole is shifted from a central axis of the first portion, and a lower end of the second portion is positioned lower than an upper portion of the first portion.
摘要翻译：非易失性半导体存储器件包括在硅衬底上的第一层叠体，并且在其上设置第二层叠体。第一堆叠体包括交替层叠有多个电极膜的多个绝缘膜，并且形成沿堆叠方向延伸的通孔的第一部分。第二堆叠体包括交替层叠有多个电极膜的多个绝缘膜，并且形成通孔的第二部分。在通孔的内表面上形成记忆膜，并且将硅柱埋在通孔的内部。通孔的第二部分的中心轴线从第一部分的中心轴线偏移，并且第二部分的下端位于比第一部分的上部更低的位置。

57. 发明申请

US20100096682A1 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：非挥发性半导体存储器件及其制造方法
公开(公告)号：US20100096682A1
公开(公告)日：2010-04-22
申请号：US12556242
申请日：2009-09-09
申请人： Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kito , Hiroyasu Tanaka , Masaru Kidoh , Yosuke Komori , Megumi Ishiduki , Akihiro Nitayama , Hideaki Aochi , Hitoshi Ito , Yasuyuki Matsuoka
发明人： Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kito , Hiroyasu Tanaka , Masaru Kidoh , Yosuke Komori , Megumi Ishiduki , Akihiro Nitayama , Hideaki Aochi , Hitoshi Ito , Yasuyuki Matsuoka
IPC分类号： H01L29/78 , H01L21/768
CPC分类号： H01L27/11578 , H01L27/11565 , H01L27/11582
摘要： A non-volatile semiconductor storage device has a memory string including a plurality of electrically rewritable memory cells connected in series. The non-volatile semiconductor storage device also has a protruding layer formed to protrude upward with respect to a substrate. The memory string includes: a plurality of first conductive layers laminated on the substrate; a first semiconductor layer formed to penetrate the plurality of first conductive layers; and an electric charge storage layer formed between the first conductive layers and the first semiconductor layer, and configured to be able to store electric charges. Each of the plurality of first conductive layers includes: a bottom portion extending in parallel to the substrate; and a side portion extending upward with respect to the substrate along the protruding layer at the bottom portion. The protruding layer has a width in a first direction parallel to the substrate that is less than or equal to its length in a lamination direction.
摘要翻译：非易失性半导体存储装置具有串联连接的多个电可重写存储单元的存储串。非挥发性半导体存储装置还具有形成为相对于基板向上突出的突出层。存储器串包括：层叠在基板上的多个第一导电层; 形成为穿透所述多个第一导电层的第一半导体层; 以及形成在第一导电层和第一半导体层之间的电荷存储层，并且能够存储电荷。多个第一导电层中的每一个包括：平行于基板延伸的底部; 以及沿底部的突出层相对于基板向上延伸的侧部。该突出层在平行于基板的第一方向上的宽度小于或等于其在层叠方向上的长度。

58. 发明申请

US20090230458A1 NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：非挥发性半导体存储器件及其制造方法
公开(公告)号：US20090230458A1
公开(公告)日：2009-09-17
申请号：US12392636
申请日：2009-02-25
申请人： Megumi ISHIDUKI , Hideaki Aochi , Ryota Katsumata , Hiroyasu Tanaka , Masaru Kidoh , Masaru Kito , Yoshiaki Fukuzumi , Yosuke Komori , Yasuyuki Matsuoka
发明人： Megumi ISHIDUKI , Hideaki Aochi , Ryota Katsumata , Hiroyasu Tanaka , Masaru Kidoh , Masaru Kito , Yoshiaki Fukuzumi , Yosuke Komori , Yasuyuki Matsuoka
IPC分类号： H01L29/792 , H01L21/28
CPC分类号： H01L29/792 , H01L27/11565 , H01L27/11578 , H01L27/11582 , H01L29/42324 , H01L29/4234 , H01L29/7881 , H01L29/7926
摘要： A non-volatile semiconductor storage device has a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series. Each of the memory strings includes: a columnar semiconductor layer extending in a direction perpendicular to a substrate; a plurality of conductive layers formed at a sidewall of the columnar semiconductor layer via memory layers; and interlayer insulation layers formed above of below the conductive layers. A sidewall of the conductive layers facing the columnar semiconductor layer is formed to be inclined such that the distance thereof from a central axis of the columnar semiconductor layer becomes larger at lower position thereof than at upper position thereof. While, a sidewall of the interlayer insulation layers facing the columnar semiconductor layer is formed to be inclined such that the distance thereof from a central axis of the columnar semiconductor layer becomes smaller at lower position thereof than at upper position thereof.
摘要翻译：非易失性半导体存储装置具有多个具有串联连接的多个电可重写存储单元的存储器串。每个存储器串包括：在垂直于衬底的方向上延伸的柱状半导体层; 多个导电层，经由存储层形成在所述柱状半导体层的侧壁处; 以及形成在导电层下方的层间绝缘层。形成面向柱状半导体层的导电层的侧壁，使得其与柱状半导体层的中心轴的距离在其下部位置比在其上部位置变大。同时，面对柱状半导体层的层间绝缘层的侧壁形成为倾斜，使得其在柱状半导体层的中心轴线处的距离在其下部位置处比在其上部位置变小。

59. 发明申请

US20090212350A1 NONVOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：非易失性半导体存储器件及其制造方法
公开(公告)号：US20090212350A1
公开(公告)日：2009-08-27
申请号：US12389856
申请日：2009-02-20
申请人： Masaru KIDOH , Masaru Kito , Ryota Katsumata , Yoshiaki Fukuzumi , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi , Akihiro Nitayama , Hitoshi Ito , Yasuyuki Matsuoka
发明人： Masaru KIDOH , Masaru Kito , Ryota Katsumata , Yoshiaki Fukuzumi , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi , Akihiro Nitayama , Hitoshi Ito , Yasuyuki Matsuoka
IPC分类号： H01L29/792 , H01L21/28
CPC分类号： H01L27/105 , H01L27/0688 , H01L27/11575 , H01L27/11578 , H01L27/11582
摘要： A nonvolatile semiconductor storage device has a plurality of memory strings in which a plurality of electrically rewritable memory cells are connected in series. The memory string has a columnar semiconductor layer extending in a direction perpendicular to a substrate; a conductive layer formed so as to sandwich a charge storing layer in cooperation with the columnar semiconductor layer; and a metal layer formed so as to be in contact with the top face of the conductive layer.
摘要翻译：非易失性半导体存储装置具有串联连接多个电可重写存储单元的多个存储串。存储器串具有在垂直于衬底的方向上延伸的柱状半导体层; 形成为与柱状半导体层配合地夹着电荷存储层的导电层; 以及形成为与导电层的顶面接触的金属层。

60. 发明授权

US08569133B2 Nonvolatile semiconductor memory device and method of manufacturing the same 失效
标题翻译：非易失性半导体存储器件及其制造方法
公开(公告)号：US08569133B2
公开(公告)日：2013-10-29
申请号：US13366509
申请日：2012-02-06
申请人： Masaru Kito , Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi
发明人： Masaru Kito , Yoshiaki Fukuzumi , Ryota Katsumata , Masaru Kidoh , Hiroyasu Tanaka , Megumi Ishiduki , Yosuke Komori , Hideaki Aochi
IPC分类号： H01L21/336
CPC分类号： H01L27/11578 , H01L27/11582 , H01L29/66833 , H01L29/792 , H01L29/7926
摘要： A nonvolatile semiconductor memory device includes a plurality of memory strings, each of which has a plurality of electrically rewritable memory cells connected in series; and select transistors, one of which is connected to each of ends of each of the memory strings. Each of the memory strings is provided with a first semiconductor layer having a pair of columnar portions extending in a perpendicular direction with respect to a substrate, and a joining portion formed so as to join lower ends of the pair of columnar portions; a charge storage layer formed so as to surround a side surface of the columnar portions; and a first conductive layer formed so as to surround the side surface of the columnar portions and the charge storage layer, and configured to function as a control electrode of the memory cells. Each of the select transistors is provided with a second semiconductor layer extending upwardly from an upper surface of the columnar portions; and a second conductive layer formed so as to surround a side surface of the second semiconductor layer with a gap interposed, and configured to function as a control electrode of the select transistors.
摘要翻译：非易失性半导体存储器件包括多个存储串，每个存储串具有串联连接的多个电可重写存储单元; 并选择晶体管，其中一个连接到每个存储器串的每一端。每个存储器串都具有第一半导体层，该第一半导体层具有相对于基板在垂直方向上延伸的一对柱状部分，以及形成为连接该一对柱状部分的下端的接合部分; 形成为围绕所述柱状部的侧面的电荷存储层; 以及形成为围绕柱状部分的侧面和电荷存储层的第一导电层，并且被配置为用作存储单元的控制电极。每个选择晶体管设置有从柱状部分的上表面向上延伸的第二半导体层; 以及第二导电层，其被形成为以间隔开的方式围绕所述第二半导体层的侧表面，并且被配置为用作所述选择晶体管的控制电极。

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