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    • 52. 发明授权
    • Speckle reduction in laser-projector images
    • 激光投影机图像中的斑点减少
    • US07502160B2
    • 2009-03-10
    • US11681376
    • 2007-03-02
    • Vladimir A. AksyukRandy C. GilesOmar D. LopezRoland Ryf
    • Vladimir A. AksyukRandy C. GilesOmar D. LopezRoland Ryf
    • G02B26/00G02B26/08
    • G02B26/0833G02B27/48
    • A laser projector having a configurable spatial light modulator (SLM) adapted to display various spatial modulation patterns and redirect illumination from a laser to form an image on the viewing screen. The laser projector drives the SLM to change spatial modulation patterns at a rate that causes the corresponding sequence of projected images to fuse to mitigate appearance of speckle in the resulting fused image. The SLM can be designed to redirect the illumination using either diffraction or specular reflection of light from the displayed spatial modulation pattern. In one embodiment, the SLM is a MEMS device having an array of individually addressable mirrors supported over a substrate and adapted to move (e.g., translate and/or rotate) with respect to the substrate.
    • 一种具有可配置空间光调制器(SLM)的激光投影仪,其适于显示各种空间调制图案,并且从激光器重定向照明以在观看屏幕上形成图像。 激光投影机驱动SLM以以使得相应的投影图像序列融合的速率来改变空间调制图案,以减轻所得融合图像中斑点的外观。 SLM可以被设计成使用来自显示的空间调制图案的光的衍射或镜面反射来重定向照明。 在一个实施例中,SLM是具有支撑在衬底上并适于相对于衬底移动(例如平移和/或旋转)的单独可寻址镜的阵列的MEMS器件。
    • 55. 发明授权
    • Amplification of MEMS motion
    • MEMS运动的放大
    • US06781744B1
    • 2004-08-24
    • US10459108
    • 2003-06-11
    • Vladimir A. AksyukOmar D. LopezFlavio PardoMaria E. Simon
    • Vladimir A. AksyukOmar D. LopezFlavio PardoMaria E. Simon
    • G02B2600
    • G02B6/357B81B3/0062B81B2201/042G02B6/3518G02B26/0841
    • A MEMS device having a movable mirror and a movable actuator plate mechanically coupled together such that a relatively small displacement of the plate results in mirror rotation by a relatively large angle. In a representative embodiment, the mirror and actuator plate are supported on a substrate. The actuator plate moves in response to a voltage difference applied between the plate and an electrode located on the substrate beneath that plate. One or more springs attached to the plate provide a counteracting restoring force when they are stretched from their rest positions by the plate motion. A spring attached between the actuator plate and the mirror transfers the motion of the actuator plate to the mirror such that, when the actuator plate moves toward the substrate, the mirror moves away from the substrate. A representative MEMS device of the invention configured with a mirror that is about 100 &mgr;m in length is capable of producing the mirror rotation angle of about 15 degrees using an actuator voltage of only about 50 V.
    • MEMS器件具有可移动反射镜和机械耦合在一起的可移动致动器板,使得板的相对小的位移导致反射镜旋转相对较大的角度。 在代表性的实施例中,反射镜和致动器板被支撑在基板上。 致动器板响应于施加在板和位于该板下方的衬底上的电极之间的电压差而移动。 连接到板上的一个或多个弹簧当它们通过板运动从其静止位置拉伸时提供抵消恢复力。 附接在致动器板和反射镜之间的弹簧将致动器板的运动传递到反射镜,使得当致动器板向基板移动时,反射镜远离基板移动。 配置有长度大约为100微米的反射镜的本发明的代表性MEMS器件能够使用仅约50V的致动器电压产生约15度的反射镜旋转角度。