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    • 59. 发明申请
    • Group III-V Device Including a Buffer Termination Body
    • 第III-V组装置,包括一个缓冲器终端机构
    • US20150115327A1
    • 2015-04-30
    • US14505252
    • 2014-10-02
    • International Rectifier Corporation
    • Michael A. Briere
    • H01L29/778H01L29/20H01L29/205H01L29/66
    • H01L29/778H01L29/2003H01L29/201H01L29/205H01L29/66431H01L29/66462H01L29/7783
    • There are disclosed herein various implementations of a III-Nitride device and method for its fabrication. The III-Nitride device includes a III-Nitride buffer layer situated over a substrate, the III-Nitride buffer layer having a first bandgap. In addition, the device includes a III-Nitride heterostructure situated over the III-Nitride buffer layer and configured to produce a two-dimensional electron gas (2DEG); the III-Nitride heterostructure including a channel layer having a second bandgap smaller than the first bandgap. The III-Nitride device also includes a buffer termination body situated between the III-Nitride buffer layer and the channel layer, the buffer termination body including a III-Nitride material having a third bandgap smaller than the first bandgap and larger the second bandgap.
    • 在此公开了III型氮化物器件及其制造方法的各种实施方式。 III-氮化物器件包括位于衬底上的III-氮化物缓冲层,III-氮化物缓冲层具有第一带隙。 另外,该器件包括位于III-氮化物缓冲层之上并被配置为产生二维电子气(2DEG)的III-氮化物异质结构; 该III-氮化物异质结构包括具有小于第一带隙的第二带隙的沟道层。 所述III-氮化物装置还包括位于所述III-氮化物缓冲层和所述沟道层之间的缓冲端接体,所述缓冲端接体包括具有比所述第一带隙小的第三带隙和所述第二带隙较大的III-氮化物材料。