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    • 52. 发明申请
    • INSPECTION SYSTEM, INSPECTION METHOD, AND PROGRAM
    • 检查系统,检验方法和程序
    • US20130148116A1
    • 2013-06-13
    • US13817545
    • 2011-08-01
    • Kazumasa Tanaka
    • Kazumasa Tanaka
    • G01N21/95
    • G01N21/9501G01N21/95623H01L22/12H01L2924/0002H01L2924/00
    • Setting a spatial filter requires repeatedly confirming a scan image through visual inspection by an operator and adjusting the spatial filter. A setting state is also dependent on the operator. Therefore, in the present invention, a scattered light image (beam image) and a diffracted light image (Fourier image) are simultaneously observed, and an intensity profile of the scattered light image (beam image) and an intensity profile of the diffracted light image (Fourier image) are simultaneously monitored. A field of view of a diffracted light image is scanned with only one spatial filter, and a state change with respect to the intensity profiles in the absence of insertion of the spatial filter is detected. A setting condition for a spatial filter is determined on the basis of the detected state change.
    • 设置空间滤波器需要通过操作者的目视检查重复确认扫描图像并调整空间滤波器。 设置状态也取决于操作员。 因此,在本发明中,同时观察散射光图像(光束图像)和衍射光图像(傅立叶图像),散射光图像(光束图像)的强度分布和衍射光图像的强度分布 (傅立叶图像)。 仅使用一个空间滤波器扫描衍射光图像的视场,并且检测在没有插入空间滤波器的情况下相对于强度分布的状态变化。 基于检测到的状态变化来确定空间滤波器的设定条件。
    • 59. 发明授权
    • Image pickup apparatus including a first image formation system and a second image formation system, method for capturing image, and method for designing image pickup apparatus
    • 图像拾取装置,包括第一图像形成系统和第二图像形成系统,用于拍摄图像的方法以及用于设计图像拾取装置的方法
    • US08031232B2
    • 2011-10-04
    • US11814151
    • 2006-01-13
    • Tetsujiro KondoYasushi TatehiraTetsushi KokuboKenji TanakaHitoshi MukaiHirofumi HibiKazumasa Tanaka
    • Tetsujiro KondoYasushi TatehiraTetsushi KokuboKenji TanakaHitoshi MukaiHirofumi HibiKazumasa Tanaka
    • H04N5/225
    • H04N5/2253H04N5/3415
    • The present invention relates to an image pickup apparatus, a method for capturing an image, and a method for designing the image pickup apparatus capable of realizing a fixed focal length image pickup apparatus of high resolution and fine resolution at a low cost by disposing a plurality of image pickup elements therein. An image pickup device 31 is of a focal coincidence type having a plurality of image pickup elements, such as CCD sensors 62-1 to 62-3, arranged in an array. That is, the image pickup device 31 has an optical system including a first image formation system 41 for forming an image of focal coincidence, a field lens 43 disposed in an image formation plane or in the vicinity of the image formation plane of the first image formation system, and a second image formation system group formed by a plurality of second image formation systems arranged in an array and including an image pickup element CCD sensor 62-K (K is a value between 1 and 3 in this example) for capturing the image formed on itself and a zoom lens 61-K for reforming a predetermined, part of the image formed on the image formation plane on the CCD sensor 62-K. The present invention is applicable to a digital still camera and a digital video camera including a plurality of image pickup elements.
    • 本发明涉及一种图像拾取装置,一种用于拍摄图像的方法和一种用于设计图像拾取装置的方法,该图像拾取装置能够以低成本实现高分辨率和精细分辨率的固定焦距图像拾取装置, 的图像拾取元件。 图像拾取装置31具有排列成阵列的诸如CCD传感器62-1至62-3的多个图像拾取元件的焦点一致型。 也就是说,图像拾取装置31具有包括用于形成焦点图像的第一图像形成系统41的光学系统,设置在图像形成平面中或第一图像的图像形成面附近的场透镜43 形成系统和由排列成阵列的多个第二图像形成系统形成的第二图像形成系统组,并且包括图像拾取元件CCD传感器62-K(K在本例中为1和3之间的值),用于捕获 形成在其上的图像和变焦透镜61-K,用于对形成在CCD传感器62-K上的图像形成平面上的预定部分图像进行重构。 本发明可应用于包括多个图像拾取元件的数字静态照相机和数字摄像机。