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    • 53. 发明授权
    • Method of manufacturing color filter substrate, method of manufacturing electro-optical device, electro-optical device, and electronic apparatus
    • 彩色滤光片基板的制造方法,电光装置的制造方法,电光装置以及电子装置
    • US07244158B2
    • 2007-07-17
    • US11108781
    • 2005-04-19
    • Hideyuki KimuraShunichi SekiNaoki Yamamoto
    • Hideyuki KimuraShunichi SekiNaoki Yamamoto
    • H01J9/00
    • H01L51/0005H01L27/3211H01L27/322H01L27/3295H01L51/56
    • To provide an electro-optical device, which is capable of improving film thickness uniformity and flatness of electro-optical layers to be formed. A method of manufacturing an electro-optical device according to the present invention comprises a step of forming a first partition wall portion and a second partition wall portion, and a step of ejecting a liquid substance for each of openings of each of the partition wall portions using a liquid droplet ejecting method, the liquid substance including functional materials composing the electro-optical layers. The ejected liquid substance has different viscosities for each electro-optical layer. In the partition wall portion formation step, a surface area of a portion of the first partition wall portion projecting from the second partition wall portion becomes relatively small in a position at which the liquid substance having relatively low viscosity is ejected, and the surface area of the portion of the first partition wall portion projecting from the second partition wall portion becomes relatively large in a position at which the liquid substance having relatively high viscosity is ejected.
    • 提供能够提高要形成的电光层的膜厚均匀性和平坦度的电光装置。 根据本发明的电光装置的制造方法包括:形成第一分隔壁部和第二分隔壁部的工序;以及对每个分隔壁部的各开口喷射液体物质的工序 使用液滴喷射方法,所述液体物质包括构成电光层的功能材料。 喷出的液体物质对于每个电光层具有不同的粘度。 在分隔壁部形成工序中,从第二分隔壁部突出的部分的表面积在排出较低粘度的液体物质的位置上变得相对较小, 从第二分隔壁部分突出的第一分隔壁部分的部分在排出具有较高粘度的液体物质的位置变得相对较大。