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    • 55. 发明授权
    • Method for fabricating electronic device
    • 电子设备制造方法
    • US07176124B2
    • 2007-02-13
    • US10923827
    • 2004-08-24
    • Susumu Matsumoto
    • Susumu Matsumoto
    • H01L21/4763
    • H01L21/76844H01L21/76805H01L21/76846H01L21/76861
    • A method for fabricating an electronic device includes: a step of forming a first conductor to become a wiring or a wiring plug in a first insulating film; a step of forming a second insulating film on the first insulating film and the first conductor and, after that, forming a hole reaching the top face of the first conductor in the second insulating film; a step of forming a first barrier metal film on a bottom and side walls of the hole and on the second insulating film; a step of removing a portion formed on the bottom of the hole in the first barrier metal film to thereby expose the top face of the first conductor; a step of performing a plasma process using a reducing gas after the step of exposing the top face of the first conductor; and a step of forming a second conductor to become a wiring plug or a wiring by filling a conductive film in the hole after the step of performing the plasma process.
    • 一种制造电子器件的方法包括:在第一绝缘膜中形成成为布线或布线插头的第一导体的步骤; 在所述第一绝缘膜和所述第一导体上形成第二绝缘膜的步骤,之后形成到所述第二绝缘膜中的所述第一导体的顶面的孔; 在所述孔的底壁和侧壁上以及所述第二绝缘膜上形成第一阻挡金属膜的步骤; 去除形成在所述第一阻挡金属膜中的所述孔的底部上的部分,从而暴露所述第一导体的顶面的步骤; 在暴露第一导体的顶面的步骤之后使用还原气体进行等离子体处理的步骤; 以及在执行等离子体处理的步骤之后,通过在孔中填充导电膜形成第二导体以成为布线插塞或布线的步骤。
    • 58. 发明授权
    • Lens apparatus for projection
    • 投影镜头设备
    • US06798584B2
    • 2004-09-28
    • US10327904
    • 2002-12-26
    • Susumu MatsumotoKumajiro SekineYasuhiro SekineYasaburou Ootaka
    • Susumu MatsumotoKumajiro SekineYasuhiro SekineYasaburou Ootaka
    • G02B900
    • G02B13/00
    • A lens apparatus for projection includes a plurality of lenses on an optical axis. A shading plate 11 for covering the peripheral portion of the lens to block off light entering the peripheral portion is provided as a single member on the optical axis with the lenses to omit an inking process. In addition, the shading plate 11 is integrally provided with a contrast compensating plate 13 for compensating a projected image, so that it is not required to provide any portions for supporting the contrast compensating plate 13. Moreover, a shading wall 23 for blocking off light leaking out of the peripheral portion of the lens is provided on the peripheral portion of the shading plate 11. Thus, it is possible to provide a lens apparatus for projection, which has a simple structure and which can be easily assembled to reduce the producing costs.
    • 用于投影的透镜装置包括在光轴上的多个透镜。 在透镜上设置用于覆盖透镜的周边部分以阻挡进入周边部分的光的遮光板11作为光轴上的单个部件,以省略墨迹处理。 此外,遮光板11一体地设置有用于补偿投影图像的对比度补偿板13,从而不需要提供用于支撑对比度补偿板13的任何部分。此外,遮光壁23用于遮挡光 在遮光板11的周边部分上设置有从透镜的周边部分漏出的透镜装置。因此,可以提供一种结构简单且易于组装以便降低生产成本的投影透镜装置 。
    • 59. 发明授权
    • Lens apparatus for projection
    • 投影镜头设备
    • US06552859B1
    • 2003-04-22
    • US09690808
    • 2000-10-18
    • Susumu MatsumotoKumajiro SekineYasuhiro SekineYasaburou Ootaka
    • Susumu MatsumotoKumajiro SekineYasuhiro SekineYasaburou Ootaka
    • G02B900
    • G02B13/00
    • A lens apparatus for projection includes a plurality of lenses on an optical axis. A shading plate 11 for covering the peripheral portion of the lens to block off light entering the peripheral portion is provided as a single member on the optical axis with the lenses to omit an inking process. In addition, the shading plate 11 is integrally provided with a contrast compensating plate 13 for compensating a projected image, so that it is not required to provide any portions for supporting the contrast compensating plate 13. Moreover, a shading wall 23 for blocking off light leaking out of the peripheral portion of the lens is provided on the peripheral portion of the shading plate 11. Thus, it is possible to provide a lens apparatus for projection, which has a simple structure and which can be easily assembled to reduce the producing costs.
    • 用于投影的透镜装置包括在光轴上的多个透镜。 在透镜上设置用于覆盖透镜的周边部分以阻挡进入周边部分的光的遮光板11作为光轴上的单个部件,以省略墨迹处理。 此外,遮光板11一体地设置有用于补偿投影图像的对比度补偿板13,从而不需要提供用于支撑对比度补偿板13的任何部分。此外,遮光壁23用于遮挡光 在遮光板11的周边部分上设置有从透镜的周边部分漏出的透镜装置。因此,可以提供一种结构简单且易于组装以便降低生产成本的投影透镜装置 。