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    • 55. 发明申请
    • SUPER-SELF-ALIGNED TRENCH-DMOS STRUCTURE AND METHOD
    • 超自对准TRENCH-DMOS结构和方法
    • US20110068395A1
    • 2011-03-24
    • US12958162
    • 2010-12-01
    • Francois Hebert
    • Francois Hebert
    • H01L29/78
    • H01L29/66734H01L21/2257H01L29/04H01L29/0865H01L29/0869H01L29/41766H01L29/456H01L29/66727H01L29/7813
    • A semiconductor device includes a P-body layer formed in an N-epitaxial layer; a gate electrode formed in a trench in the P-body and N-epitaxial layer; a top source region formed from the P-body layer next to the gate electrode; a gate insulator disposed along a sidewall of the gate electrode between the gate electrode and the source, between the gate electrode and the P-body and between the gate electrode and the N-epitaxial layer; a cap insulator disposed on top of the gate electrode; and an N+ doped spacer disposed along a sidewall of the source and a sidewall of the gate insulator. The source includes N+ dopants diffused from the spacer. A body contact region containing P-type dopants is formed from the N-epitaxial layer. The contact region touches one or more P-doped regions of the P-body layer and the source. Methods for manufacturing such a device are also disclosed. Embodiments of this invention may also be applied to P-channel devices.
    • 半导体器件包括在N外延层中形成的P体层; 形成在P体和N外延层中的沟槽中的栅电极; 由栅极电极旁边的P体层形成的顶部源极区域; 沿着栅电极的侧壁设置在栅电极和源极之间,栅电极和P体之间以及栅电极和N外延层之间的栅极绝缘体; 设置在所述栅电极的顶部的盖绝缘体; 以及沿着源极的侧壁和栅极绝缘体的侧壁设置的N +掺杂的间隔物。 源包括从间隔物扩散的N +掺杂剂。 由N型外延层形成含有P型掺杂剂的体接触区域。 接触区域接触P体层和源的一个或多个P掺杂区域。 还公开了制造这种装置的方法。 本发明的实施例也可以应用于P沟道器件。
    • 56. 发明申请
    • SUPER-SELF-ALIGNED TRENCH-DMOS STRUCTURE AND METHOD
    • 超自对准TRENCH-DMOS结构和方法
    • US20100032751A1
    • 2010-02-11
    • US12189062
    • 2008-08-08
    • Francois Hebert
    • Francois Hebert
    • H01L29/78H01L21/336
    • H01L29/66734H01L21/2257H01L29/04H01L29/0865H01L29/0869H01L29/41766H01L29/456H01L29/66727H01L29/7813
    • A semiconductor device includes a P-body layer formed in an N-epitaxial layer; a gate electrode formed in a trench in the P-body and N-epitaxial layer; a top source region formed from the P-body layer next to the gate electrode; a gate insulator disposed along a sidewall of the gate electrode between the gate electrode and the source, between the gate electrode and the P-body and between the gate electrode and the N-epitaxial layer; a cap insulator disposed on top of the gate electrode; and an N+ doped spacer disposed along a sidewall of the source and a sidewall of the gate insulator. The source includes N+ dopants diffused from the spacer. A body contact region containing P-type dopants is formed from the N-epitaxial layer. The contact region touches one or more P-doped regions of the P-body layer and the source. Methods for manufacturing such a device are also disclosed. Embodiments of this invention may also be applied to P-channel devices.
    • 半导体器件包括形成在N外延层中的P体层; 形成在P体和N外延层中的沟槽中的栅电极; 由栅极电极旁边的P体层形成的顶部源极区域; 沿着栅电极的侧壁设置在栅电极和源极之间,栅电极和P体之间以及栅电极和N外延层之间的栅极绝缘体; 设置在所述栅电极的顶部的盖绝缘体; 以及沿着源极的侧壁和栅极绝缘体的侧壁设置的N +掺杂的间隔物。 源包括从间隔物扩散的N +掺杂剂。 由N型外延层形成含有P型掺杂剂的体接触区域。 接触区域接触P体层和源的一个或多个P掺杂区域。 还公开了制造这种装置的方法。 本发明的实施例也可以应用于P沟道器件。