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    • 52. 发明授权
    • Substrate processing apparatus, substrate processing method and storage medium
    • 基板处理装置,基板处理方法和存储介质
    • US08778092B2
    • 2014-07-15
    • US13042645
    • 2011-03-08
    • Hiroshi TanakaHironobu HyakutakeTakashi Uno
    • Hiroshi TanakaHironobu HyakutakeTakashi Uno
    • B08B3/04B08B5/02F26B5/00
    • H01L21/67057H01L21/67028
    • There is provided a substrate processing method including cleaning a substrate by immersing the substrate in a cleaning solution in a longitudinal direction while the cleaning solution is supplied to a cleaning tank; transferring the substrate picked up from the cleaning tank to a drying chamber while holding the substrate in a longitudinal direction; and drying the substrate in the drying chamber communicating with an upper area of the cleaning tank by alternately supplying a first drying gas containing vapor of a solvent for removing a liquid and a second drying gas without containing the vapor of the solvent for removing the liquid to an area where the substrate is exposed between the upper area of the cleaning tank and the drying chamber after an upper end of the cleaned substrate is picked up from a liquid surface of the cleaning solution.
    • 提供了一种基板处理方法,包括通过在将清洁溶液供应到清洗槽的同时将基板浸入清洁溶液中而沿纵向清洗基板; 将从所述清洗槽拾取的所述基板沿长度方向保持所述基板; 以及通过交替地供给包含用于除去液体的溶剂的蒸气的第一干燥气体和第二干燥气体来干燥所述干燥室中与所述清洗槽的上部区域连通的基板,而不将所述溶剂的蒸气除去以除去所述液体 从清洗液的液面取出基板在清洗槽的上部区域与清洗后的基板的上端之间的干燥室之间露出的区域。
    • 53. 发明授权
    • Control apparatus and control method for internal combustion engine
    • 内燃机控制装置及控制方法
    • US08746211B2
    • 2014-06-10
    • US13031408
    • 2011-02-21
    • Koji AsoHiroshi Tanaka
    • Koji AsoHiroshi Tanaka
    • F02D41/06
    • F02D41/0025F02D41/0082F02D41/062F02D2200/0406
    • A control apparatus for an internal combustion engine starts the internal combustion engine by initiating combustion in cylinders belonging to a first cylinder group, from among a plurality of cylinders that make up the internal combustion engine. The control apparatus monitors a change in an amount of negative pressure generated in an intake pipe when the internal combustion engine is started, and obtains information related to an alcohol concentration of fuel used in the internal combustion engine. The control apparatus also calculates a fuel injection quantity necessary to initiate combustion in cylinders belonging to a second cylinder group, based on the amount of negative pressure generated in the intake pipe and the alcohol concentration of the fuel, and initiates combustion in each cylinder belonging to the second cylinder group when the necessary fuel injection quantity enters a range of quantities that are able to be injected by corresponding injectors.
    • 用于内燃机的控制装置通过在构成内燃机的多个气缸中启动属于第一气缸组的气缸中的燃烧来启动内燃机。 控制装置监视内燃机启动时在进气管中产生的负压量的变化,并获得与内燃机中使用的燃料的酒精浓度相关的信息。 控制装置还基于进气管中产生的负压量和燃料的酒精浓度,计算属于第二气缸组的气缸中开始燃烧所需的燃料喷射量,并且在每个气缸属于 当必要的燃料喷射量进入能够由相应的喷射器喷射的量的范围时,第二气缸组。
    • 60. 发明授权
    • Control apparatus and control method for internal combustion engine
    • 内燃机控制装置及控制方法
    • US08225771B2
    • 2012-07-24
    • US12986246
    • 2011-01-07
    • Koji AsoHiroshi Tanaka
    • Koji AsoHiroshi Tanaka
    • F02D41/06
    • F02D41/047F02D41/0082F02D41/0087F02D41/042F02D41/061F02D41/062F02D2041/0092F02D2041/0095
    • In a startup operation of an internal combustion engine, the internal combustion engine is started by supplying fuel to only a first cylinder group formed of a portion of cylinders, from among a plurality of cylinders that make up the internal combustion engine, when a startup condition of the internal combustion engine has been satisfied, and then fuel starts to be supplied to a second cylinder group formed of the remaining cylinders after the internal combustion engine has started. Meanwhile, in a stopping operation of the internal combustion engine, the internal combustion engine is stopped when a shutoff condition of the internal combustion engine is satisfied, by first stopping the supply of fuel to the second cylinder group and then stopping the supply of fuel to the first cylinder group after the supply of fuel to the second cylinder group has been stopped.
    • 在内燃机的启动操作中,通过在构成内燃机的多个气缸中的仅一个由一部分气缸形成的第一气缸组的情况下启动内燃机,当启动条件 已经满足了内燃机的功能,然后在内燃机起动之后,开始将燃料供给到由剩余气缸形成的第二气缸组。 同时,在内燃机的停止运转中,当满足内燃机的切断状态时,内燃机停止,首先停止向第二气缸组供给燃料,然后停止供给燃料 在向第二气缸组供给燃料之后的第一气缸组已经停止。