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    • 51. 发明授权
    • Semiconductor architecture having field-effect transistors especially suitable for analog applications
    • 具有特别适用于模拟应用的场效应晶体管的半导体架构
    • US08610207B2
    • 2013-12-17
    • US13298283
    • 2011-11-16
    • Constantin Bulucea
    • Constantin Bulucea
    • H01L21/8238
    • H01L21/823892H01L21/823807H01L21/823878H01L27/1203H01L29/1045H01L29/665H01L29/66659H01L29/7835
    • An insulated-gate field-effect transistor (220U) utilizes an empty-well region for achieving high performance. The concentration of the body dopant reaches a maximum at a subsurface location no more than 10 times deeper below the upper semiconductor surface than the depth of one of a pair of source/drain zones (262 and 264), decreases by at least a factor of 10 in moving from the subsurface location along a selected vertical line (136U) through that source/drain zone to the upper semiconductor surface, and has a logarithm that decreases substantially monotonically and substantially inflectionlessly in moving from the subsurface location along the vertical line to that source/drain zone. Each source/drain zone has a main portion (262M or 264M) and a more lightly doped lateral extension (262E or 264E). Alternatively or additionally, a more heavily doped pocket portion (280) of the body material extends along one of the source/drain zones.
    • 绝缘栅场效应晶体管(220U)利用空阱区实现高性能。 身体掺杂物的浓度在上半导体表面下方比在一对源/漏区(262和264)之一的深度不超过10倍的地下位置处达到最大值,减小至少一个因子 10沿着沿着选择的垂直线(136U)通过该源极/漏极区域移动到上半导体表面的地下位置移动,并且具有从沿着垂直线的地下位置移动到基本单调和基本上无穷地减小的对数, 源/漏区。 每个源/漏区具有主要部分(262M或264M)和更轻掺杂的横向延伸(262E或264E)。 替代地或另外地,主体材料的更重掺杂的凹穴部分(280)沿着源极/漏极区域中的一个延伸。
    • 53. 发明申请
    • Semiconductor Architecture Having Field-effect Transistors Especially Suitable for Analog Applications
    • 具有场效应晶体管的半导体结构,特别适用于模拟应用
    • US20130126983A1
    • 2013-05-23
    • US13298283
    • 2011-11-16
    • Constantin Bulucea
    • Constantin Bulucea
    • H01L29/78
    • H01L21/823892H01L21/823807H01L21/823878H01L27/1203H01L29/1045H01L29/665H01L29/66659H01L29/7835
    • An insulated-gate field-effect transistor (220U) utilizes an empty-well region for achieving high performance. The concentration of the body dopant reaches a maximum at a subsurface location no more than 10 times deeper below the upper semiconductor surface than the depth of one of a pair of source/drain zones (262 and 264), decreases by at least a factor of 10 in moving from the subsurface location along a selected vertical line (136U) through that source/drain zone to the upper semiconductor surface, and has a logarithm that decreases substantially monotonically and substantially inflectionlessly in moving from the subsurface location along the vertical line to that source/drain zone. Each source/drain zone has a main portion (262M or 264M) and a more lightly doped lateral extension (262E or 264E). Alternatively or additionally, a more heavily doped pocket portion (280) of the body material extends along one of the source/drain zones.
    • 绝缘栅场效应晶体管(220U)利用空阱区实现高性能。 身体掺杂物的浓度在上半导体表面下方比在一对源/漏区(262和264)之一的深度不超过10倍的地下位置处达到最大值,减小至少一个因子 10沿着沿着选择的垂直线(136U)通过该源极/漏极区域移动到上半导体表面的地下位置移动,并且具有从沿着垂直线的地下位置移动到基本单调和基本上无穷地减小的对数, 源/漏区。 每个源/漏区具有主要部分(262M或264M)和更轻掺杂的横向延伸(262E或264E)。 替代地或另外地,主体材料的更重掺杂的凹穴部分(280)沿着源极/漏极区域中的一个延伸。
    • 54. 发明授权
    • Configuration and fabrication of semiconductor structure having bipolar junction transistor in which non-monocrystalline semiconductor spacing portion controls base-link length
    • 具有双极结型晶体管的半导体结构的配置和制造,其中非单晶半导体间隔部分控制基极连接长度
    • US08304308B2
    • 2012-11-06
    • US13198601
    • 2011-08-04
    • Jeng-Jiun YangConstantin Bulucea
    • Jeng-Jiun YangConstantin Bulucea
    • H01L27/06
    • H01L27/0623H01L21/82285H01L21/8249H01L27/0826
    • A semiconductor structure contains a bipolar transistor (101) and a spacing structure (265-1 or 265-2). The transistor has an emitter (241), a base (243), and a collector (245). The base is formed with an intrinsic base portion (243I), a base link portion (243L), and a base contact portion (245C). The intrinsic base portion is situated below the emitter and above material of the collector. The base link portion extends between the intrinsic base portion and the base contact portions. The spacing structure includes an isolating dielectric layer (267-1 or 267-2) and a spacing component. The dielectric layer extends along the upper semiconductor surface. The spacing component includes a lateral spacing portion (269-1 or 269-2) of largely non-monocrystalline semiconductor material, preferably polycrystalline semiconductor material, situated on the dielectric layer above the base link portion. Opposite first and second upper edges of the lateral spacing portion (275-1 and 277-1) laterally conform to opposite first and second lower edges (297-1 and 299-1) of the base link portion so as to determine, and thereby control, its length.
    • 半导体结构包含双极晶体管(101)和间隔结构(265-1或265-2)。 晶体管具有发射极(241),基极(243)和集电极(245)。 基部形成有本征基部(243I),基部连接部(243L)和基部接触部(245C)。 本征基部位于发射极之下和集电极材料之上。 基部连接部在本征基部与基部接触部之间延伸。 间隔结构包括隔离电介质层(267-1或267-2)和间隔部件。 电介质层沿着上半导体表面延伸。 间隔部件包括位于基部连接部分上方的电介质层上的大部分非单晶半导体材料(优选多晶半导体材料)的侧向间隔部分(269-1或269-2)。 横向间隔部分(275-1和277-1)的相对的第一和第二上边缘横向地与基部连杆部分的相对的第一和第二下边缘(297-1和299-1)相一致,以便确定,从而 控制,其长度。
    • 55. 发明申请
    • Fabrication of Semiconductor Architecture Having Field-effect Transistors Especially Suitable for Analog Applications
    • 具有场效应晶体管的半导体结构的制造特别适用于模拟应用
    • US20120181626A1
    • 2012-07-19
    • US13298284
    • 2011-11-16
    • Constantin Bulucea
    • Constantin Bulucea
    • H01L29/78H01L21/336
    • H01L21/823807H01L21/823878H01L21/823892H01L27/1203
    • An insulated-gate field-effect transistor (220U) is provided with an empty-well region for achieving high performance. The concentration of the body dopant reaches a maximum at a subsurface location no more than 10 times deeper below the upper semiconductor surface than the depth of one of a pair of source/drain zones (262 and 264), decreases by at least a factor of 10 in moving from the subsurface location along a selected vertical line (136U) through that source/drain zone to the upper semiconductor surface, and has a logarithm that decreases substantially monotonically and substantially inflectionlessly in moving from the subsurface location along the vertical line to that source/drain zone. Each source/drain zone has a main portion (262M or 264M) and a more lightly doped lateral extension (262E or 264E). Alternatively or additionally, a more heavily doped pocket portion (280) of the body material extends along one of the source/drain zones.
    • 绝缘栅场效应晶体管(220U)具有用于实现高性能的空井区域。 身体掺杂物的浓度在上半导体表面下方比在一对源/漏区(262和264)之一的深度不超过10倍的地下位置处达到最大值,减小至少一个因子 10沿着沿着选择的垂直线(136U)通过该源极/漏极区域移动到上半导体表面的地下位置移动,并且具有从沿着垂直线的地下位置移动到基本单调和基本上无穷地基本上单调减小的对数, 源/漏区。 每个源/漏区具有主要部分(262M或264M)和更轻掺杂的横向延伸(262E或264E)。 替代地或另外地,主体材料的更重掺杂的凹穴部分(280)沿着源极/漏极区域中的一个延伸。
    • 56. 发明申请
    • Configuration and fabrication of semiconductor structure having bipolar junction transistor in which non-monocrystalline semiconductor spacing portion controls base-link length
    • 具有双极结型晶体管的半导体结构的配置和制造,其中非单晶半导体间隔部分控制基极连接长度
    • US20100244143A1
    • 2010-09-30
    • US12382966
    • 2009-03-27
    • Jeng-Jiun YangConstantin Bulucea
    • Jeng-Jiun YangConstantin Bulucea
    • H01L27/06H01L27/082H01L21/8228H01L21/8249
    • H01L27/0623H01L21/82285H01L21/8249H01L27/0826
    • A semiconductor structure contains a bipolar transistor (101) and a spacing structure (265-1 or 265-2). The transistor has an emitter (241), a base (243), and a collector (245). The base is formed with an intrinsic base portion (243I), a base link portion (243L), and a base contact portion (245C). The intrinsic base portion is situated below the emitter and above material of the collector. The base link portion extends between the intrinsic base portion and the base contact portions. The spacing structure includes an isolating dielectric layer (267-1 or 267-2) and a spacing component. The dielectric layer extends along the upper semiconductor surface. The spacing component includes a lateral spacing portion (269-1 or 269-2) of largely non-monocrystalline semiconductor material, preferably polycrystalline semiconductor material, situated on the dielectric layer above the base link portion. Opposite first and second upper edges of the lateral spacing portion (275-1 and 277-1) laterally conform to opposite first and second lower edges (297-1 and 299-1) of the base link portion so as to determine, and thereby control, its length.
    • 半导体结构包含双极晶体管(101)和间隔结构(265-1或265-2)。 晶体管具有发射极(241),基极(243)和集电极(245)。 基部形成有本征基部(243I),基部连接部(243L)和基部接触部(245C)。 本征基部位于发射极之下和集电极材料之上。 基部连接部在本征基部与基部接触部之间延伸。 间隔结构包括隔离电介质层(267-1或267-2)和间隔部件。 电介质层沿着上半导体表面延伸。 间隔部件包括位于基部连接部分上方的电介质层上的大部分非单晶半导体材料(优选多晶半导体材料)的侧向间隔部分(269-1或269-2)。 横向间隔部分(275-1和277-1)的相对的第一和第二上边缘横向地与基部连杆部分的相对的第一和第二下边缘(297-1和299-1)相一致,以便确定,从而 控制,其长度。
    • 57. 发明授权
    • Semiconductor architecture having field-effect transistors especially suitable for analog applications
    • 具有特别适用于模拟应用的场效应晶体管的半导体架构
    • US07642574B2
    • 2010-01-05
    • US11981481
    • 2007-10-31
    • Constantin Bulucea
    • Constantin Bulucea
    • H01L27/088
    • H01L21/823807H01L21/823878H01L21/823892H01L27/092H01L27/1203H01L27/1207
    • An insulated-gate field-effect transistor (100, 100V, 140, 150, 150V, 160, 170, 170V, 180, 180V, 190, 210, 210W, 220, 220U, 220V, 220W, 380, or 480) has a hypoabrupt vertical dopant profile below one (104 or 264) of its source/drain zones for reducing the parasitic capacitance along the pn junction between that source/drain zone and adjoining body material (108 or 268). In particular, the concentration of semiconductor dopant which defines the conductivity type of the body material increases by at least a factor of 10 in moving from that source/drain zone down to an underlying body-material location no more than 10 times deeper below the upper semiconductor surface than that source/drain zone. The body material preferably includes a more heavily doped pocket portion (120 or 280) situated along the other source/drain zone (102 or 262). The combination of the hypoabrupt vertical dopant profile below the first-mentioned source/drain zone, normally serving as the drain, and the pocket portion along the second-mentioned source/drain zone, normally serving as the source, enables the resultant asymmetric transistor to be especially suitable for high-speed analog applications.
    • 绝缘栅场效应晶体管(100,100V,140,150,150V,160,170,170V,180,180V,190,210,210W,220,220U,220V,220W,380或480)具有 低于其源极/漏极区(104或264)的垂直掺杂剂分布,用于减小源极/漏极区与邻接体材料(108或268)之间的pn结的寄生电容。 特别地,限定主体材料的导电类型的半导体掺杂剂的浓度在从该源极/漏极区向下移动到下面的主体材料位置时不小于10倍深度的上方增加至少10倍 半导体表面比该源/漏区。 主体材料优选地包括沿着另一个源极/漏极区(102或262)设置的更重掺杂的凹穴部分(120或280)。 通常用作漏极的第一提及的源极/漏极区下方的低破坏垂直掺杂物分布以及通常用作源的第二次提供的源极/漏极区的凹穴部分的组合使得所得的不对称晶体管能够 特别适用于高速模拟应用。
    • 58. 发明申请
    • Semiconductor architecture having field-effect transistors especially suitable for analog applications
    • 具有特别适用于模拟应用的场效应晶体管的半导体架构
    • US20080308878A1
    • 2008-12-18
    • US11981481
    • 2007-10-31
    • Constantin Bulucea
    • Constantin Bulucea
    • H01L27/088H01L27/092
    • H01L21/823807H01L21/823878H01L21/823892H01L27/092H01L27/1203H01L27/1207
    • An insulated-gate field-effect transistor (100, 100V, 140, 150, 150V, 160, 170, 170V, 180, 180V, 190, 210, 210W, 220, 220U, 220V, 220W, 380, or 480) has a hypoabrupt vertical dopant profile below one (104 or 264) of its source/drain zones for reducing the parasitic capacitance along the pn junction between that source/drain zone and adjoining body material (108 or 268). In particular, the concentration of semiconductor dopant which defines the conductivity type of the body material increases by at least a factor of 10 in moving from that source/drain zone down to an underlying body-material location no more than 10 times deeper below the upper semiconductor surface than that source/drain zone. The body material preferably includes a more heavily doped pocket portion (120 or 280) situated along the other source/drain zone (102 or 262). The combination of the hypoabrupt vertical dopant profile below the first-mentioned source/drain zone, normally serving as the drain, and the pocket portion along the second-mentioned source/drain zone, normally serving as the source, enables the resultant asymmetric transistor to be especially suitable for high-speed analog applications.
    • 绝缘栅场效应晶体管(100,100V,140,150,150V,160,170,170V,180,180V,190,210,210W,220,220U,220V,220W,380或480)具有 低于其源极/漏极区(104或264)的垂直掺杂剂分布,用于减小源极/漏极区与邻接体材料(108或268)之间的pn结的寄生电容。 特别地,限定主体材料的导电类型的半导体掺杂剂的浓度在从该源极/漏极区向下移动到下面的主体材料位置时不小于10倍深度的上方增加至少10倍 半导体表面比该源/漏区。 主体材料优选地包括沿着另一个源极/漏极区(102或262)设置的更重掺杂的凹穴部分(120或280)。 通常用作漏极的第一提及的源极/漏极区下方的低破坏垂直掺杂物分布以及通常用作源的第二次提供的源极/漏极区的凹穴部分的组合使得所得的不对称晶体管能够 特别适用于高速模拟应用。