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    • 58. 发明授权
    • Microelectronic process and structure
    • 微电子工艺与结构
    • US07022582B2
    • 2006-04-04
    • US10631587
    • 2003-07-31
    • Recai Sezi
    • Recai Sezi
    • H01L21/76H01L21/4763
    • H01L21/0212H01L21/02118H01L21/022H01L21/02282H01L21/31116H01L21/312H01L21/7682H01L21/76841
    • The present invention relates to a process for integrating air as dielectric in semiconductor devices, comprising the steps of: a. applying a layer of a dielectric (2) which is to be patterned to a substrate (1); b. patterning the dielectric layer (2) which has been applied; c. applying a conductor metal (3) for the patterned dielectric layer (2) and forming a common surface from the conductor metal (3) and the dielectric (2); d. applying a layer of an organic dielectric (4) to the layer produced in step c.; and e. bringing the coated substrate produced in this way into contact with a fluorine-containing compound in order to form an arrangement which has air as dielectric between conductor structures and has a continuous dielectric layer (4) on the top side, and to a semiconductor device with air layers as dielectric produced using this process.
    • 本发明涉及将空气作为电介质集成在半导体器件中的方法,包括以下步骤:a。 将待图案化的电介质层(2)施加到衬底(1)上; b。 图案化已经施加的介电层(2); C。 对所述图案化电介质层(2)施加导体金属(3)并从所述导体金属(3)和所述电介质(2)形成公共表面; d。 将一层有机电介质(4)施加到步骤c中制备的层; 和e。 将以这种方式制造的涂布基材与含氟化合物接触,以形成在导体结构之间具有作为电介质的空气的布置,并且在顶侧具有连续的电介质层(4),并且具有 空气层作为使用该方法产生的电介质。