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    • 51. 发明申请
    • THERMOELECTRIC MODULE DEVICE
    • 热电模块装置
    • US20070272291A1
    • 2007-11-29
    • US11753123
    • 2007-05-24
    • Akihiro MorimotoTakahiro Kimura
    • Akihiro MorimotoTakahiro Kimura
    • H01L35/28
    • H01L35/10H01L35/08H01L35/34
    • A thermoelectric module device includes a first substrate having inner and outer surfaces, a second substrate having inner and outer surfaces, a Peltier-junction module sandwiched between the inner surfaces of the first and second substrates, the Peltier-junction module being made up of a series of Peltier junctions including a pair of outermost Peltier junctions, a pair of power supply electrodes connected to the pair of the outermost Peltier junctions, respectively, and a metallization layer provided on the outer surface of the second substrate for being soldered to a package, the metallization layer being divided into spaced first and second portions which correspond to the Peltier-junction module and the pair of power supply electrodes, respectively.
    • 热电模块装置包括具有内表面和外表面的第一基板,具有内表面和外表面的第二基板,夹在第一和第二基板的内表面之间的珀耳帖结模块,珀耳帖结模块由 一系列包括一对最外层的珀尔帖接头的珀尔帖接头,分别连接到一对最外层的珀尔帖接头的一对电源电极以及设在第二基板的外表面上用于焊接到封装的金属化层, 金属化层分别分别对应于珀耳帖结模块和一对电源电极的间隔开的第一和第二部分。
    • 52. 发明申请
    • Vacuum Tube And Vacuum Tube Manufacturing Apparatus And Method
    • 真空管及真空管制造装置及方法
    • US20070210715A1
    • 2007-09-13
    • US10594896
    • 2005-03-31
    • Tadahiro OhmiAkihiro Morimoto
    • Tadahiro OhmiAkihiro Morimoto
    • H01J7/02H01J9/38H01J9/46
    • H01J9/395H01J7/02H01J9/38H01J9/385H01J17/20H01J21/00H01J37/18H01J61/20H01J61/24
    • With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.
    • 对于具有密封在其中的放电气体的减压容器的真空管,常规地发生诸如由于有机材料引起的排出效率降低,残留在减压容器中的水分或氧气的问题。 现在已经发现,选择水分子的数量,有机气体的分子数和残留在减压容器中的氧分子的数量与导致电气的气体的分子数的关系 放电允许通过上述剩余气体减少不利影响。 具体而言,选择上述放电气体的分子数为上述剩余气体的10倍以上的分子数量,可以减少上述剩余气体的不利影响。
    • 54. 发明授权
    • Rotary silicon wafer cleaning apparatus
    • 旋转硅片清洗装置
    • US07103990B2
    • 2006-09-12
    • US10498800
    • 2003-09-11
    • Tadahiro OhmiYasuyuki ShiraiTakumi FujitaYukio MinamiNobukazu IkedaAkihiro MorimotoKoji Kawada
    • Tadahiro OhmiYasuyuki ShiraiTakumi FujitaYukio MinamiNobukazu IkedaAkihiro MorimotoKoji Kawada
    • F26B5/08
    • H01L21/67034H01L21/02052
    • It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the silicon wafer after completion of chemical and pure water cleaning treatments.According to the present invention, a rotation type silicon wafer cleaning device has a silicon wafer support/rotation driving mechanism inside the case body for cleaning the silicon wafer at the post chemical cleaning with pure water, drying and hydrogen termination treatments on the outer surface of a silicon wafer is performed by means of installing a silicon wafer drying device comprising a gas supply panel attached to a case body to supply a mixed gas of the hydrogen gas and inactive gas containing a hydrogen gas of more than 0.05%, a mixed gas supply pipe coupled to a gas mixer of the afore-mentioned gas supply panel at one end, a mixed gas heating device to heat the mixed gas in the afore-mentioned gas supply pipe, and a hydrogen radical formation apparatus equipped with a platinum coating film to form hydrogen radical at the gas contacting part where to a high temperature gas heated with the afore-mentioned mixed gas heating device touches, thus to gush out the mixed gas containing hydrogen radical formed with the afore-mentioned radical formation apparatus onto the rotating silicon wafer after cleaning is completed.
    • 本发明的目的是提供一种旋转型硅晶片清洁装置,以在化学和纯净水清洗处理完成之后通过在硅晶片上提供更好的氢终止来进一步提高硅晶片的稳定性。 根据本发明,旋转型硅晶片清洗装置在壳体内部具有硅晶片支撑/旋转驱动机构,用于在后期化学清洗时用纯水清洗硅晶片,在外表面上进行干燥和氢终止处理 通过安装硅晶片干燥装置来执行硅晶片,所述硅晶片干燥装置包括附接到壳体的气体供应板,以供应氢气和含有大于0.05%的氢气的惰性气体的混合气体,混合气体供应 一端连接上述气体供给面板的气体混合器的管道,将上述气体供给管内的混合气体加热的混合气体加热装置以及配备有铂镀膜的氢自由基形成装置, 在与上述混合气体加热装置加热的高温气体接触的气体接触部分处形成氢自由基,从而喷出混合气体 在完成清洁之后,将上述自由基形成装置形成的氢基团固定在旋转的硅晶片上。
    • 59. 发明授权
    • Low flow rate moisture supply process
    • 低流量水分供应过程
    • US06334962B1
    • 2002-01-01
    • US09207763
    • 1998-12-09
    • Yukio MinamiKoji KawadaYoshikazu TanabeNobukazu IkedaAkihiro Morimoto
    • Yukio MinamiKoji KawadaYoshikazu TanabeNobukazu IkedaAkihiro Morimoto
    • C01B500
    • F22B1/003C01B5/00
    • A process of supplying moisture at low flow rates which permits high precision control of the flow of moisture to a semiconductor manufacturing line from an apparatus for the generation of moisture, characterized in that the flow of hydrogen to a moisture-generating reactor is controlled by means of a flow controller in such a way that an amount of hydrogen as fed is gradually increased from the start and reaches a specific set level such that when a specific time has passed, a predetermined rate of moisture begins to be produced and supplied to the semiconductor manufacturing line. The moisture is generated in the apparatus for generation of moisture in which hydrogen and oxygen are (a) fed into a reactor provided with a coat of platinum on the wall in the interior space, (b) enhanced in reactivity by the platinum catalytic action, and (c) caused to instantaneously react with each other at a temperature lower than the ignition point to produce moisture without undergoing combustion at a high temperature.
    • 以低流量供应水分的方法,其允许从用于产生水分的装置对半导体生产线的水分流的高精度控制,其特征在于,通过装置控制氢气流向产生水分的反应器 的流量控制器,使得所供给的氢气的量从开始逐渐增加并达到特定设定水平,使得当经过特定时间时,开始产生预定的水分率并将其供应到半导体 生产线。 在用于产生水分的装置中产生水分,其中(a)在内部空间的壁上被供给到设置有铂层的反应器的反应器中,(b)通过铂催化作用增强反应性, 和(c)在低于点火点的温度下彼此瞬间反应以产生湿气,而不会在高温下经历燃烧。