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    • 51. 发明授权
    • Thin film transistor and method of fabricating the same
    • 薄膜晶体管及其制造方法
    • US07485552B2
    • 2009-02-03
    • US11329290
    • 2006-01-11
    • Byoung-Keon ParkKi-Yong LeeJin-Wook SeoTae-Hoon Yang
    • Byoung-Keon ParkKi-Yong LeeJin-Wook SeoTae-Hoon Yang
    • H01L21/20H01L21/36
    • H01L21/02672H01L21/2022H01L27/1277H01L27/1296H01L29/04H01L29/66757H01L29/78675Y10S438/923
    • A thin film transistor and method of fabricating the same are provided. The thin film transistor is characterized in that low angle grain boundaries formed in a channel layer in a semiconductor layer pattern is tilted −15 to 15° with respect to a current flowing direction. The method includes: forming an amorphous silicon layer on a substrate; forming a first capping layer on the amorphous silicon layer; forming a second capping layer on the first capping layer, and patterning the second capping layer such that seeds are formed in a line shape; forming a metal catalyst layer on the patterned second capping layer; diffusing the metal catalyst; and crystallizing and patterning the amorphous silicon layer to form a semiconductor layer pattern. Thus, a channel layer having an angle nearly parallel to the current flowing direction may be formed in a low angle grain boundary by forming and crystallizing the line-shaped seeds. In other words, the device characteristics may be improved and uniformed by adjusting a position and a direction of the crystal growth.
    • 提供薄膜晶体管及其制造方法。 薄膜晶体管的特征在于,形成在半导体层图案的沟道层中的低角度晶界相对于电流流动方向倾斜-15至15°。 该方法包括:在衬底上形成非晶硅层; 在所述非晶硅层上形成第一覆盖层; 在所述第一覆盖层上形成第二覆盖层,并且使所述第二覆盖层图案化,使得种子形成为线状; 在所述图案化的第二覆盖层上形成金属催化剂层; 扩散金属催化剂; 并且使非晶硅层结晶并图形化以形成半导体层图案。 因此,通过形成并结晶线状晶种,可以在低角度晶界中形成具有与电流流动方向几乎平行的角度的沟道层。 换句话说,可以通过调整晶体生长的位置和方向来改善和均匀的器件特性。
    • 53. 发明申请
    • METHOD OF FABRICATING PMOS THIN FILM TRANSISTOR
    • 制造PMOS薄膜晶体管的方法
    • US20070284581A1
    • 2007-12-13
    • US11741307
    • 2007-04-27
    • Tae-hoon YangKi-yong LeeJin-wook SeoByoung-keon Park
    • Tae-hoon YangKi-yong LeeJin-wook SeoByoung-keon Park
    • H01L21/335H01L29/04
    • H01L29/66757H01L21/02422H01L21/02488H01L21/02532H01L21/02672H01L27/1277
    • A method of fabricating a p-type thin film transistor (TFT) includes: performing a first annealing process on a substrate to diffuse a metal catalyst through a capping layer into a surface of an amorphous silicon layer, and to crystallize the amorphous silicon layer to a polycrystalline silicon layer due to the diffused metal catalyst; removing the capping layer; patterning the polycrystalline silicon layer to form a semiconductor layer; forming a gate insulating layer and a gate electrode on the substrate; implanting p-type impurity ions into the semiconductor layer; and implanting a gettering material into the semiconductor layer and performing a second annealing process to remove the metal catalyst. Herein, the p-type impurity ions are implanted at a dose of 6×1013/cm2 to 5×1015/cm2, and the gettering material is implanted at a dose of 1×1011/cm2 to 3×1015/cm2.
    • 一种制造p型薄膜晶体管(TFT)的方法包括:在衬底上进行第一退火处理,将金属催化剂通过覆盖层扩散到非晶硅层的表面中,并将非晶硅层结晶成 由于扩散金属催化剂而导致的多晶硅层; 去除覆盖层; 图案化多晶硅层以形成半导体层; 在基板上形成栅极绝缘层和栅电极; 将p型杂质离子注入到半导体层中; 以及将吸气材料注入到所述半导体层中,并进行第二退火处理以除去所述金属催化剂。 这里,p型杂质离子以6×10 3 / cm 2至5×10 15 / cm 2的剂量注入, / SUP>,并且吸除材料以1×10 11 / cm 2至3×10 15 / cm 2的剂量注入, / SUP>。
    • 60. 发明申请
    • ORGANIC LIGHT EMITTING DIODE DISPLAY
    • 有机发光二极管显示
    • US20120001156A1
    • 2012-01-05
    • US13077045
    • 2011-03-31
    • Kyu-Sik CHOWon-Kyu LEETae-Hoon YANGByoung-Kwon CHOOSang-Ho MOONBo-Kyung CHOIYong-Hwan PARKJoon-Hoo CHOIMin-Chul SHINYun-Gyu LEE
    • Kyu-Sik CHOWon-Kyu LEETae-Hoon YANGByoung-Kwon CHOOSang-Ho MOONBo-Kyung CHOIYong-Hwan PARKJoon-Hoo CHOIMin-Chul SHINYun-Gyu LEE
    • H01L51/52
    • H01L27/3279H01L27/124H01L27/1248H01L27/3244H01L27/3262H01L27/3265
    • An organic light emitting diode display is disclosed. The organic light emitting diode display includes: a substrate including a first region and a second region, a first gate electrode formed over the first region, a second gate electrode formed over the second region, a first gate insulator formed on the first gate electrode, a second gate insulator formed on the second gate electrode, a first semiconductor layer formed on the first gate insulator, the first semiconductor layer including a first channel region, a second semiconductor layer formed on the second gate insulator, the second semiconductor layer including a second channel region, an interlayer insulator formed over the substrate and over at least part of the first and second semiconductor layers, a first etching stop layer formed over the first channel region and surrounded by the interlayer insulator, a second etching stop layer formed over the second channel region and surrounded by the interlayer insulator, a first source electrode and a first drain electrode contacting the first semiconductor layer through the interlayer insulator, and a second source electrode and a second drain electrode contacting the second semiconductor layer through the interlayer insulator.
    • 公开了一种有机发光二极管显示器。 有机发光二极管显示器包括:包括第一区域和第二区域的基板,形成在第一区域上的第一栅极电极,形成在第二区域上的第二栅极电极,形成在第一栅电极上的第一栅极绝缘体, 形成在所述第二栅电极上的第二栅极绝缘体,形成在所述第一栅极绝缘体上的第一半导体层,所述第一半导体层包括第一沟道区,形成在所述第二栅极绝缘体上的第二半导体层,所述第二半导体层包括第二栅极绝缘体, 沟道区域,形成在所述衬底上并且在所述第一和第二半导体层的至少一部分上方的层间绝缘体,形成在所述第一沟道区域上并被所述层间绝缘体包围的第一蚀刻停止层,形成在所述第二沟槽区上的第二蚀刻停止层 沟道区域并被层间绝缘体包围,第一源电极和与其接触的第一漏电极 e通过层间绝缘体的第一半导体层,以及通过层间绝缘体与第二半导体层接触的第二源电极和第二漏电极。