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    • 58. 发明授权
    • Apparatus for eliminating residual nitrogen contamination in epitaxial
layers of silicon carbide and resulting product
    • 用于消除碳化硅外延层和所得产品中的残余氮污染的装置
    • US5119540A
    • 1992-06-09
    • US558196
    • 1990-07-24
    • Hua-Shuang KongThomas G. ColemanCalvin H. Carter, Jr.
    • Hua-Shuang KongThomas G. ColemanCalvin H. Carter, Jr.
    • C30B25/02C30B25/12
    • C30B25/12C30B25/02C30B29/36Y10T428/131
    • The invention is a method, and associated apparatus and product, of forming extremely pure epitaxial layers of silicon carbide by reducing the carrier concentration of residual nitrogen in silicon carbide formed by chemical vapor deposition processes. The method comprises placing a substrate upon which an epitaxial layer of silicon carbide will form upon a susceptor, and in which the susceptor is formed of a material that will not generate undesired nitrogen-containing out gases at the temperatures at which chemical vapor deposition of silicon carbide will take place from appropriate source gases. The substrate is heated to a temperature at which chemical vapor deposition of silicon carbide will take place from appropriate source gases by inductively heating the susceptor using an induction frequency that heats the susceptor material. Silicon-containing and carbon-containing source gases are then introduced that will form an epitaxial layer of silicon carbide upon the heated substrate.
    • 本发明是通过降低通过化学气相沉积工艺形成的碳化硅中的残留氮的载流子浓度,形成极其纯的碳化硅外延层的方法和相关的装置和产品。 该方法包括放置一个衬底,碳化硅外延层将在其上形成在感受体上,并且其中感受体由在硅化学气相沉积的温度下不会产生不需要的含氮气体的材料形成 碳化物将从适当的源气体发生。 将衬底加热到​​通过使用加热感受体材料的感应频率感应加热感受器从适当的源气体发生碳化硅的化学气相沉积的温度。 然后引入含硅和含碳源气体,其将在加热的基底上形成碳化硅的外延层。