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    • 49. 发明申请
    • BOLOMETER PIXEL PROVIDED WITH A MIM INTEGRATION CAPACITOR
    • 带有MIM集成电容器的BOLOMETER PIXEL
    • US20100243892A1
    • 2010-09-30
    • US12720340
    • 2010-03-09
    • Bertrand DUPONT
    • Bertrand DUPONT
    • G01J5/30G01J5/02
    • G01J5/22G01J5/02G01J5/024H01L23/5223H01L27/14618H01L27/14669H01L28/60H01L2924/0002H04N5/3651H01L2924/00
    • A thermal imaging microelectronic device comprising: a support (200), a plurality of metal levels (M1, . . . , M5, M6) for interconnecting electronic components formed on the support, an array of thermal detectors formed on the support, each detector including a membrane (210) with which radiant energy may be absorbed and one or more electric signals may be provide depending on the absorbed radiant energy, and means for reading out the electric signals from the membrane, the readout means being integrated to the support, at least several of said detectors having readout means provided with an integrator comprising at least one MIM integration capacitor formed facing the membrane, the MIM capacitor having at least one upper plate (244) made in a given interconnection metal level of said plurality of interconnection metal levels (M1, . . . , M5, M6).
    • 一种热成像微电子器件,包括:支撑件(200),用于互连形成在所述支撑件上的电子部件的多个金属级(M1,...,M5,M6),形成在所述支撑件上的热检测器阵列,每个检测器 包括可以吸收辐射能并根据吸收的辐射能提供一个或多个电信号的膜(210),以及用于从所述膜读出电信号的装置,所述读出装置被集成到所述支架上, 所述检测器中的至少几个具有读出装置,该读出装置设置有积分器,该积分器包括面向膜的至少一个MIM积分电容器,所述MIM电容器具有至少一个上板(244),所述上板在所述多个互连金属的给定互连金属层 水平(M1,...,M5,M6)。
    • 50. 发明授权
    • Spectral photoelectric measurement transformer
    • 光谱光电测量变压器
    • US07633051B2
    • 2009-12-15
    • US11958608
    • 2007-12-18
    • Peter Ehbets
    • Peter Ehbets
    • G01J5/30
    • G01J3/36G01J3/02G01J3/0205G01J3/0256G01J3/51G01J3/513G01J2003/1234
    • A spectral photoelectric measurement transformer comprises an array (10) of photoelectric transformer elements and dielectric interference bandpass filters (22a, 22b) disposed on a common filter support (21) connected upstream of them for sensitizing the transformer elements to different wavelength ranges of the measurement light. The bandpass filters are divided into a number of filter groups, each of which contains the same different bandpass filters within the filter group. An optical deflector element (30) spectrally shifts the effective bandpass curves of the bandpass filters of all the filter groups except one so that the effective bandpass curves of all the bandpass filters have different spectral positions. As a result, a multiplication of the filter channels effectively made available can be achieved using only a few different bandpass filters. Due to the small number of different bandpass filters, the measurement transformer is inexpensive to manufacture.
    • 光谱光电测量变压器包括光电变压器元件的阵列(10)和设置在其上游连接的公共滤波器支架(21)上的介质干涉带通滤波器(22a,22b),用于将变压器元件感测到测量的不同波长范围 光。 带通滤波器被分成多个滤波器组,每个滤波器组在滤波器组内包含相同的不同带通滤波器。 光偏转器元件(30)对所有滤光器组的带通滤波器的有效带通曲线进行光谱移位,除了所有滤光器组之外,所有带通滤波器的有效带通曲线具有不同的光谱位置。 结果,可以使用仅使用几个不同的带通滤波器来实现有效提供的滤波器通道的乘法。 由于少量不同的带通滤波器,测量变压器制造成本低廉。