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41. 发明授权

US07868490B2 Actuator 有权
标题翻译：执行器
公开(公告)号：US07868490B2
公开(公告)日：2011-01-11
申请号：US12333888
申请日：2008-12-12
申请人： Takuya Nagai , Yoshihiro Someno , Naoyuki Tokuchi
发明人： Takuya Nagai , Yoshihiro Someno , Naoyuki Tokuchi
IPC分类号： H02K41/00
CPC分类号： H02K41/0358 , G02B26/085 , G02B26/101 , G02B26/105
摘要： When currents are applied to driving coils, electromagnetic forces are generated between the currents and magnetic fluxes passing through gaps, a shaft member is swung in one direction, and a tilt angle of a mirror (controlled object) changes relative to a support center point. Electromotive forces generated in detection coils when the magnetic fluxes pass through the detection coils are given as feedback signals to a control unit. The control unit generates currents on the basis of the feedback signals, and applies the currents to the driving coils. By detecting the velocity of the mirror during swinging with the detection coils, the structure of the actuator can be simplified. Further, the responsivity can be increased, and the tilt angle of the mirror can be detected with high accuracy.
摘要翻译：当电流施加到驱动线圈时，在电流和通过间隙的磁通之间产生电磁力，轴构件在一个方向上摆动，并且反射镜（受控对象）的倾斜角相对于支撑中心点改变。当磁通量通过检测线圈时，在检测线圈中产生的电动势作为反馈信号被提供给控制单元。控制单元基于反馈信号生成电流，并将电流施加到驱动线圈。通过在用检测线圈摆动时检测反射镜的速度，可以简化致动器的结构。此外，可以提高响应度，并且可以高精度地检测反射镜的倾斜角度。

42. 发明授权

US07830046B2 Damper for a stage assembly 有权
标题翻译：舞台组装的阻尼器
公开(公告)号：US07830046B2
公开(公告)日：2010-11-09
申请号：US11725024
申请日：2007-03-16
申请人： Michael Binnard , Douglas C. Watson , Jean-Marc Gery
发明人： Michael Binnard , Douglas C. Watson , Jean-Marc Gery
IPC分类号： H02K41/00
CPC分类号： H02K41/031 , H02K1/278 , H02K7/09 , H02K7/104 , H02K16/00 , H02K49/04
摘要： A stage assembly (220) that moves a work piece (200) along a first axis includes a stage base (236), a guide bar (238), a device table (240) that retains the work piece (200), a mover assembly (242), and a damper (225). The damper (225) can be a passive, electromagnetic damper that passively dampens movement of the guide bar (238) relative to the stage base (236) along a second axis that is orthogonal to the first axis. The damper (225) can include a magnet array (356) and a conductor (366) that is positioned in a magnetic field that surrounds the magnet array (356). With this design, relative movement between the guide bar (238) and the stage base (236) along the second axis induces the flow of current in the conductor (366) and eddy current damping. The damper (225) can include a first damper subassembly (252A) that is coupled to the guide bar (238) and a second damper subassembly (252B) that is coupled to the stage base (236).
摘要翻译：沿着第一轴线移动工件（200）的台架组件（220）包括台架（236），导杆（238），保持工件（200）的装置台（240）组件（242）和阻尼器（225）。阻尼器（225）可以是被动的电磁阻尼器，其被动地抑制导向杆（238）相对于载置台（236）沿着与第一轴线正交的第二轴线的运动。阻尼器（225）可以包括位于围绕磁体阵列（356）的磁场中的磁体阵列（356）和导体（366）。利用这种设计，沿着第二轴的引导杆（238）和台架（236）之间的相对运动引起导体（366）中的电流流动和涡流阻尼。阻尼器（225）可以包括联接到导杆（238）的第一阻尼器子组件（252A）和耦合到平台基座（236）的第二阻尼器子组件（252B）。

43. 发明授权

US07804207B2 Positioning apparatus, exposure apparatus, and device manufacturing method using repulsion force generation 失效
标题翻译：使用排斥力产生的定位装置，曝光装置和装置制造方法
公开(公告)号：US07804207B2
公开(公告)日：2010-09-28
申请号：US11874482
申请日：2007-10-18
申请人： Yugo Shibata
发明人： Yugo Shibata
IPC分类号： H02K41/03 , H02K41/00
CPC分类号： H02K41/031 , G03F7/70758 , G03F7/70766 , H02K7/106 , H02K7/1185 , H02K16/00 , H02K2201/18
摘要： This invention provides a positioning apparatus which improves the throughput by accelerating a stage in a shorter period of time while ensuring a fine positioning characteristic. A movable element is arranged on the side of a stage while a stator is arranged on the side of a base guide such that a pair of magnets of the same polarity face each other at each edge of the stroke region of the stage. This generates a repulsion force which acts against the thrust of the stage and corresponds to the facing area of the pair of magnets of the same polarity. The positioning apparatus further includes a large-thrust linear motor. The large-thrust linear motor assists the repulsion force by applying a thrust exceeding the repulsion force to the stage to increase the facing area of the pair of magnets of the same polarity.
摘要翻译：本发明提供了一种定位装置，其通过在更短的时间段内加速阶段来提高吞吐量，同时确保精细的定位特性。可移动元件设置在台架的侧面，同时定子布置在基座导向件的侧面上，使得相同极性的一对磁体在平台的笔划区域的每个边缘处彼此面对。这产生抵抗载物台的推力作用并且对应于相同极性的一对磁体的相对面积的排斥力。定位装置还包括大推力线性马达。大推力线性马达通过将超过推斥力的推力施加到载物台来增加排斥力，从而增加相同极性的一对磁体的相对面积。

44. 发明授权

US07768157B2 Brushless motor 有权
标题翻译：无刷电机
公开(公告)号：US07768157B2
公开(公告)日：2010-08-03
申请号：US11975149
申请日：2007-10-17
申请人： Kesatoshi Takeuchi
发明人： Kesatoshi Takeuchi
IPC分类号： H02K41/00
CPC分类号： H02K21/12 , B60L7/14 , B60L11/005 , B60L11/1803 , B60L11/1877 , B60L2200/12 , B60L2220/16 , B60L2250/16 , B60L2270/145 , H02K3/47 , H02K21/04 , H02K21/22 , H02K21/24 , H02K41/03 , Y02T10/641 , Y02T10/7005 , Y02T10/7022 , Y02T10/705
摘要： The brushless motor includes a first permanent magnet magnetized in a direction perpendicular to the drive direction, and a electromagnetic coil wound around an axis parallel to the drive direction. The drive control circuit supplies a drive current in a given first electric current direction to the electromagnetic coil without changing the electric current direction to operate the brushless motor in the drive direction.
摘要翻译：无刷电动机包括沿与驱动方向垂直的方向被磁化的第一永磁体和围绕平行于驱动方向的轴线缠绕的电磁线圈。驱动控制电路将给定的第一电流方向的驱动电流提供给电磁线圈，而不改变电流方向以在驱动方向上操作无刷电动机。

45. 发明授权

US07732951B2 Moving-magnet type linear motor 失效
标题翻译：移动磁铁式直线电机
公开(公告)号：US07732951B2
公开(公告)日：2010-06-08
申请号：US12022398
申请日：2008-01-30
申请人： Naomasa Mukaide
发明人： Naomasa Mukaide
IPC分类号： H02K41/00
CPC分类号： H02K41/03 , H02K5/18 , H02K5/20 , H02K9/22 , H02K2201/18
摘要： A moving-magnet type linear motor is provided with cooling blocks which are attached to each of stator bases alongside a coreless coil and which allow coolant to flow therethrough for cooling the coreless coil. Each of the cooling blocks has in a base end portion thereof a fluid passage for flowing coolant and at an extreme end portion thereof a plurality of sheet-like protrusions like fins which are arranged alongside a part of the circumferential surface of the coreless coil with a clearance between each protrusion and the next thereto. Each cooling block is thermally closely jointed with the coreless coil at the extreme ends of the sheet-like protrusions.
摘要翻译：移动磁体式线性电动机设置有冷却块，该冷却块在无铁芯线圈旁边附接到每个定子基座，并且允许冷却剂流过其中以冷却无芯线圈。每个冷却块在其基端部分具有用于流动冷却剂的流体通道，并且在其末端部分处有多个片状突起，如鳍状物，其沿着无芯线圈的圆周表面的一部分布置，每个突起与其下方之间的间隙。每个冷却块在片状突起的最末端与无芯线圈热密接。

46. 再颁专利

USRE41232E1 Wafer positioner with planar motor and mag-lev fine stage 有权
标题翻译：具有平面电机和mag-lev精细级的晶圆定位器
公开(公告)号：USRE41232E1
公开(公告)日：2010-04-20
申请号：US10876201
申请日：2004-06-24
申请人： Andrew J. Hazelton , W. Thomas Novak , Akimitsu Ebihara
发明人： Andrew J. Hazelton , W. Thomas Novak , Akimitsu Ebihara
IPC分类号： H01L21/68 , G03F9/00 , G03B27/42 , H02K41/00 , G05B11/16
CPC分类号： H02K41/03 , G03F7/70716 , G03F7/70758 , H02K2201/18
摘要： A positioning stage assembly having a coarse stage which includes a planar motor driveable in at least two degrees of freedom, and a fine stage positioned on the coarse stage which is driveable in at least three degrees of freedom with respect to the coarse stage. More preferably, the fine stage is driveable in six degrees of freedom and includes variable reluctance actuators for positioning in three degrees of freedom.
摘要翻译：一种具有粗糙台阶的定位台组件，其包括可以至少两个自由度驱动的平面电机，以及位于粗糙台上的精细台，所述精细平台可相对于粗略平台至少三个自由度驱动。更优选地，精细级可以在六个自由度中驱动，并且包括用于以三个自由度定位的可变磁阻致动器。

47. 发明授权

US07696652B2 Electromagnetic actuator, method of manufacturing a part of an electromagnetic actuator, and lithographic apparatus comprising and electromagnetic actuator 失效
标题翻译：电磁致动器，制造电磁致动器的一部分的方法，以及包括电磁致动器的光刻设备
公开(公告)号：US07696652B2
公开(公告)日：2010-04-13
申请号：US11262962
申请日：2005-11-01
申请人： Sven Antoin Johan Hol , Erik Roelof Loopstra
发明人： Sven Antoin Johan Hol , Erik Roelof Loopstra
IPC分类号： H02K41/00
CPC分类号： H02K41/03 , G03F7/70758 , G03F7/70858 , H01J2329/00 , H02K9/00
摘要： A lithographic apparatus has a patterning support constructed to support a patterning device and a substrate support constructed to support a substrate. At least one of the patterning support and the substrate support is moved by an electromagnetic actuator. The actuator has a first part and a second part that are movable relative to each other. The first part has a coil structure, and the second part including a plurality of permanent magnets interacting with the coil structure. The second part is provided with a cooling structure arranged adjacent the permanent magnets. Cooling ducts are arranged between adjacent permanent magnets, or on a side of the permanent magnets facing the coil structure.
摘要翻译：光刻设备具有构造成支撑图案形成装置和构造成支撑衬底的衬底支撑件的图形化支撑件。图案形成支撑件和基板支撑件中的至少一个由电磁致动器移动。致动器具有可相对于彼此移动的第一部分和第二部分。第一部分具有线圈结构，并且第二部分包括与线圈结构相互作用的多个永磁体。第二部分设置有与永磁体相邻布置的冷却结构。冷却管道布置在相邻的永磁体之间，或者在面向线圈结构的永磁体的一侧。

48. 发明授权

US07687943B2 Electricity generating wheel system 失效
标题翻译：发电轮系统
公开(公告)号：US07687943B2
公开(公告)日：2010-03-30
申请号：US11869455
申请日：2007-10-09
申请人： Doug Lunde
发明人： Doug Lunde
IPC分类号： H02K41/00 , F02B63/00
CPC分类号： H02K7/1846 , H02K7/1892 , H02K35/02
摘要： An system and apparatus for capturing electricity comprised of: a wheel and a fixed conducting rod, both in electrical contact with the wheel and at least one electrical component or system in which the wheel is rotatable about an axis. The wheel is comprised of: a rotatable hub; a rotatable conducting rod within the rotatable hub; at least one electricity generating device positioned on the hub and comprised of: a generally hollow housing having a distal end and a proximate end; a wire coil fixed within the housing and having an axial bore therethrough; a translatable magnet; and at least one wire in electrical contact with the wire coil and the rotatable hub; wherein as the wheel is rotated, the translatable magnet laterally translates back and forth within the housing and passing through the wire coil to generate the electric current.
摘要翻译：一种用于捕获电力的系统和设备，包括：车轮和固定导电杆，两者都与车轮电接触，并且至少一个电气部件或系统，其中轮可以围绕轴线旋转。车轮包括：可旋转轮毂; 可旋转轮毂内的可旋转导电杆; 至少一个发电装置，其定位在所述轮毂上并且包括：具有远端和近端的大致中空的壳体; 线圈固定在所述壳体内并具有穿过其的轴向孔; 可翻译的磁铁; 以及与所述线圈和所述可旋转轮毂电接触的至少一根线; 其中当车轮旋转时，可平移的磁体在壳体内横向平移并穿过线圈线圈以产生电流。

49. 发明授权

US07679231B2 Driving device and light amount controller 失效
标题翻译：驱动装置和光量控制器
公开(公告)号：US07679231B2
公开(公告)日：2010-03-16
申请号：US11460108
申请日：2006-07-26
申请人： Hiromu Yasuda
发明人： Hiromu Yasuda
IPC分类号： H02K37/12 , H02K41/00 , G03B9/08
CPC分类号： H02K26/00 , G03B9/14 , G03B9/22 , H01F7/14
摘要： A driving device which makes it possible to reduce the moment of inertia of a rotor and increase torque. A magnet is formed to have a hollow cylindrical shape and has magnetized sections which are magnetized to have alternately different poles in a circumferential direction thereof. A coil is wound coaxially with the magnet and is disposed in axially side-by-side relation to the magnet. A stator yoke is formed of a soft magnetic material and fixes the magnet and the coil. A rotor yoke is formed of a soft magnetic material, and has magnetic pole portions formed in opposed relation to the magnetized sections, for being magnetized by the coil. The rotor yoke is supported in a manner rotatable with respect to the stator yoke. An rotation restricting part limits a range of rotation of the rotor yoke within a predetermined angle.
摘要翻译：一种驱动装置，其能够减小转子的转动惯量并增加转矩。磁体形成为具有中空圆柱形状并且具有被磁化以在其圆周方向上具有交替不同极点的磁化部分。线圈与磁体同轴地缠绕并且与磁体轴向并排设置。定子磁轭由软磁材料形成，并固定磁体和线圈。转子磁轭由软磁材料形成，并且具有与磁化部分相对的磁极部分，用于被线圈磁化。转子轭以可相对于定子磁轭旋转的方式支撑。旋转限制部将转子轭的旋转范围限制在规定角度。

50. 发明授权

US07656108B2 Linear motor and transducer arrangement therefor 失效
标题翻译：线性电机及其换能器装置
公开(公告)号：US07656108B2
公开(公告)日：2010-02-02
申请号：US10587409
申请日：2005-01-26
申请人： Ian David Rose
发明人： Ian David Rose
IPC分类号： H02K41/00
CPC分类号： G01D5/24452 , G01D5/145 , G01D5/2448 , G01D5/2449 , H02K29/08 , H02K41/02 , H02P6/006 , Y10T29/49009
摘要： An improved linear motor which compensates for manufacturing or assembly errors in the positioning of the magnetic field detectors. The linear motor synthesizes a correction signal which can be simply combined (for example added) to the output of one of the magnetic field detectors so as to ensure that the magnetic field detector outputs have the correct phase relationship. This in turn ensures that accurate positioning of the rotor relative to the stator can be achieved. In a preferred embodiment, a deliberate error is introduced into the positioning of the magnetic field detectors and this error, plus any error due to manufacturing or assembly tolerances, is corrected using the correction signal. This allows a simplified correction circuit which only corrects for phase offset errors in one direction to be used.
摘要翻译：一种改进的线性电机，用于补偿磁场检测器定位中的制造或组装误差。线性电动机合成可以简单地组合（例如添加）到一个磁场检测器的输出的校正信号，以确保磁场检测器输出具有正确的相位关系。这又确保了可以实现转子相对于定子的精确定位。在优选实施例中，故障误差被引入到磁场检测器的定位中，并且使用校正信号校正该误差加上由制造或组装公差引起的任何误差。这允许简化的校正电路，其仅纠正要使用的一个方向上的相位偏移误差。

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