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    • 47. 发明授权
    • Inspection tool
    • 检验工具
    • US4040745A
    • 1977-08-09
    • US670489
    • 1976-03-25
    • James Garman BellesonKendall Clark
    • James Garman BellesonKendall Clark
    • G01B11/00G01N21/89G01R31/265G01R31/308G01R31/309G02B27/17
    • G01N21/898G01B11/002G01R31/2656G01R31/308G01R31/309G01N21/956
    • This patent discloses an improved inspection tool for rapidly inspecting miniature electronic conductor patterns, circuits and the like. The tool focuses a laser beam to a small laser spot that raster scans a large conductor pattern area on the workpiece being inspected. Reflected laser light from the workpiece impinges upon a light detector that generates electrical signals according to the presence or absence of conductor pattern materialon the workpiece at the momentary X and Y coordinate of the scanning laser spot. The light detector signals are compared with a previously encoded data image of the correct circuit pattern for the X and Y coordinates of the scanning laser spot. When the signals and the data agree at all X and Y coordinate points the workpiece is accepted. If the signals and the data do not agree at one or more X and Y coordinate points a defect in the circuit pattern is indicated. A defect may indicate out-of-tolerance dimensions, possible electrical short circuits, and/or open circuits. The extent of a defect may be determined by adjacent X and Y coordinate points and suitable computer programming, while workpieces having extended or out-of-tolerance defects are rejected. The improved disclosed inspection tool includes apparatus for automatically compensating for variations in the workpieces, and to effect registration for the scanning laser spot.
    • 该专利公开了一种用于快速检查微型电子导体图案,电路等的改进的检查工具。 该工具将激光束聚焦到一个小的激光光斑上,光栅扫描被检测工件上的大导体图案区域。 来自工件的反射激光照射在根据扫描激光光斑的瞬时X和Y坐标处工件上存在或不存在导体图案材料的电信号的光检测器。 将光检测器信号与用于扫描激光光斑的X和Y坐标的正确电路图案的先前编码的数据图像进行比较。 当所有X和Y坐标点的信号和数据一致时,工件被接受。 如果信号和数据在一个或多个X和Y坐标点不一致,则指示电路图案中的缺陷。 缺陷可能表示超公差尺寸,可能的电短路和/或开路。 缺陷的程度可以通过相邻的X和Y坐标点和合适的计算机编程来确定,而具有扩展或超出公差缺陷的工件被拒绝。 改进的公开的检查工具包括用于自动补偿工件的变化并且实现扫描激光点的配准的装置。